Item
Scan
Magnification Error
Magnification Error Deviation
Perpendicularity
Specification
Leading edge: 4.0 ± 2.0 mm
Trailing edge: 4.0 ± 3.0 mm (Reference
value)
Item
3.Preventive Maintenance
Specification
Main: ± 0.5%
Sub: ± 1.5%
Main: ±2.0%
Sub: ± 3.0%
± 0.55 deg
Remarks
Remarks
21