Table of Contents
Advertisement
Quick Links
Advertisement
Table of Contents
Troubleshooting
Related Manuals for Ulvac MBD-D
Summary of Contents for Ulvac MBD-D
- Page 1 CRYO-METER MBD-D Instruction Manual Export Control Policy We recommend that ALL customers be sure to follow all rules and regulations such as Foreign Exchange and Foreign Trade Law when exporting or reexporting our products. D/N.MGMBD02E,2018.12 ULVAC CRYOGENICS INCORPORATED...
- Page 3 As a general rule, diagnosis of failure should be done on site by customer. However, ULVAC CRYOGENICS or our service network can perform this service for an agreed fee upon the customer’s request. There will be no charge if the cause...
- Page 4 ULVAC CRYOGENICS. (2) Damage during transportation When damage by delivery/transportation is admitted, the product will be repaired free of charge within the range of the guarantee expressed in the sales contract.
- Page 5 2.3 Repair period after production is discontinued ULVAC CRYOGENICS shall accept product repairs for seven years after production of the product is discontinued. 3. Service Form After the products are delivered, please fill out the following information in the blanks. If you have any questions or technical problems please feel free to contact the nearest Customer Support Center or headquarters.
- Page 6 (3) If you have any questions or comments on this document, please do not hesitate to contact us. The phone numbers of local customer support centers are listed at the end of this manual. ULVAC CRYOGENICS INCORPORATED...
- Page 7 There is a danger of fire or burn injury. Explosive gas used. There is a risk of fire or explosion. Hazardous voltage . Electric shock may cause severe injury or loss of life. Hot heating part present. There is a risk of burn injury. MZ0F001E,2013OR03 ULVAC CRYOGENICS INCORPORATED...
- Page 8 This page intentionally left blank ULVAC CRYOGENICS INCORPORATED...
- Page 9 Contact your safety supervisor and follow the instructions to remove such toxic substances before disposing. We provide Safety Data Sheet (SDS) of our products upon your request. Please contact us if necessary. MZIW002E,2018JE01 ULVAC CRYOGENICS INCORPORATED IW-1...
- Page 10 This page intentionally left blank. IW-2 ULVAC CRYOGENICS INCORPORATED...
-
Page 11: Table Of Contents
Monitor the Temperature with MBD-D ··················································· 8 MBD-D Communication Function ························································· 8 Direct Communication with MBD-D ······················································ 9 Modbus Protocol ·············································································· 9 Troubleshooting ··············································································· 13 Appendix A CRYO METER MBD-D External Dimensions ······························ 15 FIGURES Figure 1-1 Exterior of MBD-D ..................1 Figure 1-2 MBD-D Front Panel ................... - Page 12 ITEM VOLUME (*1) CRYO METER MBD-D (with power cable) Clamp Kit (Holder & Set Screw x 2) (*2) Connector Kit (R03-PB3M, R03-PB2F) (See table 3-1) Instruction Manual (this book) (*1) The length of the power cable is 3m.
-
Page 13: Features
The CRYO METER MBD-D displays cryogenic temperature used in conjunction with MBS-C or MBS cryogenic thermocouple temperature meter attached to our cryopump. The MBD-D receives the analog output signal from the cryogenic thermocouple and displays the 1st and 2nd stage temperatures digitally. -
Page 14: Specifications
(*1) This refers to the accuracy of K thermocouple, not including the accuracy of reference junction. (*2) The power source must be dedicated to single cryo-meter and must not be used for multiple units or for other devices. ULVAC CRYOGENICS INCORPORATED... -
Page 15: Connector Specifications
CRYO-METER MBD-D Instruction Manual 3. Connector Specifications Figure 3-1 MBD-D Rear Panel Table 3-1 Connectors Input / Output Pins Receptacle Item Compatible Plug Assignment Function +24V POWER R03-PB3M MBS/MBS-C No Connection R03-P3M 24V Power Output (Cables are optional) R03-PB2F + INPUT... -
Page 16: Installation
4. Installation Follow the steps below to attach the MBD-D to the customer’s display panel using the clamp kit delivered with the MBD-D. As shown in the figure below, insert the MBD-D from the front through the rectangle cutout on the front panel all the way seated in. -
Page 17: Figure 4-1 Wiring Mbd-D And Mbs-C
CRYO-METER MBD-D Instruction Manual Wiring After attaching the MBD-D to the panel, wire the device to the MBS-C. Use the MBD and MBS-C connection cable (MBD-HS30) to connect POWER and ANALOG OUT in the I/O of the MBS-C. In this case, wiring of the RELAY shown in the dotted lines is to be done by the customer. -
Page 18: Figure 4-2 Mbd-D And Mbs Wiring
The Connection with MBD-D includes connection with K-thermocouple cable. Connect the cable between the connector on the K thermocouple and the K Thermo connector on the MBD-D. Figure 4-2 The procedure is shown in [Customer’s Control Board] (*2) MBS-MBD connection cable (5m) -
Page 19: Figure 4-3 Mbd-D Power Circuit
CRYO-METER MBD-D Instruction Manual Power Connection and Protection The MBD-D does not have a fuse internally. Make sure to attach fuses or protectors to the cables that connect to power supply terminal. Recommended: 250VAC 3A / Medium time-delay or time-delay type When it is necessary to comply with regulations of a country or international standard, use components that meet such requirements. -
Page 20: Operation
It is necessary to make the transmission rate consistent with the MBD-D to communicate. The rate can be set with the switch <2> of <Register> on the back of the MBD-D. Turn ON the switch <2> to set the transmission rate at 19200bps. -
Page 21: Direct Communication With Mbd-D
Direct Communication Settings From the rear of the MBD-D, connect the pin No.4 of RS485 and D+ (or RX(+) and TX(+)) of RS485 of the desired device, and connect the pin No.5 and D- (or RX(-) and TX(-)). After the connection has been made, check the transmission speed, terminating resistor, and address as described above. - Page 22 Response message from the Slave(MBD-D) Function Response Byte Address Data Error Check Code number 0x68 0x03 0x04 0x0B930B81 0x6CF2 Byte (9) The above example is of the message of continuous reading of two registers from MBD-D register address of 104(0x68). ULVAC CRYOGENICS INCORPORATED...
- Page 23 Error Check Code Registers 0x68 0x10 0x0065 0x0004 0xD8EC Number of bytes (8) This is the example of continuous writing of four MBD-D register addresses of 104(0x68) starting from 0x0065. Register Information Register Description Read/Write Note Address 0x4001 Status Information Read Only Refer to the table “Status...
- Page 24 1st comparative temperature 3 < 1st measured temperature < 1st comparative temperature 4 1st measured temperature ≤ 1st comparative temperature 3 280K ≤ 2nd measured temperature 2nd comparative temperature < 2nd measured temperature <280K 2nd measured temperature ≤ 2nd comparative temperature ULVAC CRYOGENICS INCORPORATED...
-
Page 25: Troubleshooting
1.Power supply to Check the voltage of AC power supply illuminate although Terminal ends MBD-Ｄ is low or for MBD-D. If no problem is observed, the power is turned Fuse (Inside) check MBD-D power terminal, 2. Wiring problem connection status, (cables supplied by 3. -
Page 26: Table 6-2 List Of Troubleshooting(2/2)
Signal cable Cables and cable Check the connection status or troubles is unstable. DC power cable routing problems in the signal cable between MBD-D and Power terminal (Noise, surge, MBS-C, and DC power cable (supplied etc.) by UCI). If no problem is observed, check the routing of these cables. -
Page 27: Appendix A Cryo Meter Mbd-D External Dimensions
CRYO-METER MBD-D Instruction Manual Appendix A Cryo-Meter MBD-D External Dimensions ULVAC CRYOGENICS INCORPORATED... - Page 28 This page intentionally left balnk. ULVAC CRYOGENICS INCORPORATED...
- Page 29 ULVAC CRYOGENICS INC. www.ulvac-cryo.com 1222-1 Yabata, Chigasaki, Kanagawa 253-0085, Japan <Sales> Tel: +81-467-85-8884 <Service Engineering Division> Tel: +81-467-85-9366 Fax: +81-467-83-4838 ULVAC CRYOGENICS KOREA INC. www.ulvac-cryo.co.kr 107, Hyeongoksandan-ro, Cheongbuk-Myeon, Pyeongtaek-si, Gyeonggi-Do, Korea, 17812 Tel: +82-31-683-2926 Fax: +82-31-683-2956 ULVAC CRYOGENICS (NINGBO) INC.
- Page 30 This page intentionally left blank. CS-2 ULVAC CRYOGENICS INCORPORATED...
- Page 31 CRYO METER MBD series Instruction Manual Revision History Date Revision No. Contents 2018-12-11 2018.12 First edition ULVAC CRYOGENICS INCORPORATED...
- Page 32 Revision History This page intentionally left blank ULVAC CRYOGENICS INCORPORATED...
Need help?
Do you have a question about the MBD-D and is the answer not in the manual?
Questions and answers