Profibus interface
Specification, data format,
communication protocol
Interface, physical
Data rate
Node address
Local
(Adjustable via hexadecimal
<ADDRESS>, <MSD>,
<LSD> switches)
Default setting
Via Profibus
(hexadecimal <ADDRESS>
switches set to >7D
(>125
Profibus connection
Cable
Cable length, system wiring
For further information on the Profibus interface →
Materials exposed to vacuum
Vacuum connection
Filament
3PI1 / 6-0xx-xxxx
3PI2 / 7-0xx-xxxx
3PI3 / 8-0xx-xxxx
Feedthrough
Orifice
Further materials
3)
Only versions DN 16 ISO-KF and DN 16 CF-F.
14
hex
)
dec
3)
→
[8]
RS485
≤12 Mbaud (→
00 ... 7D
(0 ... 125
hex
01C
hex
00 ... 7D
(0 ... 125
hex
D-Sub, 9-pin, female
shielded, special Profibus
cable, →
33, →
according to Profibus speci-
fications, →
[8], [9]
stainless steel 1.4435
W
Ni
ceramic coated
glass
stainless steel
Ni, NiFe, stainless steel
1.4301
tina60e1-a
[5])
)
dec
)
dec
[9]
[5]
(2011-04)
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