Multiple On-Board Cryopump Connections; Helium Line Connections - HELIX 9600 Installation, Operation And Maintenance Instructions

Multiple On-Board Cryopump Connections

Make sure the Compressor power is OFF before making any
connections to the rear panel.

Helium Line Connections

The use of several compressors on a single manifold feeding a
common supply header and a common return header requires special
precautions. Contact CTI-CRYOGENICS for a review of the intended
installation and for specific technical instructions.
The use of a 9600 compressor on a manifold with other
CTI-CRYOGENICS compressor models requires a reduction of the
helium charge pressure to 200 - 210 psig charge pressure to avoid
helium safety valves from inadvertently venting. Refer to
Operation"
©2007 Helix Technology Corporation
CAUTION
CAUTION
and "Section 5 - Maintenance"
1. Connect the Supply and Return lines to the 9600 Compressor as
described in "Connecting/Disconnecting Helium Flex Lines"
this section.
2. Connect the Gas Return Line to the customer supplied helium
manifold and then to the GAS RETURN connector on the
On-Board Cryopump.
3. Connect the Gas Supply Line to the customer supplied helium
manifold and then to the GAS SUPPLY connector on the On-Board
Cryopump.
Part Number 8040437, Revision 104, 06/12/2007, ECO Number 18068
"Section 4 -
for more information.
in
3-11