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G-TRAN Series
Pirani Vacuum gauge
Measuring Unit
Instruction Manual
This manual is for this unit units of the
following serial numbers:
S/N:00001 and higher.
Read this manual before operation and keep it at
hand for immediate reference.
No.SK00-9657-EI-003-01
SPU
Components Division,
ULVAC, Inc.
http://www.ulvac.co.jp/
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Summary of Contents for Ulvac SPU
- Page 1 Pirani Vacuum gauge Measuring Unit Instruction Manual This manual is for this unit units of the following serial numbers: S/N:00001 and higher. Read this manual before operation and keep it at hand for immediate reference. Components Division, ULVAC, Inc. http://www.ulvac.co.jp/...
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Page 3: Safety Symbols
The copyright of this instruction manual is held by ULVAC, Inc. You are prohibited from copying any portion of this instruction manual without the consent of ULVAC Inc. -
Page 4: Safety Precautions
In order to safely use the G-TRAN Series sensor unit (below, "this unit"), please read the instruction manual and the safety precautions below. Repair Request repairs for this unit from the dealer where purchased, from ULVAC Inc., or from the URL listed in this instruction manual. Power off If this unit is accidentally damaged, immediately turn off the power supply. - Page 5 Usage environment Use this unit within the environment range defined by the specifications. Condensation Avoid using this unit in locations with high humidity and condensation or in locations exposed to water. There is a risk of malfunction, ground leakage, and fire if water penetrates inside this unit.
- Page 6 Impacts Do not expose this unit to impacts. There is a risk of breaking the filament and damaging the attachment section by impacts. Transportation packaging When transporting this unit, do so in the same state as when it was delivered from the factory.
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Page 7: Table Of Contents
ROUBLESHOOTING ..10 5.2. HECKING FOR A FILAMENT BREAK PART NAMES AND FUNCTIONS ..2 TECHNICAL REPORT ....11 ..2 2.1. CONTROLLER SECTION SPU LED ......3 ... 11 2.2. 6.1. EASUREMENT PRINCIPLE ....4 2.3. SPU I/O 6.2. -
Page 8: Specifications
Specifications The SPU Pirani vacuum gauge measuring unit is a dedicated measuring unit for the SH2 multi-ionization gauge. Please note that this unit cannot be used independently. 1.1. Basic specifications Name Pirani vacuum gauge measuring unit Model Measurement principle Pirani vacuum gauge that uses thermal conduction by gas molecules... -
Page 9: Part Names And Functions
Part Names and Functions 2.1. SPU controller section Figure 2-1 SPU controller section explanatory drawing Name (symbol) Function The I/O connector for the power supply and signals (RJ-45 jack ① I/O connector connector). ② Gauge head clamp The clamp to hold and lock the gauge head. -
Page 10: Spu Led
2.2. SPU LED Figure 2-2 SPU LED explanatory drawing Name (symbol) Function : Operating normally ① POWER/ERROR LED Flashing: Error such as a filament break, this unit is malfunctioning : Power off, this unit or the SH2 is malfunctioning... -
Page 11: Spu I/Oconnector
2.3. SPU I/O connector Figure 2-3 SPU I/O connector pin assignment diagram Terminal This unit Signal direction Connection destination number Power supply +5 VDC Power supply +5 VDC Communication terminal Multi-ionization gauge Communication terminal Power supply +5 VDC... -
Page 12: Attaching The Product
Attaching the Product Power on After entirely connecting the gauge head and the SH2 multi-ionization gauge to this unit, turn on the power supply. If the power is supplied before connecting them, there is a risk of damage to this unit and the SH2 multi-ionization gauge and a risk of fire. -
Page 13: Leak Test
If the gauge head is not fully inserted as shown in the figure below, the gauge head may leak from the constrictive clamp. Insufficiently inserted ⇒ Leak occurs Fully inserted 3.2. Leak test When the gauge head is attached, we recommend performing a leak test in this state. Acceptable leak amount: 3.0x10 Pa･m /s or lower... -
Page 14: Handling Precautions
Handling Precautions Prior to use, read the safety warnings on pages I through IV and implement all necessary protective measures for safety. Read this information together with the instruction manual for the SH2 multi-ionization gauge. Safety warnings that you should pay particular attention to are listed in this chapter. 4.1. -
Page 15: Attaching This Unit
Vertical direction Gas flow direction Figure 4-2 Attaching the SPU... -
Page 16: Troubleshooting
Check the power supply voltage with a tester. the specified range This unit or the SH2 is malfunctioning Requires inspection and repairs at ULVAC. ● The POWER/ERROR LED is flashing or the SH2 keeps outputting the error signal Cause Action... -
Page 17: Checking For A Filament Break
Affected by moisture and dirt Attach the gauge head to a location as unaffected as possible Influenced by heat of vaporization by gradual vaporization. There is a leak in the gauge head or the area where Gauge head leak ⇒ Replace the gauge head the gauge head is attached Other leaks ⇒... -
Page 18: Technical Report
Pirani vacuum gauges. ULVAC Pirani vacuum gauges are this type of Pirani vacuum gauge. This type of Pirani vacuum gauge is said to have an advantage in stability and responsiveness with little change in α... - Page 19 The Pirani vacuum gauge's measurement area is an intermediate area between molecular flow and viscous flow, so the difference in reading by gas type is not simple and is difficult to express with an equation. The figure below shows the relationship between the reading and pressure when a typical gases are measured.
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Page 20: Warranty
This product was shipped after rigid company inspection. However, in case any failure occurs under ULVAC’s responsibility, such as defect in manufacturing and damage during transportation, Buyer shall inform ULVAC, Inc. or the local ULVAC representatives. ULVAC will repair or exchange it at free of charge. - Page 21 China RoHS Declaration This mark is applied to the electronic information product sold in the People's Republic of China. The figure at the center of the mark is the validity date of environmental protection. This product does not influence the environment, the human body and the property during the period reckoning the manufacturing date as long as the caution for safe use regarding the products are observed.
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Page 22: Dimensions
Dimensions 9.1. SPU dimensions (φ40) -
Page 23: Gauge Head Dimensions
9.2. Gauge head dimensions (φ18) NW16... -
Page 24: Unit Cable Spu
9.3. Unit cable SPU P1 (RJ-45) P2 (RJ-45) WIRE COLOR ------ WHITE/ORANGE ------ ORANGE ------ WHITE/GREEN ------ GREEN ------ WHITE/BLUE ------ BLUE ------ WHITE/BROWN ------ BROWN Shell ------ Shell DRAIN...
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