Troubleshooting; Possible Causes And Correction - PI L-509 Series User Manual

8 Troubleshooting

8 Troubleshooting
In this Chapter

Possible Causes and Correction ................................................................................................... 41

Moving the Platform Manually .................................................................................................... 43
8.1 Possible Causes and Correction
Problem
Reduced positioning
accuracy
Functional impairment
after system
modification
L-509 Stage
Possible causes
Warped base body
When the L-509 is mounted
vertically: The load exceeds
the self-locking of the drive.
Increased wear due to small
motions over a long period
of time

Controller was replaced.
 L-509 has been replaced
with another model.
Solution
 Mount the L-509 on an even surface. The
recommended evenness of the surface is
≤ 10 µm.
 Reduce the load. Make sure that the self-locking
(see specification of the holding force in the
data table (p. 47)) of the drive is not exceeded.
 Carry out a maintenance run over the entire
travel range (p. 39).
Controller from PI:
 Load the parameters from the stage database
that correspond to the combination of controller
and L-509 model.
Controller from a third-party supplier:
 Check the operating parameters.
MP141E Version: 1.1.0 41