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NTEGRA Therma Probe NanoLaboratory. Instruction Manual
The desing of Ntegra Therma main units is discussed in the books «Performing
Measurements» and «Control Electronics». The features of configuration for wide-range
temperature measurements are described below.
Specifications
Parameter
Temperature range
Stability of temperature maintenance
Thermal drift on XY
Thermal drift on Z
Scan range
XY linearity error
Z linearity error
RMS X, Y sensor noise in 300 Hz band
RMS Z sensor noise in 1 kHz band
RMS noise on Z in 1 kHz band
Maximum sample size
1.1. VT thermal Exchangeable Mount
A general view of the VT thermal exchangeable mount is given in Fig. 1-2. The
exchangeable mount provides both low temporal drift in the temperature range from -30°С
to +80°С and small temperature drift after the temperature of the cell has been changed.
1 – temperature chamber; 2 –heat exchanger of scanner; 3 – outlets for liquid cooling
6
Fig. 1-2. VT thermal exchangeable mount
system; 4 – registration head seats
Value
from -30°C up to +80°C
0.005°C typically
better than 0.001°C
≤15 nm/°C
≤10 nm/°C
10x10x6 μm
0.2% peak-to-peak/2
1% peak-to-peak/2
≤0.03 nm
≤0.05 nm
<0.025 nm
∅14x1 mm
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