Cleaning The L-509 - PI L-509 Series User Manual

7 Maintenance
7.3

Cleaning the L-509

Prerequisites
 You have disconnected the stage from the controller and the power supply.
Cleaning the stage
 If necessary, clean the surfaces of the stage with a cloth that is lightly dampened with a
mild cleanser or disinfectant.
40 Version: 1.1.0 MP141E L-509 Stage