Wgfmu And Rsu; Connecting Rsu - Keysight Technologies B1500A Connection Manual

WGFMU and RSU

This section covers the instructions to make connection between WGFMU and RF/DC
probes. Before starting the instructions, complete the installation of the B1500A installed
with the WGFMU. See Keysight B1500 manual.
NOTE
About WGFMU module installation
Module installation of WGFMU must be performed by Keysight Technologies service
personnel. Contact Keysight Technologies for the module installation.
NOTE
RSU has SMA terminal which is coaxial connection. In this connection, ultra low current
measurement can not be performed.

Connecting RSU

Prepare the required accessories and connect cables between RSU and WGFMU or SMU.
See Figure 1-19 for a connection example. This example connects two RSUs.
Figure 1-19 RSU Connection Example
B1500A
Required accessories:
•
•
Keysight B1500A Connection Guide for Wafer Prober, Edition 1
Triaxial cable
Force
Semse
WGFMU cable
Triaxial cable
Force
Sense
Channel 1
Channel 2
WGFMU cable
WGFMU-to-RSU cable (D-sub), 1ea. per one RSU
1.5 m, 3 m, or 5 m cable (furnished with WGFMU module. If another length is
required, order 16493R-006, 003 or 004)
The 16493R-801 adapter is required and mounted on a shielding box to make
connection to the RSU in the shielding box. Then the 60 cm and 2.4 m cables
(16493R-001 and 005) are required instead of the 1.5m, 3 m, or 5 m cable.
Sync connection cable (furnished with WGFMU module), 1 ea. between two
WGFMUs
Connection Guide for Wafer Prober
SMA
Output 1
SMU 1
WGFMU 1
RSU
D
G
S
SMA
SMU 2 Output 2
WGFMU 2
RSU
WGFMU and RSU
DUT
Subs
23