Chapter 6 Measurement; Selecting Measurement Mode - Iwatsu SY-8218 Instruction Manual

Chapter 6 Measurement

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6.1 Selecting measurement mode

● It selects a measurement mode.
➀ Press to display Mode menu (see Fig.6-1).
➁ While referring to Table 6-1, move the edition cursor to the mode to be used for measurement
and press to determine the selection.
➂ The screen of the selected measurement mode appears.
➃ Press or

6-1: This product recognizes connected measurement POD automatically. If measurement POD connected with the selected
measurement mode is not corresponding, error E12 is displayed when the measurement begins. After the stop of the power supply,
try to connect the correct POD again.
Measurement modes
to close Mode menu screen.
Table 6-1 Measurement modes and displayed measurement POD names
Measurement POD names
Standard
Cont
Chamber SY-320x / 321x
Sheet
DC Bias
SY-951 Standard measurement POD for SY-8218
SY-955 Standard measurement POD for SY-8219
Chamber Scanner System
SY-956 Mini Single Sheet Tester
SY-960 DC Bias Tester
30
B-H ANALYZER SY-8218 / SY-8219
*6-1
Fig.6-1 Mode menu
Descriptions