Specification - THORLABS MAX200 Manual

Stage Specification
Travel:
MAX200 & MAX201: 3"x 2" (75mm x 50mm)
MAX202 & MAX203: 2.75" X 4.13" (70 x 105mm)
Maximum Speed: 10mm/s
Resolution: 40nm
Accuracy:
MAX200 & MAX202: 5µm
MAX201 & MAX203: 1µm
Unidirectional Repeatability: 1µm
Open Loop Accuracy: 5µm in X and Y (typical error over full travel)
Repeatability: 1µm in X and Y (typical error over full travel)
Closed Loop Accuracy: 1µm for Both Axis (typical error over full travel)
Load Capacity: 5kg
Straightness of Travel: 400 arcseconds (0.1 deg) Maximum Pitch Error for Both Axis
100 arcseconds (0.025 deg) Maximum Yaw Error for Both Axis
Motor Specification
Step Angle:
Step Accuracy:
Rated Phase Current:
Phase Resistance:
Phase Inductance:
Holding Torque:
Detent Torque:
Phase Inductance:
Operating Temperature:
6
11
26
1.8°
(50 poles and ±2 phases for 360° divided by 200, or 1.8°)
5%
1A
4.6 
10.6mH
23.1N.cm
1.7N.cm
10.6mH
-20°C to +40°C (Motor Specification Only)
1 Limit Switch Ground
1
2 O/P +VE (End) Limit Switch
3 O/P -VE (Home) Limit Switch
4 PH B -ve
5 PH B +ve
Fig. 5.1 Motor pin out details
Chapter 5

Specification

6 PH A -ve
7 PH A +ve
13 Limit Switch +5V
15 Ground/Earth