Edwards RV3 Instruction Manual page 15

Table 4 Performance data - High vacuum mode - 2
Parameter
Gas-ballast control closed (position '0')
Ultimate total pressure
Gas-ballast control low flow (position 'I')
Ultimate total pressure
Gas-ballast flow
Maximum water vapour pump-
ing rate
Maximum water vapour inlet
pressure
Gas-ballast control high flow (position 'II')
Ultimate total pressure
Gas-ballast flow
Maximum water vapour pump-
ing rate
Maximum water vapour inlet
pressure
Table 5 Performance data - High throughput mode - 1
Parameter
Gas-ballast control closed (position '0')
Ultimate total pressure
Gas-ballast control low flow (position 'I')
Ultimate total pressure
A65201880_AA
A65201880_AA - Technical data
Units
1-phase
mbar
Pa
mbar
Pa
-1
l min
-1
0.06
kg h
mbar 10
Pa
1 x 10
mbar
Pa
-1
l min
-1
0.22
kg h
mbar 38
Pa
3.8 x 10
HIGH THROUGHPUT MODE S
Units
1-phase
mbar
Pa
mbar
Pa
Page 15
HIGH VACUUM MODE S
RV8
3-phase 1-phase
-3
2 x 10
-1
2 x 10
-2
3 x 10
3
5
0.04
7
3 2
7 x 10
-2
6 x 10
6
16
0.20
34
3 3
3.4 x 10
RV3
3-phase 1-phase
-2
3 x 10
3
-2
6 x 10
6
RV12
3-phase
-3
2 x 10
-1
2 x 10
-2
3 x 10
3
5
0.06 0.04
7 5
2
7 x 10 5 x 10
-2
6 x 10
6
16
0.29 0.25
32 28
3
3.2 x 10 2.8 x 10
RV5
3-phase
-2
3 x 10
3
-2
6 x 10
6
03/2021 - ©Edwards Limited
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