Liquid process chemicals required, hot and DI water connection recommended.
Cleaning
1
2
WW
WW
DOS 4
DOS 1
0.4
0.3
DOS 1
0.4
149°F/
185°F/
65°C
85°C
2
3
= Customizable parameters.
CW = cold water
HW = hot water;
CWxx = CW proportion in mixed water as percentage (CW70 = 70% CW + 30% HW);
DI = fully demineralized water
Min = Holding time in minutes
DOS 1 = process chemicals
DOS 3 = neutralizing agent
DOS 4 = DOS module
Interim rinse
1
2
WW
WW
DOS 3
0.1
2
1
3
4
DI
1
Program chart
Final rinse
1
2
DI
167°F/
75°C
1
179