Power Cable Connections - HELIX 9600 Installation, Operation And Maintenance Instructions

Multiple On-Board Cryopump Connections

Power Cable Connections

SUPPLY
WATER POWER
Figure 3-6: Recommended Multiple On-Board Cryopump or Waterpump Installation
3-12 Part Number 8040437, Revision 104, 06/12/2007, ECO Number 18068
1. Connect the On-Board Splitter Box power cable between the
CRYOPUMP ELECTRICAL OUTLET on the rear panel of the
Compressor and the On-Board Splitter Box power connector as
shown in Figure 3-6.
2. Connect the On-Board Cryopump or Waterpump power cables to
the CRYOPUMP 1, 2, or 3 connectors on the On-Board Splitter
Box and the respective cryopumps as shown in
NOTE: Your installation (number of pumps per compressor) will vary
based upon the On-Board Cryopump models used. Refer to
Customer Support Information"
Customer Support Center for information on specific compressor/pump
applications.
NOTE: The On-Board Splitter Box can be installed at the process tool
containing the pumps as shown in
Compressor as shown in
the On-Board Splitter box be installed near the process tool to reduce cable
requirements.
NOTE:
RETURN
REMOTE
On-Board Power Cable
to consult your local CTI-CRYOGENICS
Figure 3-6, or on the rear of the
Figure 3-7. CTI-CRYOGENICS recommends that
©2007 Helix Technology Corporation
Figure 3-6.
"Appendix A -
On-Board
Splitter Box