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B777-07-000
Edwards B777-07-000 Manuals
Manuals and User Guides for Edwards B777-07-000. We have
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Edwards B777-07-000 manual available for free PDF download: Instruction Manual
Edwards B777-07-000 Instruction Manual (38 pages)
Compound Turbomolecular Pumps
Brand:
Edwards
| Category:
Water Pump
| Size: 1 MB
Table of Contents
Table of Contents
3
Introduction
7
Scope and Definitions
7
Technical Data
9
General
9
Pumping Media
9
General Information
9
Pumps Without Gas Purge
10
Pumps with Gas Purge
10
Vent Gas Specification and Vent Control Data
11
Purge Gas Specification
11
Water Cooling
11
Vent Gas and Vent Control Data
11
Cooling Water Specification
11
Materials Exposed to Gases Pumped
12
Technical Data
12
Installation
15
Unpack and Inspect
15
List of Items Supplied
15
Typical Pumping System
16
Typical Installation
17
Connection to the Vacuum System
17
Inlet Screens (Supplied Fitted)
17
Inlet Connection
19
Backing Connection
19
Interstage Connection (Hi Pump Variants Only)
19
Vent Options, Vent Valve Connection and Control
20
Do Not Remove Screws 'B' 12 3 Maximum Rate of Pressure Rise When Venting
20
Purge Gas Connection
21
Connect the Purge Gas
21
Recommended Purge Gas Flow
21
Electrical Installation
21
Vent Restrictor Orifice Diameter (with Atmospheric Pressure at the Inlet)
21
Dimensions and Features of EXT555H Pumps
22
Cooling
23
Introduction
23
Forced Air Cooling
23
Water Cooling
23
Magnetic Fields
24
Operation
25
Start up
25
Stand-By
25
Shut-Down
25
Safety Interlocks and Control System
26
Bakeout (Conflat Only)
26
Maintenance
27
Introduction
27
Bearing Maintenance
27
Clean the Pump
27
Fault Finding
28
Storage and Disposal
31
Storage
31
Disposal
31
Service, Spares and Accessories
33
Introduction
33
Service
33
Spares
33
ISX Inlet-Screen
33
Inlet-Strainer (Ext555Hi Pump Only)
34
Inlet-Flange Seals
34
Accessories
34
Installation
34
EXC Controller
34
Installation of EXT555H Optional Accessories and Spares
35
Pump-To-Controller Cable
36
EXDC Drive Modules
36
BX Bakeout Band (Conflat Only)
36
FL20K Foreline Trap
36
BX Bakeout Band
36
TAV Vent-Valve and Vent-Port Adaptor
37
ACX Air-Cooler
37
WCX Water-Cooler
37
Vibration Isolators
37
PRX Purge-Restrictor
38
VRX Vent-Restrictor
38
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