Gas Type Dependence - Inficon PSG550 Operating Manual

2.2

Gas Type Dependence

Indicated pressure (gauge calibrated for air)
p (mbar)
10
2
8
6
4
2
10
1
8
6
4
2
10
0
8
6
4
2
10
–1
8
6
4
2
Water vapor
10
–2
8
6
4
2
10
–3
10
–3
2
Calibration factors
valid for Pirani pressure range below 1 mbar
Gas type
He
Ne
Ar
Kr
Xe
tina60e1-a (2011-04)
10 10
–2 –1
6 6
4 2 4
p = C × indicated pressure
eff
Calibration
factor C
0.8
1.4
1.7
2.4
3.0
H He
2
10
0
6 6
2 4 2 4
Gas type
H
2
air, O , CO, N
2
CO
2
water vapor
Freon 12
Ne
Air
O
2
CO
N
2
CO
2
Ar
Freon 12
Kr
Xe
10 10
1 2
6
2 4
p (mbar)
eff
Calibration
factor C
0.5
1.0
2
0.9
0.5
0.7
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