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Compressor 9600
HELIX Compressor 9600 Manuals
Manuals and User Guides for HELIX Compressor 9600. We have
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HELIX Compressor 9600 manuals available for free PDF download: Installation, Operation And Maintenance Instructions, Installation & Operating Instructions Manual, Schematics
HELIX Compressor 9600 Installation & Operating Instructions Manual (59 pages)
Installation, Operation, and Maintenance Instructions
Brand:
HELIX
| Category:
Compressor
| Size: 1 MB
Table of Contents
Maintenance Instructions
1
Table of Contents
4
Section 1 - 9600 Compressor Description
8
General
8
Benefits
8
Compressor Configurations
8
System Documentation
9
CTI-CRYOGENICS Helium Refrigeration System
9
Figure 1-1: 9600 Compressor
10
Specifications
11
Dimensions
11
Figure 1-2: 9600 Compressor Dimensions
11
Weight
12
Electrical
12
Table 1-1: Compressor Weight
12
Table 1-2: Electrical Input Specifications
12
Cooling Water
13
Figure 1-3: Water Flow Rate Versus Pressure Drop
13
Table 1-3: Cooling Water Specifications
13
General
14
Table 1-4: General Compressor Operating Specifications
14
Component Description
15
Figure 1-4: 9600 Compressor Rear View Component Locations
15
Control Circuit Breaker
16
Gas Charge Flared Fitting
16
Helium Pressure Gauge
16
Power Inlet
16
Power on Indicator
16
System Circuit Breaker
16
Cooling Water in
17
Cooling Water out
17
Cryopump Electrical Outlet
17
Return Gas Coupling
17
Table 1-5: Cryopump Electrical Outlet Pin Assignments
17
Compressor Remote Connector
18
Cryopump Power Phase Switch
18
Supply Gas Coupling
18
Multiple On-Board Cryopump Connections
18
Table 1-6: Compressor Remote Connector Pin Assignments
18
Figure 1-5: 9600 Compressor Connected to Multiple On-Board Cryopumps
19
Multiple Cryo-Torr Cryopump Connections
20
Figure 1-6: 9600 Compressor Connected to Multiple Cryo-Torr Cryopumps
20
Section 2 - Unpacking and Inspection
22
Introduction
22
Shipping Carton Inspection
22
Removal from Shipping Carton
22
Compressor Inspection
23
Compressor
23
Helium Static Pressure Verification
23
Shipping Carton Contents
23
Figure 2-1: Using the Shipping Carton Ramp
23
Section 3 - Installation
24
Introduction
24
Figure 3-1: 9600 Compressor Installation Flowchart
25
Supply and Return Water Line Connections
26
Hard Water Lines
26
Flexible Water Lines
26
Electrical Connections
27
Power Cable Preparation
27
Figure 3-2: 9600 Compressor Circuit Breaker Terminals (Cover Removed)
28
Phase Check
29
Cryopump Power Phase Switch Setting
30
Connecting/Disconnecting Helium Flex Lines
30
Connecting
30
Disconnecting
31
Figure 3-3: Connecting/Disconnecting Helium Flex Line Self
31
Single On-Board Cryopump Connections
32
Figure 3-4: Single On-Board Cryopump Connections
32
Figure 3-5: Single Cryo-Torr Cryopump Installation
33
Single Cryo-Torr Cryopump Connections
33
Multiple On-Board Cryopump Connections
34
Helium Line Connections
34
Power Cable Connections
35
Figure 3-6: Recommended Multiple On-Board Cryopump or Waterpump Installation (Splitter Box Located at Process Tool)
35
Multiple Cryo-Torr Cryopump Connections
36
Helium Line Connections
36
Figure 3-7: Alternative Multiple On-Board Cryopump or Waterpump Installation
36
Power Cable Connections
37
Figure 3-8: Recommended Multiple Cryo-Torr Cryopump Installation
38
Figure 3-9: Alternative Multiple Cryo-Torr Cryopump Installation
39
Section 4 - Operation
40
Adjusting System Helium Pressure
40
Static Helium System Pressure Verification
40
Table 4-1: 9600 Compressor Helium Static Charge
40
Section 5- Maintenance
41
Compressor Operation
41
Replacement of Helium Circuit Components
42
Section 5 - Maintenance
44
Scheduled Maintenance
44
Suggested Maintenance Equipment
44
Table 5-1: Suggested Maintenance Equipment
44
Adsorber Replacement
45
Sealing Couplings
45
Adjusting System Helium Pressure
47
Reducing Helium Pressure
47
Increasing Helium Pressure
48
Adding Helium
48
Appendix A - Customer Support Information
50
Appendix B - Flow Diagram
52
Appendix C - Troubleshooting Procedures
54
Table C-1: Compressor Troubleshooting Procedures
55
Appendix D - Schematic
58
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HELIX Compressor 9600 Installation, Operation And Maintenance Instructions (72 pages)
High Voltage Compressor
Brand:
HELIX
| Category:
Air Compressor
| Size: 1 MB
Table of Contents
Table of Contents
5
Tables
13
Safety Conventions
13
Introduction
13
Signal Word Descriptions
13
Safety Shape Descriptions
14
References
14
Section 1 - 9600 Compressor Description
15
General
15
Compressor Configurations
15
System Documentation
15
CTI-CRYOGENICS Helium Refrigeration System
15
Specifications
18
Dimensions
18
Weight
19
Electrical
19
Cooling Water
19
General
20
Component Description
22
System Circuit Breaker
23
Elapsed Time Meter
23
Control Circuit Breaker
23
Power on Indicator
23
Gas Charge Flared Fitting
23
Helium Pressure Gauge
24
Power Inlet
24
Return Gas Coupling
24
Cooling Water in
24
Cooling Water out
24
Cryopump Electrical Outlet
24
Compressor Remote Connector
25
Supply Gas Coupling
25
Multiple On-Board Cryopump Connections
26
Multiple Cryo-Torr Cryopump Connections
27
Section 2 - Unpacking and Inspection
29
Introduction
29
Shipping Carton Inspection
29
Removal from Shipping Carton
29
Compressor Inspection
30
Compressor
30
Helium "OFF" Condition Pressure Verification
30
Shipping Carton Contents
30
Section 3 - Installation
31
Introduction
31
Supply and Return Water Line Connections
33
Hard Water Lines
33
Flexible Water Lines
33
Electrical Connections
34
Phase Check
36
Connecting/Disconnecting Helium Flex Lines
37
Connecting
37
Disconnecting
37
Single On-Board Cryopump Connections
38
Multiple On-Board Cryopump Connections
41
Helium Line Connections
41
Power Cable Connections
42
Multiple Cryo-Torr Cryopump Connections
44
Helium Line Connections
44
Power Cable Connections
44
Section 4 - Operation
47
Adjusting System Helium Pressure
47
OFF" Condition Helium System Pressure Verification
47
Compressor Operation
48
Replacement of Helium Circuit Components
49
Section 5 - Maintenance
51
Scheduled Maintenance
51
Suggested Maintenance Equipment
51
Adsorber Replacement
52
Adjusting System Helium Pressure
55
Reducing Helium Pressure
55
Increasing Helium Pressure
56
Adding Helium
56
Appendix A - Customer Support Information
59
Customer Support Center Locations
59
Guaranteed Up-Time Support (GUTS
59
Product Information
59
E-Mail
59
Appendix B - Flow Diagram
61
Appendix C - Troubleshooting Procedures
63
Troubleshooting the Compressor
63
Technical Inquiries
63
Appendix D - Schematic
67
Introduction
67
HELIX Compressor 9600 Schematics (22 pages)
Low Voltage - Three Phase Cryopump Power
Brand:
HELIX
| Category:
Air Compressor
| Size: 0 MB
Table of Contents
Table of Contents
5
Figures
11
Compressor Safety
11
Schematics
13
Introduction
13
Table 1-2: Legend: On-Board/Cryo Electrical Module P/N 8135127G001
14
Table 1-3: Legend: On-Board Output Module P/N 8135148G001
15
Table 1-5: Legend: On-Board Splitter Box P/N 8135203
16
Appendix A - Customer Support Information
21
Customer Support Center Locations
21
Guaranteed Up-Time Support (GUTS
21
Product Information
21
E-Mail
21
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