Technical Data; Specifications; Data Table - PI L-509 Series User Manual

10 Technical Data

10 Technical Data
In this Chapter

Specifications ............................................................................................................................... 47

Dimensions .................................................................................................................................. 52
Tightening Torque for Screws, ISO 4762 - A2 .............................................................................. 55
Pin Assignment ............................................................................................................................ 56
10.1 Specifications
10.1.1

Data Table

L-509.x4AD00 / L-509.x0AD10 / L-509.x0DG10
Motion and positioning
Travel range*
Integrated sensor
Sensor resolution rotary
encoder
Design resolution
Minimum incremental motion 0.2
Unidirectional repeatability
Backlash
Bidirectional repeatability
Crosstalk, angular error xry
(pitch)
Crosstalk, angular error xrz
(yaw)
Max. velocity
L-509 Stage
L-509.x4AD00 L-509.x0AD10
26 / 52 / 102 26 / 52 / 102
Linear encoder Rotary encoder
- 16384
0.05 0.06
0.8
0.1 0.2
0.2 0.3
±0.3 ±0.5
±60 / ±90 / ±120 ±60 / ±90 / ±120 ±60 / ±90 / ±120 µrad
±60 / ±90 / ±120 ±60 / ±90 / ±120 ±60 / ±90 / ±120 µrad
50 50
MP141E
L-509.x0DG10 Unit
26 / 52 / 102 mm
Rotary encoder
4096 cts./rev.
0.008 µm
0.1 µm
0.1 µm
1 µm
µm
3 mm/s
Version: 1.1.0
Tolerance
max.
typ.
typ.
typ.
typ.
typ.
typ.
max.
47