Mounting The L-509 Onto A Surface - PI L-509 Series User Manual

5 Installation
5.2

Mounting the L-509 onto a Surface

NOTICE
Protruding screw heads!
Protruding screw heads can damage the L-509.
 Ensure that the screw heads do not protrude from countersunk holes so that they do not
interfere with the stage motion.
NOTICE
Warping of the L-509 due to mounting on uneven surfaces!
Mounting the L-509 on an uneven surface can warp the L-509. Warping reduces the accuracy.
 Mount the L-509 on an even surface. The recommended evenness of the surface is ≤10
µm.
 For applications with large temperature changes:
Only mount the L-509 on surfaces that have the same or similar thermal expansion
properties as the L-509.
INFORMATION
For mounting onto a surface, the L-509 has mounting holes for M4 screws in its base body. The
number of holes available depends on the model:
 L-509.1xxxxx,: 4 mounting holes
 L-509.2xxxxx, L-509.4xxxxx: 8 mounting holes
The correct number of screws and washers is included in the scope of delivery of the L-509.
L-509 Stage MP141E Version: 1.1.0 19