Connecting Rf Probes - Keysight Technologies B1500A Connection Manual

Semiconductor device analyzer, for wafer prober
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Connecting RF Probes

The RF measurement system supports the measurement of the three-terminal MOSFET
(source and well (substrate) are shorted) by using the RF probes as shown in Figure 1-22.
One measurement path is for the gate terminal and the other path is for the drain terminal.
Moreover, the source/well terminal must be electrically connected to the ground via the
shielding of the measurement path (RF probes and measurement cables). See Figure 1-23.
Figure 1-22
RF probes
Prepare two RF probes to perform the RF measurement. The RF probe must have the
signal line and the ground lines as shown in Figure 1-23. The signal line is to connect the
gate or drain pad, and the ground lines are to connect the source/well pads. For the RF
probe and its installation, consult your favorite prober vender. Figure 1-22 shows RF
probes from Cascade Microtech, Inc.
Figure 1-23
Contact Pad and Probe Tip
RF probe
Keysight B1500A Connection Guide for Wafer Prober, Edition 1
to Gate
to Drain
Source/Well
Gnd
Signal
Gate
Gnd
Source/Well
Connection Guide for Wafer Prober
RF probe
Gnd
Signal
Drain
Gnd
WGFMU and RSU
25

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