PI L-509 User Manual
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PI L-509 User Manual

Vacuum-compatible precision linear positioner (1e-7 hpa)
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MP186E
L-509
Vacuum-Compatible Precision Linear Positioner (1E-7 hPa)
User Manual
Version: 1.0.0
PI miCos GmbH, Freiburger Strasse 30, 79427 Eschbach, Germany
Phone +49 7634 5057-0, Fax +49 7634 5057-99, Email info@pimicos.com, www.pi.ws
Date: 2019-03-18
This document describes the following precision
linear positioner,
vacuum-compatible 1 E-7 hPa:
L-509.0x1300V7:
with 2-phase stepper motor, without encoder
L-509.0x1311V7:
with 2-phase stepper motor and linear encoder
x stands for travel range:
2 = 26 mm
3 = 52 mm
5 = 102 mm

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  • Page 1 2-phase stepper motor and linear encoder x stands for travel range: 2 = 26 mm 3 = 52 mm 5 = 102 mm PI miCos GmbH, Freiburger Strasse 30, 79427 Eschbach, Germany Phone +49 7634 5057-0, Fax +49 7634 5057-99, Email info@pimicos.com, www.pi.ws...
  • Page 2 PIMikroMove®, NEXACT®, Picoactuator®, PInano®, NEXSHIFT®, PITOUCH®, PIMag®, PIHera, Q-Motion® © 2019 Physik Instrumente (PI) GmbH & Co. KG, Karlsruhe, Germany. The text, photographs, and drawings in this manual are protected by copyright. With regard thereto, Physik Instrumente (PI) GmbH & Co. KG reserves all rights.

  • Page 3: Table Of Contents

    General Notes on Installation ................... 15 Attaching the L-509 to a Surface ................17 Connecting the L-509 to the Protective Earth Conductor ........20 Affixing the Load to the L-509 .................. 22 Connecting the L-509 to a Controller ............... 24 Startup General Notes on Start-Up ..................
  • Page 4 10.1.3 Ambient Conditions and Classifications ............38 10.2 Dimensions ....................... 39 10.2.1 L-509 Positioner ................... 39 10.2.2 Hole Pattern of the Platform of the L-509 ........... 40 10.2.3 L-500.AV3-V9 Adapter Bracket ..............41 10.3 Tightening Torque for Screws, ISO 4762 - A2 ............42 10.4 Pin Assignment ......................

  • Page 5: About This Document

    1 About this Document About this Document Objective and Target Group of this User Manual This user manual contains the required information on the intended use of the L-509 (10 vacuum version). Basic knowledge of closed-loop systems, motion control concepts, handling vacuum products, and suitable cleanliness and safety measures is assumed.

  • Page 6: Definition Of Terms

    Photographic illustrations may also differ and must not be seen as guaranteed properties. Other Applicable Documents The devices and software tools from PI that are mentioned in this documentation are described in separate manuals. Product...

  • Page 7: Downloading Manuals

    Freely accessible manuals − Manuals that are protected by a password 8. Click the desired manual and save it to the hard disk of your PC or to a data storage medium. L-509 Vacuum-compatible positioner (1E-7 hPa) MP186E Version: 1.0.0...

  • Page 9: Safety

    Safety Intended Use The L-509 is a laboratory device as defined by DIN EN 61010. It is intended for indoor use and use in an environment which is free of dirt, oil, and lubricants. Because cleanliness is important for a vacuum product, it is also necessary to take various measures to avoid contamination. In...

  • Page 10: Measures For Handling Vacuum-Compatible Products

    2 Safety  If you give the L-509 to other users, also include this user manual as well as all other relevant information provided by the manufacturer.  Only use the device on the basis of the complete user manual. Missing information due to an incomplete user manual can result in minor injury and damage to equipment.

  • Page 11: Product Description

    All models are electromotive linear positioning positioners with precision leadscrew. They differ with respect to: Travel range  Encoder equipment  Travel range in inches L-509 Travel range in mm (approx.) .02xxxxV7 .03xxxxV7 .05xxxxV7 L-509 Linear encoder .0x1300V7 .0x1311V7* * Separate sensor connection L-509 Vacuum-compatible positioner (1E-7 hPa) MP186E Version: 1.0.0...
  • Page 12 Precision linear positioner, 85 mm width, 2-phase stepper motor, 102 mm (4") travel range, linear encoder with sin/cos signal transmission, mechanical limit switches, vacuum-compatible 1 E-7 hPa  For further technical data, see the specifications. (p. 37). Version: 1.0.0 MP186E L-509 Vacuum-compatible positioner (1E-7 hPa)

  • Page 13: Product View

    Protective earth (PE) connector (screw M4 with corresponding washers) Sensor wire strands (vacuum-capable; not shown in their entireties) Motor wire strands (vacuum-capable; not shown in their entireties) Sensor connector (vacuum-capable plug D-Sub 9; L-509.0x1311V7 models only) Direction of Motion Figure 2:...

  • Page 14: Product Labeling

    CE conformity mark WWW.PI.WS Manufacturer's address (website) Old equipment disposal Controller Motor connection Sensor Linear encoder connection (L-509.0x1311V7 models only) Protective earth symbol, marks the protective earth connection of the L-509 (p. 20) Version: 1.0.0 MP186E L-509 Vacuum-compatible positioner (1E-7 hPa)

  • Page 15: Scope Of Delivery

    Component L-509.0x1300V7 or Positioner according to order (p. 7) L-509.0x1311V7 720090620-0300 Motor cable and for L-509.0x1311V7: sensor cable3 m (if applicable incl. A/D converter); according to the controller ordered (+ C-815.LSH2 / C-815.AC32-0300) MP146EK Short instructions for positioners with electric motors...

  • Page 16: Suitable Controllers

    SMC Hydra RS-232, LAN L-509.0x1311V7 PC software is included in the scope of delivery of the controllers from PI. The operation of the controllers is described in the corresponding user manuals. Technical Features 3.8.1 Encoder The L-509.0x1300V7 models are not equipped with an encoder.

  • Page 17: Unpacking

    2. Compare the contents with the items listed in the contract and the packing list. 3. Before opening the vacuum packaging, check the packaging and the product – if visible – for signs of damage. If there is any sign of damage or missing parts, contact PI immediately.

  • Page 19: Installation

     Make sure that the screws are vacuum-compliant (e.g. including vent holes) NOTICE Cable break! A cable break leads to failure of the positioner.  Install the positioner so that the cable is not bent too strongly or crushed. L-509 Vacuum-compatible positioner (1E-7 hPa) MP186E Version: 1.0.0...
  • Page 20 Due to lack of surrounding air, heat dissipation from the motor is reduced significantly in a vacuum.  Install the L-509 so that the application is not impaired by the dissipated heat.  Avoid exceeding the allowed max. velocity of 5 mm/s. Operation within the allowed velocity range is automatically ensured by correct selection/detection of the product model in the motion control software.

  • Page 21: Attaching The L-509 To A Surface

    Only mount the L-509 on surfaces that have the same or similar thermal expansion properties as the L-509. INFORMATION For mounting onto a surface, the L-509 has mounting holes for M4 screws in its base body. The number of holes available depends on the model: ...
  • Page 22 − For applications with large temperature changes: The surface should have the same or similar thermal expansion properties as the L-509 (e.g., surface made of aluminum).  You have accounted for the space required to route cables without bending and according to regulations.
  • Page 23 3. Insert the screws into all accessible mounting holes and tighten. 4. Repeat steps 2 to 4 for all available concealed mounting holes. 5. Check that the positioner is affixed firmly to the surface. L-509 Vacuum-compatible positioner (1E-7 hPa) MP186E Version: 1.0.0...

  • Page 24: Connecting The L-509 To The Protective Earth Conductor

    5 Installation Connecting the L-509 to the Protective Earth Conductor INFORMATION It is only necessary to connect the L-509 to the protective earth conductor when both of the following conditions are met:  The load on the platform of the L-509 must be connected to the protective earth conductor, but it is not possible to connect the protective earth conductor directly to the load.
  • Page 25 2. Affix the cable lug of the protective earth conductor using the M4 screw on the protective earth connection of the L-509 as shown in the profile view. 3. Tighten the M4 screw with a torque of 1.2 Nm to 1.5 Nm.

  • Page 26: Affixing The Load To The L-509

    5 Installation Affixing the Load to the L-509 NOTICE Impermissibly high load on the positioner! An impermissible high load impairs the motion of the platform and can damage the positioner.  When considering the mass and mounting method of the load, pay attention to the specified maximum permissible forces that may act on the platform (p.
  • Page 27 2. Use the screws to affix the load on the selected mounting holes in the platform. 3. Check that the load is affixed firmly to the platform of the positioner. L-509 Vacuum-compatible positioner (1E-7 hPa) MP186E Version: 1.0.0...

  • Page 28: Connecting The L-509 To A Controller

    Suitable tools for tightening the screws to the connections  Connecting the L-509 to a Controller 1. Remove the ESD protection from all connections of the L-509. 2. Connect the cable(s) of the vacuum side to the corresponding connector(s) of vacuum feedthrough.

  • Page 29: Startup

    Due to lack of surrounding air, heat dissipation from the motor is reduced significantly in a vacuum.  Install the L-509 so that the application is not impaired by the dissipated heat.  Avoid exceeding the allowed max. velocity of 5 mm/s. Operation within the allowed velocity range is automatically ensured by correct selection/detection of the product model in the motion control software.
  • Page 30 Operating voltages that are excessively high or incorrectly connected can cause damage to the L-509.  Do not exceed the operating voltage range (p. 38) that is specified for the L-509.  Operate the L-509 only when the operating voltage is properly connected; see "Pin Assignment"...
  • Page 31  Do not place any objects in areas where they can be caught by moving parts.  Before connecting the L-509, check whether a macro is defined as the startup macro in the controller, and cancel the selection of the startup macro if necessary.

  • Page 32: Starting Up The Positioner

     You have read and understood the manual of the PC software used.  The controller and the required PC software have been installed. All connections on the controller have been set up (see "Connecting the L-509 to the Controller" (p. 24) and the user manual of the controller).

  • Page 33: Maintenance

    Improper maintenance can result in misalignment and failure of the L-509.  Only loosen screws according to the instructions in this manual. Performing a Maintenance Run Depending on the operating conditions and the period of use of the L-509, the following maintenance measures are required: Maintenance run The maintenance run serves to distribute the existing lubricant.

  • Page 34: Cleaning The L-509

     You have disconnected the positioner from the controller and the power supply. Cleaning the positioner  If necessary, clean the surface of the positioner with a lint-free cleanroom cloth that has been dampened with clean isopropyl alcohol (99.9% or better). Version: 1.0.0 MP186E L-509 Vacuum-compatible positioner (1E-7 hPa)

  • Page 35: Troubleshooting

    Troubleshooting Possible Causes and Remedies Problem Possible causes Solution  Mount the L-509 onto an even surface. The Reduced positioning Warped base body recommended flatness of the surface is ≤ 10 µm. accuracy  Reduce the load. Make sure that the self-locking...
  • Page 36 PC Software. For details, see the user manual of the controller. Platform has triggered the If you use a controller from PI: limit switch. 1. Switch on the servo mode for the affected axis again in the PC software.

  • Page 37: Moving The Platform Manually

     Turn the vibration absorber as far as necessary: − Rotating the absorber clockwise: Platform moves towards the motor − Rotating the absorber counterclockwise: Platform moves away from the motor The rotary motion is transferred directly to the drive screw. L-509 Vacuum-compatible positioner (1E-7 hPa) MP186E Version: 1.0.0...

  • Page 39: Customer Service Department

    9 Customer Service Department Customer Service Department For inquiries and orders, contact your PI sales engineer or send us an email (mailto: info@pi.de).  If you have questions concerning your system, have the following information ready: − Product codes and serial numbers of all products in the system −...

  • Page 41: Technical Data

    Drive screw pitch Load capacity max. Push/pull force max. Permissible lateral force max. Holding force max. Drive properties Motor Type 2-phase stepper 2-phase stepper motor motor Operating voltage nom. max. Limit switches Mechanical Mechanical L-509 Vacuum-compatible positioner (1E-7 hPa) MP186E Version: 1.0.0...

  • Page 42: Maximum Ratings

    48 V 0 Hz 10 W 10.1.3 Ambient Conditions and Classifications The following ambient conditions and classifications must be observed for the L-509: Area of application For indoor use only Maximum altitude 2000 m Relative humidity Max. 80 % for temperatures up to 31 °C Linearly decreasing to 50 % at 40 °C...

  • Page 43: Dimensions

    10 Technical Data 10.2 Dimensions 10.2.1 L-509 Positioner Dimensions in mm. For a detailed view (X) of the platform, see below. Figure 9: Dimensions for L 509.0x1300V7 (left and right) and L-509.0x1311V7 (middle and right) Model L-509.021300V7 135.3 122.5 L-509.021311V7 135.3 122.5...

  • Page 44: Hole Pattern Of The Platform Of The L-509

    10 Technical Data 10.2.2 Hole Pattern of the Platform of the L-509 Dimensions in mm. Note that the decimal places are separated by a comma in the drawings. Figure 10: Hole pattern of the platform Version: 1.0.0 MP186E L-509 Vacuum-compatible positioner (1E-7 hPa)

  • Page 45: L-500.Av3-V9 Adapter Bracket

    10 Technical Data 10.2.3 L-500.AV3-V9 Adapter Bracket Dimensions in mm. Note that the decimal places are separated by a comma in the drawings. Figure 11: L-500.AV3-V9 adapter bracket L-509 Vacuum-compatible positioner (1E-7 hPa) MP186E Version: 1.0.0...

  • Page 46: Tightening Torque For Screws, Iso 4762 - A2

    Tightening Torque for Screws, ISO 4762 - A2 The following tightening torques for screws according to ISO4762 (corresponds to DIN 912) - A2 may not be exceeded. Value Maximum tightening torque 1.5 Nm 2 Nm 2.5 Nm 3 Nm Version: 1.0.0 MP186E L-509 Vacuum-compatible positioner (1E-7 hPa)

  • Page 47: Pin Assignment

    Strand Color Direction Limit E1 (neg) Yellow Output Limit GND Brown (Shield) Motor B+ Blue Input Motor A+ Input Limit E2 (pos) Green Output Motor B+ Green Input Motor A- Yellow Input L-509 Vacuum-compatible positioner (1E-7 hPa) MP186E Version: 1.0.0...

  • Page 48: D-Sub 9 (Female, Only L 509.0X1311V7)

    Encoder Power (+ 5 V) Brown Input Encoder GND White Encoder C+ Grey Output Encoder B+ Blue Output Encoder A+ Green Output (Shield) Encoder C- Pink Output Encoder B- Output Encoder A- Yellow Output Version: 1.0.0 MP186E L-509 Vacuum-compatible positioner (1E-7 hPa)

  • Page 49: Old Equipment Disposal

    PI miCos equipment made available on the market after 13 August, 2005 without charge. Any old PI miCos equipment can be sent free of charge to the following address: PI miCos GmbH Freiburger Strasse 30...

  • Page 51: Eu Declaration Of Conformity

    12 EU Declaration of Conformity EU Declaration of Conformity An EU Declaration of Conformity has been issued for the L-509 series in accordance with the following European directives: • EMC Directive • RoHS Directive The applied standards certifying the conformity are listed below.

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