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EXTREME-HIGH VACUUM GAUGE
This manual is for ultra-high vacuum gauges of serial
numbers 00100 and higher.
Read this manual carefully before using this gauge and keep
it at hand for immediate reference.
When used by Torr, the following conversion equations shall be used.
2500 Hagisono, Chigasaki City, Kanagawa Prefecture, Japan 253-8543
AxTRAN
MODEL ISX2
INSTRUCTION MANUAL
1[Torr]=1.3332×10
1[Pa]=7.5006×10
Components Division,
ULVAC, Inc.
http://www.ulvac.co.jp/
No.SK00-7200-EI-003-08
2
[Pa]
-3
[Torr]
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Summary of Contents for Ulvac AxTRAN ISX2
- Page 1 Read this manual carefully before using this gauge and keep it at hand for immediate reference. When used by Torr, the following conversion equations shall be used. 1[Torr]=1.3332×10 [Pa] 1[Pa]=7.5006×10 [Torr] Components Division, ULVAC, Inc. 2500 Hagisono, Chigasaki City, Kanagawa Prefecture, Japan 253-8543 http://www.ulvac.co.jp/...
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Page 3: Before Use Of This Gauge
The copyright of this instruction manual is held by ULVAC, Inc. You are prohibited from copying any portion of this instruction manual without the consent of ULVAC Inc. -
Page 4: Safety Precautions
Turn off power. If the gauge is damaged, immediately turn off the power. Otherwise, fire or electric shock can result. For safety reasons, contact your local ULVAC representative or ULVAC, Inc. Turn off power. If the gauge gets unusually hot or gives off smoke or unusual smell, immediately turn off the power. - Page 5 Check connection See to it that the cable does not come into contact with other conductive part. Disposal When discarding the vacuum gauge, comply with your local regulations. Customer shall be responsible for the cost relating to disinstallation. Be cautious with operating conditions Use this gauge within the specified environment range.
- Page 6 Revision History Date Reason Jun.6,2007 Correction of errors Jan.20,2008 Optional board details added Nov.16,2009 Pressure unit conversion appendix Pressure expression appendix Supplementary explanation of current unit delete ・Sensor material ・Standard Accessories ・WARRANTY Nov.13,2013 ・EC DECLARATION OF CONFORTMITY ・CERTIFICATE OF DECONTAMINATION added Oct.28,2016 Baking temperature added Initial setting、Degassing Time、...
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Page 7: Table Of Contents
Contents Page Before Use of This Gauge ........................II Safety Denotations ..........................II Safety Precautions ..........................III FEATURES OF ISX2 ........................1 SPECIFICATIONS AND COMPONENTS ................2 2.1. Standard Specifications ..................... 2 2.2. Performance ........................3 2.3. Utilities ..........................3 2.4. - Page 8 9.3.1. What is degassing? ..................31 9.3.2. Setting the degassing time ................31 9.3.3. Degassing operation ..................31 9.4. Filament Change ......................32 9.4.1. Cautions in operation..................32 9.5. Changing over Recorder Output ..................33 9.5.1. Setting of recorder mode ................. 33 9.5.2.
- Page 9 Attached Illustrations Fig. 3-1 Operation switch panel ......................4 Fig. 3-2 Front panel lamps ........................5 Fig. 3-3 Front panel measurement value display/set value indicator ........... 6 Fig. 3-4 Rear panel ..........................7 Fig. 3-5 Set point, recorder output connector pin assignment .............. 8 Fig.
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Page 10: Features Of Isx2
FEATURES OF ISX2 • This gauge is a hot cathode type ionization vacuum gauge with a Bessel box type energy filter arranged between the ion source and the ion collector. It provides a measurement resolution of 0.5 × 10 Pa by reducing the residual current due to soft X-rays and electron stimulated desorption (ESD) ions. -
Page 11: Specifications And Components
SPECIFICATIONS AND COMPONENTS 2.1. Standard Specifications Name Model ISX2 extreme-high vacuum gauge Compatible sensor head 1 pc. × 10 Pressure display Mantissa part 3 digits, exponent part 2 digits display . Filament is automatically turned off at 9.99 × 10 Pressure protecting function Pa or more. -
Page 12: Performance
Emission valid [ OK / NG ] Communication (optional) Format RS-232C Baud rate 9600/19200/38400 bps Material of sensor head Filament：Ir/Y coat Others：Cu、Ag、SUS304、FeNiCo、Ta、Mo、Pt、Ceramic EN61326:1997+A1:1998+A2:2001,Class A EN61000-3-2:2000 EN61000-3-3:1995 EN61010-1:2001 2.2. Performance Compatible sensor head X-11 (See page 71 for details.) 9.99 × 10 to 0.5 ×... -
Page 13: Nomenclature And Functions Of Components
NOMENCLATURE AND FUNCTIONS OF COMPONENTS 3.1. Operation Switch S E T 1 S E T 2 × POWER O F F D E G I N T ５ ７ ６ ８ ９ ２ ３ ４ Fig. 3-1 Operation switch panel Name (Inscription) Function ①... -
Page 14: Front Panel Lamps
3.2. Front Panel Lamps ２ S E T 1 S E T 2 × POWER O F F D E G I N T ３ ４ ５ Fig. 3-2 Front panel lamps Name (Inscription) Function ① SET-1 lamp (SET1) Lit when set point 1 is activated. ②... -
Page 15: Front Panel Measurement Value Display/Set Value Indicator
3.3. Front Panel Measurement Value Display/Set Value Indicator １ S E T 1 S E T 2 × POWER O F F D E G I N T Fig. 3-3 Front panel measurement value display/set value indicator Status Function When in the measurement mode Displays the pressure measurement value. -
Page 16: Rear Panel
3.4. Rear Panel ３ ２ ４ １ ６ ５ Note: This figure shows the standard panel. If the option board is installed, refer to the manual for the option board. Fig. 3-4 Rear panel Name (Inscription) Function ① Sensor connector Connector for connecting the cable for applying power to the (SENSOR) sensor head. -
Page 17: Accessory Connector
3.5. Accessory Connector Fig. 3-5 Set point, recorder output connector pin assignment Terminal No. Signal identification Terminal No. Signal identification REC-OUT (+) (OUT-PUT) REC-OUT (–) (OUT-PUT) SET1 (OUT-PUT) SET–COMMON (OUT-PUT) SET2 (OUT-PUT) - 8 -... -
Page 18: View When The Top Panel In Controller Is Opened
3.6. View when the Top Panel in Controller is opened 1 2 3 4 5 6 7 8 VR3 VR4 DC AMP Box Fig. 3-6 View when top panel in controller is opened Name (Inscription) Function ① Initial setting internal Switch for settings. -
Page 19: View When The Bottom Panel In Controller Is Opened
3.7. View when the Bottom Panel in Controller is opened Fuse for grid line グリッドライン用ヒューズ Fig. 3-7 View when the bottom panel in the controller is opened Name (Inscription) Function ① Grid line fuse (F1) Inserted in the DEGAS line of the grid. Protects the electric circuit in case the grid line is shorted by a load other than the sensor head. -
Page 20: Installation
INSTALLATION Turn off power. 4.1. Preliminary Operation WARNING ① Unpack the gauge and check quantities. (See page 3 for the accessories.) ② Check components to see if they are damaged. 4.2. Installation Beware of high 4.2.1. Installing the controller WARNING temperature. - Page 21 Ion collector cable Ion current input Sensor cable connector Short pin Sensor cable Fig. 4-1 Connection of controller (ISX2) and sensor head (X-11) CAUTION: If the potential level differs between the controller ground and sensor head ground (outside wall), normal emission current will not be obtained and normal pressure measurement may not be made.
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Page 22: Flow Of Program Run
FLOW OF PROGRAM RUN To set sensitivity factor, set points 1 and 2, range, degas, filament, recorder and baud Turn off power. WARNING rate, follow the instructions in Section 8. The flow of the display unit operation is as follows. Check line voltage. -
Page 23: Starting Up Gauge (Supply Of Power)
STARTING UP GAUGE (SUPPLY OF POWER) Turn on the power switch on the front panel Check connection. of the controller to feed power. POW-① appears and setup is completed. CAUTION Check pressure. ＰＯＷ－① The ○ portion in the left figure lights. SE T 1 SE T 2 ×... -
Page 24: Front Panel Operation
FRONT PANEL OPERATION 7.1. Filament ON/OFF MESU-① The first press on the FIL key turns on the filament and a second press turns it off. SE T 1 SE T 2 × ● POWER When the filament is turned on, the segment indicator displays ［FIL on］... -
Page 25: When Pressure Protection Is Activated
CAUTION: If the electron current value is not normal, refer to ″Troubleshooting″. Before turning on the filament, make sure the pressure is in the measurable pressure range using another vacuum gauge. If pressure rises above 9.99 × 10 Pa, the filament will automatically be turned off and [ＦＩＬ ＡＦ] will be displayed on the segment indicator, reverting to the MESU-①... -
Page 26: Initialization
7.2. Initialization → See page 60 INT-① Used when the AxTRAN is used for the first time or SE T 1 when the sensor head is changed. Detects the maximum SE T 2 × ● value of the energy spectrum. (Refer to Principles of Operation.) Effective in the MESU- ②... -
Page 27: Degassing On/Off
7.4. Degassing ON/OFF DEG-① A single press on the DEGAS key when in the MESU- SE T 1 ② status (left figure) turns on degassing. A second SE T 2 × ● press on the key turns it off. POWER When degassing is turned on, the LED marked with ○... -
Page 28: Initial Setting
INITIAL SETTING To set set points, sensitivity factor, degassing, filament, recorder output, filter and offset interval adjustment, make settings according to the explanations in 8.1 and higher. These settings can be entered from the front panel or through the communication RS-232C when the option board is set. - Page 29 Setting of Set Point 1 → See page 30. 8.1. Here, the numeric value of set point 1 is set. Numeric values that can be set are: 9.99 × 10 to 0.00 × 10 * If the setting is not changed, press the [○ PRG] key to transfer control to the SET2-① status. * To exit the setting mode, hold down the [○...
- Page 30 Setting of Set point 2 → See page 30. 8.2. Here, the numeric value of set point 2 is set Numeric values that can be set are: 9.99 × 10 to 0.00 × 10 * If the setting is not changed, press the [○ PRG] key to transfer control to the SET2-① status. * To exit the setting mode, hold down the [○...
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Page 31: Sensitivity Factor Setting
8.3. Sensitivity Factor Setting Sets the sensitivity factor peculiar to the sensor head. → See page 29. The sensitivity factor can be set from 9.99 × 10 to 0.00 × 10 * If the setting is not changed, press the [○ PRG] key to transfer control to the REL1-① status. To exit the setting mode, hold down the [○... -
Page 32: Specific Sensitivity Factor Function Setting
8.4. Specific Sensitivity Factor Function Setting → See page 29. Here, the numeric value of sensitivity factor is set. Numeric values that can be set are 9.99 × 10 to 0.00 × 10 * If the setting is not changed, press the [○ PRG] key to transfer control to the DEGAS-① status. * To exit the setting mode and revert to the measurement mode, hold down the [○... -
Page 33: Degassing Time Setting
8.5. Degassing Time Setting → See page 31. Sets the degassing time 000.0 to 999.9 hours. * If the setting is not changed, press the [] key to transfer control to the FIL-① status. * To exit the setting mode, hold down the [○ PRG] key for 2 seconds or more to revert to the measurement mode. -
Page 34: Filament No. Selection
8.6. Filament No. Selection → See page 32. Here, filament 1 or 2 is selected. * If the setting is not changed, press the [] key to transfer control to the REC-① status. * To exit the setting mode, hold down the [○ PRG] key for 2 seconds or more to revert to the measurement mode. -
Page 35: Filter Setting
8.8. Filter Setting → See page 60. Sets the measurement time at a pressure below 10 Select a value from 00, 01, 10, 30, 60 and 90. * If the setting is not changed, press the [] key to transfer control to the FIL-① status. * To exit the setting mode, hold down the [○... -
Page 36: Offset Adjustment Interval Setting
8.9. Offset Adjustment Interval Setting → See page 60. Offset Adjustment is movement at a pressure below Sets the time interval for offset adjustment. Select one from 00, 01, 02, 06, 12, and 24 hours. * If the setting is not changed, press the [] key to transfer control to the FIL-① status. * To exit the setting mode, hold down the [○... -
Page 37: Setting Of Baud Rate
8.10. Setting of Baud Rate → See page 46. Here, the baud rate of RS-232C is selected. Effective when the option board is mounted. * If the setting is not changed, press the [] key to transfer control to the SEN-① status. * To exit the setting mode, hold down the [○... -
Page 38: Functions
9.1.3. Details of specific sensitivity Specific sensitivity (Srj) is the ratio between the sensitivity factor (k) for nitrogen of the ULVAC sensor head (X-11) and the sensitivity factor (kx) for other type of gas. The actually measured values of sensitivity factor for nitrogen and argon and the specific sensitivity obtained from them are given below for reference. -
Page 39: Set Point
9.2. Set Point 9.2.1. What is the set point? The set point function outputs a signal of whether a pressure being measured has come down below a certain pressure value. The operating state can be checked by the lighting of the LED on the front panel or in the form of relay contact from the external I/O connector or by reading the status when the communication (RS- 232C) is used. -
Page 40: Degassing
9.3. Degassing 9.3.1. What is degassing? Degassing means the process of driving out and exhausting gases by electron bombardment. It dissociates gas molecules occluded to the grid of the sensor head or the energy filter by electron bombardment to reduce the rate of gas released from the sensor head. If the molecules occluded to the grid is very active, however, the degassing effect may hardly be obtained. -
Page 41: Filament Change
9.4. Filament Change The sensor head (X-11) has two filaments. The filament can be changed by input from the front panel, external I/O connector or through the communication (RS-232C) (option). 9.4.1. Cautions in operation • Filament change and pressure measurement When the filament is changed, the gas adsorbed to the filament and its stem will be released for some time after it is activated, causing the pressure to rise temporarily. -
Page 42: Changing Over Recorder Output
9.5. Changing over Recorder Output The recorder outputs the pressure measurement value by an analog signal. Two modes are available for the recorder outputs of measured pressure: each digit in linear output mode (1: LIN) and pseudo-logarithmic mode (2: LOG). 9.5.1. - Page 43 Example of recorder output Example of recorder output when pressure is rising when pressure is lowering Fig. 9-1 Recorder output graph (linear) - 34 -...
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Page 44: Log Output
9.5.4. LOG output The entire measurable pressure range is output pseudo-logarithmically by an analog voltage of 0 to 10 volts. The table below gives the relationship between pressure and output voltage. Table 9-2 Measured Pressure Value Table Output voltage Output voltage Displayed pressure value [Pa] Displayed pressure value [Pa] 5.00×10 -3... -
Page 45: Resolution And Output Period
9.5.5. Resolution and output period The recorder output is delivered by a 12-bit A/D converter. The output voltage resolution at this time is as follows. 2.5 mV = 10.23 (VRef) / 4096 (12 bits) Table 9-3 Measured Value Outputs Resolution Output period ☆．★◇０... -
Page 46: External Inputs/Outputs
EXTERNAL INPUTS/OUTPUTS 10.1. Set Point Output The internal relay is actuated (reversed) when the set value becomes lower than the set point set value. The output is a relay contact output and one transfer (COM, a contact, b contact) is output per set point. The contact capacity is AC: 125 V , 0.5 A... -
Page 47: Option Board
10.2. Option Board Power supply interception Please perform the option board installation in the state that removed power CAUTION supply cord from the main body of vacuum gauge. The installation of the option board 1.Please remove top surface panel. Remove the IO connector that have already possessed from a panel, a board. -
Page 48: Ext-I/O Connector
10.3. EXT-I/O Connector Input/output connector pin assignment Termin Termin Signal identification Signal identification al No. al No. (OUT-PUT) (OUT-PUT) SET1 COM SET2 COM SET1 a contact (OUT-PUT) SET2 a contact (OUT-PUT) (OUT-PUT) (OUT-PUT) SET1 b contact SET2 b contact EXT-OUT COM (OUT-PUT) (OUT-PUT) PRESSURE･DATA A-b0... -
Page 49: External Digital Output
10.4. External Digital Output The operating state, such as measured pressure value, filament ON/OFF status, DEGAS ON/OFF status, etc. are output to outside as digital signals (negative logic). The output form is the open collector output of emitter common. The capacity of the transistor is such that the maximum voltage between the collector and emitter is 24 V, the collector maximum current is 50 mA and the Saturation voltage is 1 V. - Page 50 Data of C is output by the BCD code at the output terminals of C-b0 to C-b3, where C-b0 is the least significant bit of the four-digit numeral. Data of D is output by the BCD code at the output terminals of D-b0 to D-b3, where D-b0 is the least significant bit of the four-digit numeral.
- Page 51 The DATA-VALID signal is 360 µsec in duration. The transistor operating time varies with the collector current fed to the open collector. The time required to reach the Lo status from the Hi status is given as ″Ton time″ and the time required to reach the Hi status from the Lo status is given as ″Toff time″.
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Page 52: External Control Input
Refer to external control using the internal power supply (Fig. 10-7) and connect the ANALOG GND terminal or DIGITAL GND terminal (23, 24, 48, 49) and each signal by means of a relay contact or open collector. AxTRAN ISX2 Controller side Internal 5V power... - Page 53 Referring to external control using the external power supply in Fig. 10-8, connect the minus side (GND) of the power supply on the controller side and the terminal of each signal by means of a relay contact or open collector. AxTRAN ISX2 Controller side Jumper...
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Page 54: Method Of External Control
10.6. Method of External Control For external control, follow the time chart in ″Fig. 10-9 Method of external control″. Before external operation, select the REMOTE mode. Then perform filament ON/OFF and DEGAS ON/OFF operation in that order. However, DEGAS is not turned ON unless the filament is ON. Upon completion of all operations, change over the mode to LOCAL. -
Page 55: How To Use Communication (Rs-232C)
HOW TO USE COMMUNICATION (RS-232C) 11.1. Communication Specifications 11.1.1. Key specifications Communication system Full duplex X parameter Ineffective Data bit length 8 bits Stop bit length 1 bit Code ASCII Baud rate 9600, 19200, 38400 bps S parameter Ineffective Baud rate 9600/19200/38400 bps DEL code processing BS code conversion... -
Page 56: List Of Commands
11.2. List of Commands Command Parameter Response Data Explanation of function ′RE′ ′OK′ or ′NG′ Sets remote status ′L0′ ′OK′ or ′NG′ Sets local status ′EM′ ′OK′ or ′NG′ Reads emission valid status ′F0′ ′OK′ or ′NG′ Turns OFF filament ′F1′... -
Page 57: Explanation Of Command Action
11.3. Explanation of Command Action 11.3.1. Changing over remote/local control Command Parameter Response Data Explanation of function ′RE′ ′OK′ or ′NG′ Sets remote status ′L0′ ′OK′ or ′NG′ Sets local status Send ′RE′ command when the AxTRAN is used in the remote (RS-232C) mode. If this setting is OK, ′OK′... -
Page 58: Reading The Gauge Status
11.3.5. Reading the gauge status Command Parameter Response Data Explanation of function ′GS′ ′AxTRAN′ Reads the type of control To know what the currently connected controller is, send ′GS′ command. The controller sends back ′AxTRAN′ in response to this inquiry. 11.3.6. -
Page 59: Reading The Measured Pressure Value
11.3.9. Reading the measured pressure value Command Parameter Response Data Explanation of function ′RP′ ′X-XE-XX′ Reads measured pressure data To know the measured pressure value, send ′RP′ command. The controller sends back ′X.XXE±XX′ in response to this inquiry. (If the filament is OFF status, ′0.00E-10′ is sent back.) 11.3.10. -
Page 60: Error Resetting
11.3.14. Error resetting Command Parameter Response Data Explanation of function ′RT′ ′OK′ or ′NG′ Resets error To reset controller error, send ′RT′ command. If this setting is OK, ′OK′ is sent back in response and, if ′NG′, ′NG′ is sent back in response. 11.3.15. -
Page 61: Troubleshooting
Disconnection or short has occurred in the power line in the disconnected. controller (inline filter, wiring, power switch, transformer, switching power supply, etc.) Contact ULVAC for inspection and repair. Trouble has occurred in the Element in the controller was damaged by erroneous wiring of the controller due to erroneous wiring wire to the external I/O connector. - Page 62 ● Pressure cannot be measured by turning ON the filament. (The [FIL] lamp on the front panel is blinking.) Possible cause Corrective action The emission current value is not Examine the real 5cause from other items. (See page.60) normal. The filament has blown out. Check the wiring between the filament and electrode for continuity with a circuit tester.
- Page 63 Replace or repair the sensor head cable. Sensor head sensitivity has lowered Change the sensor head with another one and check the symptom. noticeably. If OK with another sensor head, the sensor head is faulty. Replace the sensor head. ● The filament is turned OFF immediately after it is turned ON or the filament cannot be turned ON. Possible cause Corrective action Filament protection is activated...
- Page 64 Gas being measured is not nitrogen The controller and sensor head are normal. If measurement is or air. The sensitivity setting is made using gas other than nitrogen or air, set the sensitivity factor. incorrect. (See page 22.) The actual pressure differs from the The actual pressure differs from the expected value.
- Page 65 If the contact is not in continuity though actuated, the relay has failed. Contact ULVAC for inspection and repair. The minimum operating current of the relay used for output is 10 mA. At a current below this value, relay may not be in continuity electrically though mechanically actuated.
- Page 66 100VAC power is connected to some units. In this case, the correct. internal element will fail. Failure of output circuit Contact ULVAC for inspection and repair. ● Display and recorder output differ. Possible cause Corrective action In correct recorder output mode is Set a correct mode.
- Page 67 ● Display and BCD output differ. Possible cause Corrective action Erroneous wiring or broken wire of Correct the wiring and check continuity using a circuit tester.(See the EXT-I/O connector. page 39.) Data rewriting time has been read. BCD output is rewritten at intervals of 100 ms. The value is not correct during rewriting (1 ms).
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Page 68: Cause And Measures Where Emission Current Doesn't Flow
12.1. Cause and measures where emission current doesn’t flow Cause Measures Pressure is higher than 10E-3Pa. Check of exhaust system The filament has blown out Replace the sensor head Consumption of filament Replace the sensor head The sensor head’s contaminated Replace the sensor head Loose connection or disconnection of cable Reconnection or exchange... -
Page 69: Appendix
APPENDIX 13.1. Principles of Operation 13.1.1. Basic structure of ion gauge When gas molecular collide with particles having Gas molecule energy above a certain level, they emit electrons and are turned into ions. This phenomenon is called gas ionization. Principles of operation of the ionization gauge are explained below referring to the B-A type ionization gauge shown in the figure below. -
Page 70: Problems Of Ion Gauge
13.1.2. Problems of ion gauge The ion gauge has a number of factors that Absorbed determine its measurable lower limit value. One is the residual current by soft X-rays. molecules Soft X-rays are generated when the electrons emitted from the filament collide with the grid. -
Page 71: Axial Symmetric Transmission (At) Gauge
13.1.3. Axial symmetric transmission (AT) gauge To overcome the problems above, the axial symmetric transmission type (AT) gauge has been developed, in which a Bessel-Box type energy filter is provided between the ionization chamber and ion collector. This gauge is called AxTRAN gauge. This vacuum gauge features the capability of separating gas ions and ESD ions by using their initial kinetic energies and the geometrical structure of the energy filter that reduces the residual current by soft-rays (the ionization chamber is not visible from the ion collector). -
Page 72: Micro Current Measurement
13.1.4. Micro current measurement This vacuum gauge uses a micro-current current amplifier having a minimum resolution of 0.5 fA (femtoampere: 10 Measurement of a micro current using such a high sensitivity, high gain amplifier requires a number of cautions. • High sensitivity, high gain amplifier is very sensitive to temperature. Possible reasons for this are the change in characteristics of the amplifier itself, thermal expansion of the cable, current generation due to contraction, and others. -
Page 73: Types Of Measurable Gas And Specific Sensitivity
13.2. Types of Measurable Gas and Specific Sensitivity As explained in 13.1.1, this vacuum gauge has been adjusted so that the correct pressure is indicated for nitrogen gas. Therefore, if a gas atmosphere other than nitrogen gas is measured, the measurement value will have an error. - Page 74 4.57±0.47 Values marked with [*] are 5.60±0.76 cited from Reference 2. 6.60 6.77±1.44 7.60 7.72 8.18 Unfortunately, data on other types of gas are not available 8.86 at ULVAC. 0.614* 2.06±0.27 1.29* 2.27±0.28 1.77* 3.25±0.22 2.07* 3.82±0.59 4.81±0.99 6.49 6.37±0.86 7.22...
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Page 75: Appendix: Test Mode
A PPENDIX: TEST MODE 1 4 B This gauge has a test mode that permits confirmation of software version. Turning on the power, with the [△] key and [] key held down simultaneously, displays the software version and starts up this gauge. -
Page 76: Warranty
1) In case, special agreement or memorandum for specifications is made individually, the descriptions are prior to this article “13 Product Warranty”. 2) Buyer shall inform ULVAC when this product is exported out of Japan. In the meantime, Buyer shall take necessary procedures according to Foreign Exchange and Foreign Trade Law. -
Page 77: Ec Declaration Of Confortmity
E C DECLARATION OF CONFORTMITY 1 6 B - 68 -... -
Page 78: China Rohs Declaration
C hina RoHS Declaration 1 7 B Management Methods for Controlling Pollution by Electronic Information Products This mark is applied to the electronic information product sold in the People's Republic of China. The figure at the center of the mark is the validity date of environmental protection. -
Page 79: Certificate Of Decontamination
C ERTIFICATE OF DECONTAMINATION 1 8 B - 70 -... -
Page 80: Related Drawings
R ELATED DRAWINGS 1 9 B Fig. 19-1 ISX2-compatible sensor heads - 71 -... - Page 81 Filament common Orange Filament 1 Yellow Filament 2 Blue Grid Green White Fig. 19-2 Sensor head electrode location - 72 -...
- Page 82 Fig. 19-3 Dimensional drawing - 73 -...
- Page 83 The panel cut dimensions of the gauge are as shown above. When screw holes are tapped in the panel, the screw size is M5 or M4. If they are not tapped and fixed with nuts on the rear, use 5mm-dia. or 4mm-dia. screws. Fig.
- Page 84 １ ２ ① ② Ｇ Short Filament common : Orange Filament 1 : Yellow Filament 2 : Blue Grid : Green Vbe: : Red Vba: :White Pin No. Signal identification Pin No. Signal identification FIL1 (yellow) Vbe (red) Vba (white) Vba (white) Vgf (green) Vgf (green)
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