Connection Guide for Wafer Prober
Interlock circuit
Interlock circuit
The interlock circuit is designed to prevent electrical shock wen a user touches the
measurement terminals.
CAUTION
You must install an interlock circuit on a shielding box to prevent hazardous voltage when
the door of the shielding box is open.
Figure 1-28 shows the pin assignments of the interlock connector that should be mounted
on a connector plate or test fixture.
Figure 1-28
Interlock connector pin assignments
6
1
5
4
3
Plug side View
Table 1-12
Recommended parts for interlock circuit
Description
Interlock connector (6 pin, female)
Interlock micro switch
2.1 V@ I
LED (V
= 10 mA)
F
F
Wire (24 AWG, 600 V)
Installing the interlock circuit
Prepare the required parts listed in Table 1-12. And install the interlock circuit as shown
below.
1. Make mounting hole for the interlock connector. See Figure 1-30 for dimensions.
2. Mount two mechanical switches on your shielding box, so that the switches close when
3. Mount an LED on your shielding box. For the dimensions of the LED, see Figure 1-29.
30
2
Qty
1
1
1
1
the door of the shielding box is closed, and open when the door is opened. For the
dimensions of the switch, see Figure 1-31 below.
Keysight B1500A Connection Guide for Wafer Prober, Edition 1
Interlock Switch
1
2
3
Wiring Side View
Product Number
N/A
N1254A-402
N/A
N/A
6
5
LED
4
Part number
1252-1419
3101-0302 or 3131-3241
1450-0641
8150-5680