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Ulvac HELIOT 301 Instruction Manual

Helium leak detector
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No.SK00-7910-BI-011-00
HELIOT 301
HELIUM LEAK DETECTOR
INSTRUCTION MANUAL
Compatible with Ver. 2000 Software
This manual is for instruments serial Nos. 3000 and higher.
Read this manual before use and
keep it in your file for future reference.
Components Division
ULVAC , Inc.
2500, Hagisono, Chigasaki-shi,
Kanagawa-ken, 253-8543 Japan
Phone No.: 0467-83-1151
http://www.ulvac.co.jp/

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  • Page 1 No.SK00-7910-BI-011-00 HELIOT 301 HELIUM LEAK DETECTOR INSTRUCTION MANUAL Compatible with Ver. 2000 Software This manual is for instruments serial Nos. 3000 and higher. Read this manual before use and keep it in your file for future reference. Components Division ULVAC , Inc.
  • Page 2 No part of this manual may be reproduced for use by a thirty part without CAUTION written consent by ULVAC. Denotations for Safety The following denotations are used throughout this manual and labeled on WARNING the instrument to call operator's attention to safety.

  • Page 3: Safety Cautions

    Safety Cautions Turn OFF power Before removing the external panel for inspection or part replacement, shut off the primary power on the switchboard and disconnect the power cable CAUTION from HELIOT. High voltage is present in HELIOT and can cause danger to human body by electric shock and damage the equipment.

  • Page 4: Line Voltage

    Weight on piping CAUTION When connecting piping, test object, etc. to the test port, keep the test port free from weight. Air vent A blast fan is provided in the rear panel to cool the instrument interior, and air vents are provided in the right and left side panels. CAUTION Provide a space more than 200 mm from the wall to all panels.
  • Page 5 Quick start Quick start starts the instrument by utilizing the sensitivity data used the last time, as it is, independently of the current state of HELIOT. Therefore, the measurement error can be great in some cases. CAUTION To ensure test data reliability, it is recommended to start up the instrument by normal start.
  • Page 6 Don't use grease HELIOT does not use grease for the piping connections and valves. CAUTION Do not use grease when disassembling or reassembling them. Malfunction of the equipment or failure of parts can result. Remove dust O-rings are used for piping connections. CAUTION Before disassembly and reassembly, remove dust from O-rings.
  • Page 7 Do not short terminals CAUTION Do not short the red REC. OUT terminal with black REC. OUT terminals. If shorted, equipment may be damaged. Gas to be fed Use dry nitrogen gas (N ). If a different type of gas is fed, the life of CAUTION parts including consumables will be shortened and the equipment may be damaged.
  • Page 8 Location of WARNING Labels Meaning of WARNING labels CAUTION : Read the instruction manual before conducting maintenance. High voltage is present in HELIOT. If inspection/maintenance is conducted by removing the panel with the power turned ON, danger to human body like electric shock and damage to the equipment can result.

  • Page 9: Table Of Contents

    Contents Page GENERAL DESCRIPTION & SPECIFICATIONS ............ 1 Specifications ......................1 Operating Modes....................2 Select Free Flow....................3 Overview........................3 Features of select free flow system ..............4 CONFIGURATION OF HELIOT ................5 Overall Configuration ................... 5 Basic unit ......................5 Controller ......................5 Dimensional drawing....................
  • Page 10 4-5-2 Quick start ....................... 35 Test Mode ......................36 4-6-1 Standby ......................37 4-6-2 Auto flow ......................37 4-6-3 Gross leak flow ....................38 4-6-4 Middle leak flow ....................39 4-6-5 Fine leak flow ....................40 4-6-6 Zero tracking function..................41 4-6-7 How to use the internal calibration leak............

  • Page 11: General Description & Specifications

    It features completely automatic operation, maneuverability and design compatible with the next generation, including provision of a dedicated pumping system employing a unique select free flow system. HELIOT 301 consists of the basic unit and controller. Specifications Name Helium leak detector...

  • Page 12: Operating Modes

    Operating Modes HELIOT runs according to the program installed in the basic unit. Its operating modes can roughly divided into the initial state, startup mode, test mode, stop mode and error mode. Representative series of actions are given below. Initial state Main power ON The main power is turned ON.

  • Page 13: Select Free Flow

    Select Free Flow Overview In the development of HELIOT, ULVAC designed a compound molecular pump dedicated to HELIOT by combining a drag molecular pump and a turbomolecular pump and developed a unique 3-port inlet type select free flow using the pump.

  • Page 14: Features Of Select Free Flow System

    (2) Features of select free flow system Auto flow (executes test under the optimum conditions) The measurement leak rate range and the testing pressure range of fine leak flow, middle leak flow and gross leak flow vary, which has been realized by combination of the compound molecular pump and select free flow.

  • Page 15: Configuration Of Heliot

    • Display circuit Receives a signal processed by the basic unit and displays the current state and measurement value on LCD, LED and by audio alarm. (3) Dimensional drawing Dimensional drawing for HELIOT 301 - 5 -...

  • Page 16: Pumping System Diagram

    Pumping System Diagram Symbol Function Test port. Connect a test object. Calibration leak. Provides reference helium. Calibration leak open/close valve. Vent valve. Vents the test port to atmospheric pressure. Pirani gauge sensor head. Measures the pressure at the test port. Test valve.

  • Page 17: Names And Functions Of Components

    Names and Functions of Components 2-3-1 Overall configuration Name Function Controller For operation of HELIOT. Front panel Houses the Pirani gauge sensor head and control board 1. Top panel Houses the ion source and compound molecular pump. Right side panel Houses the rotary pump and control board 2.

  • Page 18: Pumping System

    2-3-2 Pumping system Name Function Compound molecular pump Main pump (TMH063-003-002 30 l/sec) (CPM) Rotary pump (RP) Roughing and fore pump (Model GHD-030, 30 l/min) Analyzer tube ion source Ionizes helium molecules. Analyzer tube preamplifier Detects helium ions by microammeter. Pirani gauge sensor head Measures the pressure at the test port.

  • Page 19: Electrical System

    2-3-3 Electrical system Name Function Control board 1 (YU-256) CPU board. Control board 2 (YU-254) I/O and analog circuit boards. Power supply 1 (AD240-24) Power supply for valves, etc. Power supply 2 (P30E-5) Power supply for filament. Power supply 3 (PMC30-2) Power supply for CPU.

  • Page 20: Controller

    2-3-4 Controller Name Function TEST switch Starts warming up the basic unit. Starts test. VENT switch Terminates test. Auto zero switch Clears the leak rate to zero during test. Mode switch Changes over an item set on the controller. Opens the calibration leak valve during test. Input change switch Changes the value set by the controller.

  • Page 21: Connector Panel

    2-3-5 Connector panel Name Function START/STOP switch Starts/stops HELIOT. Rotary pump protector Shuts off power if any trouble occurs in the rotary pump power supply. External power supply Shuts off power if any trouble occurs in the external power protector supply.

  • Page 22: Installation

    INSTALLATION Preliminary Operation Unpack the instrument and check quantities. (The table below is for the standard specification.) Description Model Q'ty Ion source 1 pc. Ion source packing 1 pc. Pirani gauge sensor head WP-01 1 pc. Single-ended elbow GZL8-6 1 pc. 8mm-dia.

  • Page 23: Connecting The Test Port

    Connecting the Test Port Connect the supplied blank flange (NW16) to the test port. Secure it with the clamp (factory installed). Dust contamination CAUTION Before installing the blank flange, see to it that the flange seat surface and O-ring are free from scar and dust. Leak can cause malfunction. Use blank flange CAUTION Use a blank flange for startup.

  • Page 24: Operating Procedure And Modes

    When setting the calibration leak (housed), perform operation from this mode. Also the DIP switch and SEN switch are set in this condition. (2) Initial mode * ULVAC HELIOT * Main power is turned ON. Initializing The setting mode and startup mode can be set up from this mode.

  • Page 25: Reading The Lcd Screen

    Reading the LCD Screen Initial mode * ULVAC HELIOT * Initializing Initial screen Initial mode * ULVAC HELIOT * Push START Initial screen Setting mode Select test mode Set item Auto flow Contents of action (displays the contents of current setting)

  • Page 26: Initial Mode And Settings

    Initial Mode and Settings 4-3-1 Setting the DIP switch The following functions can be set by operating the DIP switch according to the user's operating conditions. Setting timing Perform the operation to change the setting of the DIP switch with the CAUTION main power turned OFF.

  • Page 27: Remote Operation

    Remote operation Local or remote operation can be selected by changing over the DIP switch No. 1. Local operation Operation to start up HELIOT by pressing the START/STOP switch or test switch on the connector panel, starting test by pressing the test switch again and terminating test with the vent switch Remote operation...

  • Page 28: Double Vent

    Double vent The method of venting the test port at the end of test --- normal vent or double vent --- can be selected by changing over DIP switch No.5. Double vent can prevent the error of venting the piping and others by erroneous operation. Normal vent This is a method that terminates test and vents the test port to atmospheric pressure simultaneously by pressing the vent switch...

  • Page 29: Clearing Ram

    ROM initial value. Verify all settings, including the values of the built-in calibration leak, and enter the set values again, if necessary. Method of executing RAM clearing. * ULVAC HELIOT * Verify that the main power is turned OFF and the instrument is Initializing completely shut down.

  • Page 30: Setting The Sen. Switch

    4-3-2 Setting the SEN. switch The SEN. switch changes over the sensitivity of this instrument. The ratio of helium molecules that reach the analyzer tube, that is, amount of helium detected can be controlled by changing over the switch to control the revolution of the compound molecular pump. Setting timing Perform the operation to change the setting of the SEN.

  • Page 31: Setting The Value Of Built-In Calibration Leak

    4-3-3 Setting the value of built-in calibration leak This is a mode of entering the setting of the value of the built-in calibration leak. This is an important value that will be reference in calculating sensitivity in automatic sensitivity calibration. This mode is independent of other modes. Set up this mode with the main power turned OFF.

  • Page 32: Setting The Controller

    The setting mode can be set up when the main power is turned ON or when in the test mode standby state after startup. To set up the mode before startup * ULVAC HELIOT * Turn ON the main power. Initializing ↓...

  • Page 33: List Of Set Items

    4-4-2 List of set items Once the setting mode is set up, control can be transferred to each set item by pressing the mode key. Calibration Sensitivity calibration execute mode Enter to start Pressing starts automatic sensitivity calibration. ↓ Press Select test mode Flow setting mode Auto flow...

  • Page 34: Initial Value Of Each Setting And List Of Input Items

    4-4-3 Initial value of each setting and list of input items ROM initial Initial Selection item Name of set item LCD display setting setting at Input range, conditions factory Sensitivity calibration Calibration – – execute mode Flow selection mode Select test mode Auto flow Auto flow Auto flow, fine leak flow,...

  • Page 35: Inhibition Of Input Of Setting

    <Inhibited settings> • The sniffer mode and big flow mode cannot be set when in the flow selection mode of HELIOT 301. • The setpoint H value cannot be entered unless it is greater than the setpoint L value. • The setpoint L value cannot be entered unless it is smaller than the setpoint H value.

  • Page 36: Methods Of Entering Settings

    4-4-5 Methods of entering settings Method of entering the setting of the sensitivity calibration execute mode. Used when making automatic sensitivity calibration in the test mode standby state. This can be used effectively when the background has changed in a test over a long time or due to stagnation of helium in the piping and detector.

  • Page 37: Entering The Setting Of The Flow Selection Mode

    Entering the setting of the flow selection mode Select a flow in test. The vacuum method permits selection of auto flow, fine leak flow, middle leak flow and gross leak flow. Select test mode Set up the flow selection mode. Auto flow The current setting is displayed.

  • Page 38: Entering The Setting Of Setpoint H Input Mode

    (4) Entering the setting of setpoint H input mode Sets the setpoint H value for leak rate. This can be utilized for OK/NG decision of test by connecting a rotating beacon or buzzer because the setpoint output signal is opened or closed depending on whether the set point value is exceeded or not. This setpoint is a criterion for leak rate, so that the measurement value is not affected by this value.

  • Page 39: Entering The Setting Of The Range Selection Mode

    Entering the setting of the range selection mode Sets the range (multiplier) of the bar graph display at test. This mode permits selection of the auto range that automatically changes over the range from E-11 to E-3 according to the leak rate or the fixed range that fixes the range at a certain value. The fixed range can change over the range arbitrarily by pressing during test.

  • Page 40: Entering The Setting Of The Filament Change Mode

    Sets signal output ON/OFF to the printer. When set at ON, the instrument starts up and the data and leak rate at the end of test (when vented) are automatically printed out on the printer. When set at OFF, they are not printed out. The test result is not affected by whether the printer is ON or OFF.

  • Page 41: Entering The Setting Of The Calibration Leak Value Input Mode

    Change the fourth digit and press , and the message Temp. coef. 0.0% “Temp. coef." will be displayed. ↓ Set 0.0% when the ULVAC calibration leak is used. ↓ Press Press and enter the second digit. 10) The message "Please wait" is displayed.

  • Page 42: Entering The Setting Of The Calibration Concentration Value Input Mode

    (11) Entering the setting of the calibration concentration value input mode This mode sets the helium concentration value of calibration standard gas to be used in startup sensitivity calibration in the sniffer method. This is an important reference value to be used in the calculation of sensitivity by automatic sensitivity calibration in the sniffer method.

  • Page 43: Entering The Setting Of The Startup Change Mode

    (13) Entering the setting of the startup change mode Sets the startup method of this instrument. This mode permits selection of normal start that makes sensitivity calibration at each startup and updates the memory of sensitivity data each time or quick start that warms up the pumping system only at startup and utilizes the previous startup sensitivity data as it is.

  • Page 44: Startup Mode

    This mode makes sensitivity calibration at each startup and updates sensitivity data memory each time. It permits leak test with a sensitivity suited to the equipment condition. Startup takes about 10 minutes. * ULVAC HELIOT * Turn ON the main power. Initializing ↓...

  • Page 45: Quick Start

    HELIOT. Therefore, it involves the possibility of large error of measurement value. CAUTION To ensure reliability of test data, ULVAC recommends the use of normal start for startup. It is to be understood that the reliability of leak test (error of direct reading of leak rate, etc.) when quick start is used at startup is out of warranty.

  • Page 46: Test Mode

    Test Mode Auto flow, fine leak flow, middle leak flow and gross leak flow can be used for test by the vacuum method. Each flow has its own characteristics. So select a flow by the setting mode according to the user's test object and testing conditions. Each flow has the following characteristics.

  • Page 47: Standby

    4-6-1 Standby With completion of startup, the test port is vented and test mode standby is automatically set up. From this state can be set up other modes, including execution of test, change of controller setting, automatic sensitivity calibration, shutdown, etc. In this standby state, automatic zero adjustment is executed conce every five seconds and the zero point that will be a reference in the next test is always corrected.

  • Page 48: Gross Leak Flow

    4-6-3 Gross leak flow This flow executes roughing after starting test and automatically changes over the mode to the test status when the test port pressure has come down to below 1000 Pa. This flow is suited to an application where the leak rate of the test object is high or the ultimate pressure does not reach 70 Pa.

  • Page 49: Middle Leak Flow

    4-6-4 Middle leak flow This flow executes roughing after start of test and changes over the mode to test automatically when the test port pressure has come down to below 70 Pa. It is suited to an application where the ultimate pressure of the test object does not reach 10 Pa. In this application, leak test can be made under more favorable conditions (higher minimum resolution) as compared with gross leak flow.

  • Page 50: Fine Leak Flow

    4-6-5 Fine leak flow This flow executes roughing after start of test and changes over the mode to test mode automatically when the test port pressure has come down to below 10 Pa. It is suited to an application where the ultimate pressure of the test object comes down to below 10 Pa.

  • Page 51: Zero Tracking Function

    4-6-6 Zero tracking function This function resets the leak rate display to zero during test. Use it after fully understanding the following Pressing the zero switch ″0″ during test displays ″#″ at the head of the leak rate display on the LCD screen and ″0.0E-**″.

  • Page 52: How To Use The Internal Calibration Leak

    4-6-7 How to use the internal calibration leak This function allows the internal calibration leak to be opened and closed at will during test. If quick start is used for startup, for example, all the previous data will be used as they are. The problem here is whether the condition of this startup is exactly the same as the previous condition.

  • Page 53: Test End

    4-6-8 Test end To exit the test status, press the vent switch . Test is completed and the test port is vented to atmospheric pressure. Methods of venting include two: normal venting and double venting. (Refer to the DIP switch setting for how to set it.) Venting the test port Before venting, do not remove the blank flange or test object from the test CAUTION...

  • Page 54: Stop Mode

    Set up the test mode standby state. Standby ↓ Press STOP Press the START/STOP switch once. * ULVAC HELIOT * The stop mode is set up. Please wait The electrical system and pumping system are automatically ↓ Several seconds later turned OFF and the main power can be turned OFF.

  • Page 55: Error Mode

    Error Mode This mode is automatically set up if any trouble occurs in the instrument. When this mode is executed, the contents of trouble are displayed on the LCD by a message and the action being executed is stopped. When the error mode is reset by pressing the return switch , control returns to the test mode standby state or the stop mode is automatically executed depending on the contents of the trouble.

  • Page 56: Notice

    ↓ Press Press the return switch to reset the message and standby state. * ULVAC HELIOT * The stop mode is set up. Please wait The electrical system and pumping system are automatically turned ↓ Several seconds later OFF, allowing the main power to be turned OFF.
  • Page 57 * If "Notice" is displayed during startup, the stop mode is set up simultaneously with the resetting of the error message and the instrument is shut down. (Same action as when "Caution" is displayed.) - 47 -...

  • Page 58: List Of Error Messages

    4-8-2 List of error messages Error No. Trouble symptom Error message **** Caution 1 **** The fore pump (GHD-030) has stopped and cannot be started. Fore pump trip **** Caution 2 **** The main pump (TMH063-003-002) has stopped and cannot be started. Main pump trip **** Caution 3 **** Both filaments 1 and 2 have burnt out.

  • Page 59: Examples Of Application

    EXAMPLES OF APPLICATION This section describes how to make leak test using HELIOT based on the explanation given in the preceding sections and specific cases of application, including brief advice. Case 1 (Test object with small capacity) • Testing condition Measure the leak rate of a closed container of about one litre.

  • Page 60: Case 2 (Test Object With Large Capacity)

    Case 2 (Test object with large capacity) • Testing conditions Measure the leak rate of a closed container of about one litre to decide whether the test object is OK or NG. • Acceptance criterion The leak rate is to be 5.0E-08 Pa·m /sec or less.

  • Page 61: Case 3 High Sensitivity Test

    Case 3 High sensitivity test • Testing conditions Measure the leak rate of a closed container of about 500 mλ. • Estimated leak rate Order of E-11 Pa·m /sec • Recommended setting Sensitivity H Fine leak flow Auto range Linear display •...

  • Page 62: Case 4 (Test Object With Large Capacity, With Fore Pumping System)

    However, there is a problem. HELIOT 301 itself has not the capability of pumping a chamber with a capacity of 50 litres and executing test. Thus a fore pumping system that pumps the chamber is required apart from HELIOT.
  • Page 63 When HELIOT is installed to the chamber ＣＨＡＭＢＥＲ In this case, helium that has flown into the chamber through the leak is pumped by the turbomolecular pump and HELIOT via two routes. Since the pumping speed of the fore pumping system is higher than that of HELIOT in most cases, most of helium flows to the ＨＥＬＩＯＴ...
  • Page 64 When HELIOT is installed to the fore pumping system --- B Install HELIOT between the turbomolecular pump and the rotary pump. The only difference from (2) is that a valve is installed at the head of the rotary pump. Close this valve after pumping the ＣＨＡＭＢＥＲ...

  • Page 65: Case 5 (Leak Test Of Other Equipment)

    Case 5 (Leak test of other equipment) • Testing conditions Leak test of vacuum chamber • Acceptance criterion The leak rate is to be not more than 5.0E-08 Pa·m /sec. • Recommended setting Sensitivity L Auto flow Auto range Linear display •...

  • Page 66: Maintenance

    MAINTENANCE Some of the component units and parts of HELIOT need scheduled maintenance and replacement. Some parts are deteriorated after prolonged use and must be replaced in case of trouble. Maintenance and replacing procedures are described below. Overhaul Components used in HELIOT include consumables and parts that are subject CAUTION to secular deterioration (O-rings, drive parts).

  • Page 67: List Of Maintenance Items

    Code No. 07937 Battery Control board 1 Every 3 years 3-61FTH (YU-256) Contact ULVAC. Basic unit Overhaul Annually Contact ULVAC. Overhaul Components used in HELIOT include consumables and parts that are CAUTION subject to secular deterioration (O-rings, drive parts).

  • Page 68: Maintenance Procedure

    Maintenance Procedure 6-2-1 Removing the external panel The external panel must be removed before maintenance. To remove it, proceed as follows. Front panel Remove the one M6 screw at the bottom of the front panel. Slide the front panel upward to remove it. Top panel Remove the front panel.

  • Page 69: Left Side Panel

    Left side panel Remove the front panel. Remove the top panel. Remove the four M4 screws on the front and rear of the left side panel. Pull the left side panel to left to remove it. At this time, do not pull the controller cable with undue force.

  • Page 70: Rear Panel

    Rear panel Remove the six M4 screws on the rear panel. Pull the rear panel backward to remove it. At this time, do not pull the cooling fan cable with undue force. 6-2-2 Maintenance of rotary pump Check item Oil level 50% to 80% of the view port Oil contamination To be free from discoloring and dust...

  • Page 71: Maintenance Of Compound Molecular Pump

    Replace the wick holder with a new one, if necessary. (The wick holder cannot be reused.) After one year use, replace the wick holder with a new one unconditionally. Reassemble the pump by reversing the disassembling procedure. * Replacement of bearing requires high skill. Contact ULVAC for replacement. - 61 -...

  • Page 72: Maintenance Of Pirani Gauge Sensor Head

    6-2-4 Maintenance of Pirani gauge sensor head Check item Pirani gauge sensor head There is continuity between one pin of A group and one pin of B group in the figure below (approx. 13 ohms in air). How to check Remove the front panel.

  • Page 73: Maintenance Of Ion Source

    6-2-5 Maintenance of ion source Check item Filament There is continuity between pin 3 and pin 4 (filament 1) and between pin 7 and pin 8 (filament 2). Ion source slit To be free from contamination and discoloring How to check Remove the top panel.

  • Page 74: Troubleshooting

    TROUBLESHOOTING If any trouble occurs in HELIOT, the error mode will be set up. The contents of the trouble are displayed on the LCD. The following are the trouble symptoms and corrective actions against troubles. Refer to "4-8 Error Mode" for how to reset the error mode. Turn OFF power Before removing the external panel for inspection or part replacement, shut off the primary power on the switchboard and disconnect the power cable...

  • Page 75: Caution

    Caution **** Caution 1 **** Fore pump trip Trouble symptom Troubleshooting Corrective action fore pump 1) Rotary pump protector on 1) If tripped, depress protector to (GHD-030) has stopped. connector panel tripped? reset it. Cannot start. 2) Is input voltage within 100 V 2) Keep input voltage within 100 ±...
  • Page 76 **** Caution 3 **** Fil. burn out Trouble symptom Troubleshooting Corrective action Both filaments 1 and 2 1) Is source connector 1) Securely reconnect connector. have burnt out. securely connected? Emission current cannot 2) Check if filament has burnt 2) If burnt out, replace ion source be obtained due to ion out.

  • Page 77: Notice

    Notice **** Notice 1 **** Error Trouble symptom Troubleshooting Corrective action Action cannot be executed 1) Check if test is executed 1) Test cannot be executed unless according to setting. without making automatic automatic sensitivity sensitivity calibration after calibration made after filament is changed over.
  • Page 78 **** Notice 4 **** G. flow invalid Trouble symptom Troubleshooting Corrective action Gross leak flow cannot be 1) Check if there is any leak 1) Check connection for dust, executed. (Test port when test object is connected. scar, etc. pressure does not lower. 2) Check if pressure rise has 2) Gross leak flow will be in Pressure...
  • Page 79 **** Notice 5 **** Evacuation fault Trouble symptom Troubleshooting Corrective action Roughing 1) Check if there is any leak 1) Check connection for dust, completed with three when test object is connected. scar, etc. minutes. 2) Check if leak rate of test object is too high.
  • Page 80 **** Notice 6 **** Sens. fault Trouble symptom Troubleshooting Corrective action Sensitivity is not normal. 1) Check instrument 1) Connect blank flange to test started with piping and test port at startup. object connected to test port. 2) Check if there is any leak in 2) Check flange and O-ring for test port connection.

  • Page 81: Other

    **** Notice 7 **** Fil. switched Trouble symptom Troubleshooting Corrective action Filament 1 or 2 burnt out 1) Filament was changed when 1) Make automatic sensitivity and was changed with the this message was displayed. calibration. (Refer to 4-4-5 (1) other.

  • Page 82: Input/Output

    INPUT/OUTPUT HELIOT uses five connectors of ACCESSORY, REC. OUT, EXT. V, PRINTER and RS232C. for inputs and outputs. Functions and use of these inputs/outputs are described below. ACCESSORY Input/Output This outputs the status of the instrument and accepts the remote operation signal that controls the instrument from outside.

  • Page 83: List Of Input/Output Signals

    List of input/output signals Signal identification Contents Signal form -COM(ANALOG GND) Open collector output common SET POINT L Leak rate low setpoint Open collector (+24 V input) SET POINT H Leak rate high setpoint Open collector (+24 V input) Output START UP OK Outputted when instrument Open...

  • Page 84: Output Signal

    <Input signal> → Common for input signal. Enter + 5 to 55 VDC +COM(VOLT INPUT) (recommended value 24 V). → Enter one shot when it is desired to set the leak AUTO ZERO rate currently being measured at zero point. Can be inputted in test.

  • Page 85: Input Signal

    Input signal Activating DIP switch No. 1 on the CPU board (selection of remote operation) disables local operation. Only remote operation is enabled. Voltage applied to pin 9 is + 5 V to + 55 VDC (recommended value + 24 V). Provide a contact or open collector between pin 10 through pin 14 and GND.

  • Page 86: Operable Input Format

    Operable input format Operation item DIP switch No. 1 OFF DIP switch No. 1 ON In normal state In remote Only remote operation (remote OFF) operation Same as right → SYSTEM START START/STOP, test switch Signal input input Same as right → SYSTEM STOP START/STOP switch...

  • Page 87: List Of System Errors

    (6) List of system errors Error No. System error HELIOT action Error message output √ **** Caution 1 **** Fore pump trip √ Put on standby simultaneously with message **** Caution 2 **** display. Stop mode is set up simultaneously with Main pump trip √...

  • Page 89: Input/Output Timing Chart

    (7) Input/output timing chart STOP STATE STARTUP MODE TEST MODE TEST MODE TEST MODE TEST MODE TEST MODE STOP MODE MAIN POWER START STANDBY UNDER TEST STANDBY UNDER TEST STANDBY STARTUP,STOP <Output signal> LEAK SETPOINT L ※１ ※２ LEAK SETPOINT H START UP OK ※４...

  • Page 90: Rec. Out Output

    REC. OUT Output This is a voltage output of leak rate during test. Connect the output signal to a strip chart recorder to use it for recording of leak rate. This output has two formats of 0 to 10 VDC (when linear display is set) and 0 to 8 VDC (when log display is set) depending on the setting of the bar graph display selection mode on the controller.

  • Page 91: Ext. V Output

    EXT. V Output This output is utilized as the power for the external valve of HELIOT 303. However, it can be used for models other than HELIOT 303 if the user is aware of the specifications. From this output are outputted big flow valve output and helium spray output in + 24 VDC. Maximum current The current applied to the load of output signal is maximum 500 mA.

  • Page 92: Printer Output

    PRINTER Output This output prints out the startup sensitivity (minimum sensitivity) in each flow or measurement value (leak rate) on the printer. The recommended printer is as follows, but a printer of the same specification can be connected. Printer CAUTION If a printer of differing specifications is connected, the printer may not print properly or may malfunction.

  • Page 93: Rs232C Input/Output

    Sample program The following is a sample program for communication using RS-232C. This sample program reads signals from HELIOT, but it can also input signals to HELIOT. Contact ULVAC for more information. ************************************************************************************* ' HELIOT Communication sample program NEC N88BASIC(86)(MS-DOS) WIDTH 80,25:CONSOLE 0,25,0,1:CLS OPEN "COM1:E81NN"...
  • Page 94 (2) Setting on the personal computer side Baud rate : Set 9600 bps using N88SETUP supplied with N88BASIC. Data bit length : 8 bits Start/stop bit length : 1 bit Parity : Even Data code : ASCII Data format : Command (2 - 6 bytes) + CR Cable : Reverse cable, Dsub25 pin (3) Command...

  • Page 95: Miscellaneous

    MISCELLANEOUS This section describes miscellaneous matters. Method of Test Port Purge Normally, when test is completed, air (gas in the surrounding of HELIOT) is introduced to the test port through the vent valve to vent the test port to atmospheric pressure. This method, however, vents the test port to atmospheric pressure each time, so that there is a possibility of water content and oxygen depositing and remaining on the inside wall of the piping.

  • Page 96: Warranty

    <Repair after warranty period and order of consumables> Contact your local ULVAC representative or ULVAC. <Technical questions> For technical questions and servicing, please contact your local ULVAC representative or ULVAC. * The contents of this manual are subject to change without notice.

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