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MBX-1330N
Ulvac MBX-1330N Supply Matching box Manuals
Manuals and User Guides for Ulvac MBX-1330N Supply Matching box. We have
1
Ulvac MBX-1330N Supply Matching box manual available for free PDF download: Instruction Manual
Ulvac MBX-1330N Instruction Manual (107 pages)
High-Frequency Power Supply
Brand:
Ulvac
| Category:
Power Supply
| Size: 4.24 MB
Table of Contents
Table of Contents
7
For Safe Operation
9
Precautions When Handling the System
9
Warning Labels/Nameplate
10
Contact Information
10
Overview
11
Introduction
11
Features
11
System Configuration
12
Cooling Water Quality Standard
14
Individual RF Generator Specifications
15
Common RF Generator Specifications
19
Individual Controller Specifications
21
Individual Matching Box Specifications
22
Common Matching Box Specifications
26
Setup
27
Checking the Accessories
27
RF Generator Installation
28
RF Generator Mounting Structure
29
RF Generator Installation Environment
30
Matching Box Installation
31
Matching Box Installation Method
31
In the Case of Connector Output
33
System Wiring
35
Cable Connections
35
Input RF Generator Wiring
37
Connecting the Earth Terminal
38
About the Interlock
39
Functions
40
Descriptions of RF Generator Functions
40
Descriptions of Front Panel Functions
40
Descriptions of Rear Panel Functions
41
Descriptions of Control Panel Functions
45
Descriptions of Protection Functions
46
Descriptions of External Control Functions
47
Descriptions of Matching Box
51
Descriptions of Parameter Functions
53
Descriptions of External Control (RS-232C) Functions
67
Operation
70
RF Generator Operating Procedures
70
Turning on the RF Generator
70
Local Operation Method (Panel Operation)
70
Remote Operation (External Control Operation) Method
74
Special Commands
76
Matching Adjustment
77
Matching Adjustment Overview
77
Matching Fundamentals
77
Matching Box Internal Adjustment Work
79
Adjusting the Number of Coil Short Circuits (MBX-1305N/MBX-1310N)
80
Adjusting the Number of Coil Short Circuits (MBX-1330N/MBX-1350N)
81
Adding a Fixed Capacitor
83
Matching Box Power Derating
84
MBX-1310N/MBX-1305N Derating Reference Values
84
MBX-1330N Derating Reference Values
88
MBX-1350N Derating Reference Values
90
Maintenance
92
RF Generator Maintenance and Inspection
92
Matching Box Maintenance and Inspection
94
Troubleshooting
95
RF Generator Troubleshooting
95
Matching Box Troubleshooting
96
Reference Materials
97
CE Declaration of Conformity
105
People's Republic of China Electronic Industry Standard SJ/T 11364 -2014 (China Rohs2)
107
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