HELIX Compressor 9600 Installation & Operating Instructions Manual
  1. Manuals
  2. Brands
  3. HELIX Manuals
  4. Compressor
  5. Compressor 9600
  6. Installation & operating instructions manual
HELIX Compressor 9600 Installation & Operating Instructions Manual

HELIX Compressor 9600 Installation & Operating Instructions Manual

Installation, operation, and maintenance instructions
Hide thumbs Also See for Compressor 9600:
Table of Contents

Advertisement

Quick Links

-
C
TI
CRYOGENICS
HELIX TECHNOLOGY CORPORATION
9600 Compressor Installation, Operation, and

Maintenance Instructions

8040540
Rev. 101 (12/2004)
HELIX TECHNOLOGY CORPORATION
http://www.helixtechnology.com

Advertisement

Table of Contents
loading

Related Manuals for HELIX Compressor 9600

Summary of Contents for HELIX Compressor 9600

  • Page 1: Maintenance Instructions

    CRYOGENICS HELIX TECHNOLOGY CORPORATION 9600 Compressor Installation, Operation, and Maintenance Instructions 8040540 Rev. 101 (12/2004) HELIX TECHNOLOGY CORPORATION http://www.helixtechnology.com...
  • Page 2 The information in this document is believed to be accurate and reliable. However, Helix Technology Corporation, cannot accept any financial or other responsibilities that may result from the use of this information. No warranties are granted or extended by this document.

  • Page 4: Table Of Contents

    9600 Compressor Installation, Operation, and Maintenance Section 1 - 9600 Compressor Description General ............1-1 Benefits .
  • Page 5 9600 Compressor Installation, Operation, and Maintenance Table of Contents (continued) Section 3 - Installation Introduction ............3-1 Supply and Return Water Line Connections .
  • Page 6 9600 Compressor Installation, Operation, and Maintenance Table of Contents (continued) Appendix A - Customer Support Information Appendix B - Flow Diagram Appendix C - Troubleshooting Procedures Appendix D - Schematic Figure 1-1: 9600 Compressor ........1-3 Figure 1-2: 9600 Compressor Dimensions .
  • Page 7 9600 Compressor Installation, Operation, and Maintenance Table of Contents (continued) Figure 5-1: Disconnecting Self Sealing Couplings ..... . 5-2 Figure 5-2: Adsorber Location within the 9600 Compressor (Rear Panel Removed) .

  • Page 8: Section 1 - 9600 Compressor Description

    9600 Compressor Installation, Operation, and Maintenance Section 1 - 9600 Compressor Description General This manual provides the information required to install, operate, and maintain the CTI-CRYOGENICS 9600 Compressor. NOTE: All personnel with installation, operation, and maintenance responsibilities should become familiar with the contents of both the 9600 Compressor Installation, Operation, Maintenance, and appropriate cryopump manuals to ensure safe, high quality, and reliable system performance.

  • Page 9: System Documentation

    9600 Compressor Description System Documentation The manuals for a system cover two basic components: the cryopump and the Compressor. A manual is shipped with each system component to provide information for installation and operation of that component. A loose-leaf binder with index tab separators is also provided so you can compile a complete set of tabulated manuals.

  • Page 10: Figure 1-1: 9600 Compressor

    CRYOGENICS 9600 Compressor Installation, Operation, and Maintenance HELIX TECHNOLOGY CORPORATION Figure 1-1: 9600 Compressor P/N 8040540...

  • Page 11: Specifications

    9600 Compressor Description Specifications Dimensions The dimensions of the Compressor are shown in Figure 1-2. 19.52 IN. (496 MM) 14.4 IN. (366 MM) 23.36 IN. (593 MM) 3.18 IN. (81 MM) Figure 1-2: 9600 Compressor Dimensions CAUTION Do not place a weight greater than 75 lbs. (34Kg) on top of the Compressor.

  • Page 12: Weight

    9600 Compressor Installation, Operation, and Maintenance Weight The weight of the Compressor is listed in Table 1-1. Electrical The electrical specifications of the Compressor are listed in Table 1-2. Operating Voltage Range Nominal Input Power Nominal Power Factor Rated FL/LR* Current Minimum Electrical Service P/N 8040540 Table 1-1: Compressor Weight...

  • Page 13: Cooling Water

    9600 Compressor Description Cooling Water The water used to cool the Compressor must meet the specifications shown in Table 1-3 for proper system operation. Parameter Maximum Inlet Temperature Minimum Inlet Temperature Flow Rate Pressure Drop (inlet-to-outlet) Maximum Inlet Pressure Alkalinity Calcium Carbonate NOTE: Water conditioning may be required for applications not meeting these requirements.

  • Page 14: General

    9600 Compressor Installation, Operation, and Maintenance General The information in Table 1-4 provides general Compressor operating specifications. Table 1-4: General Compressor Operating Specifications Specification Part Numbers Input Power Cable (Customer Supplied) Nominal Helium Pressure Ambient Operating Temperature Range Interface Gas Supply Connector Gas Return Connector Remote Control Receptacle Adsorber Service Schedule...

  • Page 15: Component Description

    9600 Compressor Description Component Description The components of the 9600 Compressor that are accessible from the rear panel are shown in Figure 1-4 and described in the following paragraphs. POWER ON INDICATOR SERVICE I/O CONNECTOR CONTROL CIRCUIT BREAKER GAS CHARGE FLARED FITTING HELIUM PRESSURE...

  • Page 16: System Circuit Breaker

    9600 Compressor Installation, Operation, and Maintenance System Circuit Breaker The System Circuit Breaker protects main input power to the Compressor pump and module. The circuit breaker positions are labeled ON (1), which is in the UP position, and OFF (0), which is in the DOWN position. NOTE: The phase monitor within the Compressor will cause the system circuit breaker to open when input power phases are incorrect.

  • Page 17: Return Gas Coupling

    9600 Compressor Description Return Gas Coupling The Return Gas Coupling returns the helium, which has been cycled through the cryopump, back to the Compressor. Refer to CTI-CRYOGENICS Helium Refrigeration System within this section for more information. Cooling Water IN The Cooling Water IN connector provides water to the Compressor from your facility to cool the Compressor during operation.

  • Page 18: Cryopump Power Phase Switch

    9600 Compressor Installation, Operation, and Maintenance Cryopump Power Phase Switch NOTE: The Cryopump Power Phase Switch is behind the system circuit breaker cover. The Cryopump Power Phase Switch matches the output power phase of the 9600 compressor to that of the cryopump. The switch is set to the two or three phase position based upon cryopump power requirements.

  • Page 19: Figure 1-5: 9600 Compressor Connected To Multiple On-Board Cryopumps

    9600 Compressor Description HELIUM SUPPLY HELIUM RETURN REMOTE POWER WATER Figure 1-5: 9600 Compressor Connected to Multiple On-Board Cryopumps NOTE: Your installation (number of pumps per compressor) will vary based upon the On-Board Cryopumps or Waterpumps used. Refer to Appendix A to consult your local CTI-CRYOGENICS Customer Support Center for information on specific compressor/pump applications.

  • Page 20: Multiple Cryo-Torr Cryopump Connections

    9600 Compressor Installation, Operation, and Maintenance Multiple Cryo-Torr Cryopump Connections The Cryo-Torr Interface permits the connection of multiple Cryo-Torr Cryopumps to one Compressor as shown in Figure 1-6. Refer to Section 3 - Installation for more information on connecting single or multiple Cryo-Torr Cryopumps to the Compressor. HELIUM SUPPLY HELIUM RETURN REMOTE...
  • Page 21 CRYOGENICS 9600 Compressor Description HELIX TECHNOLOGY CORPORATION 1-14 P/N 8040540...

  • Page 22: Section 2 - Unpacking And Inspection

    9600 Compressor Installation, Operation, and Maintenance Section 2 - Unpacking and Inspection Introduction The 9600 Compressor is shipped in a shipping carton incorporating a ramp system which makes removing the Compressor from the carton safe and easy. Shipping Carton Inspection Inspect the exterior of the shipping carton for visible signs of damage before opening the shipping carton.

  • Page 23: Compressor Inspection

    Unpacking and Inspection Figure 2-1: Using the Shipping Carton Ramp Compressor Inspection Inspect the Compressor for visible signs of damage as indicated in the following paragraphs. Compressor Inspect the exterior of the Compressor for visible signs of damage, evidence of an oil leak, and check the Helium Pressure Gauge for proper helium pressure.

  • Page 24: Section 3 - Installation

    9600 Compressor Installation, Operation, and Maintenance Section 3 - Installation Introduction Section 3 provides you with the information required to install the 9600 Compressor and connect it to single or multiple On-Board or Cryo-Torr Cryopump configurations. Figure 3-1 highlights the major tasks for Compressor installation and refers to the appropriate installation procedures within this section.

  • Page 25: Figure 3-1: 9600 Compressor Installation Flowchart

    Installation Single Cryopump Connections (refer to page 3-9) Figure 3-1: 9600 Compressor Installation Flowchart START Supply and Return Water Line Connections (refer to page 3-3) Electrical Connections (refer to page 3-4) Phase Check (refer to page 3-6) 2Ø or 3Ø Cryopump Power? (refer to page 3-7) Connect/Disconnect Helium Flexlines...

  • Page 26: Supply And Return Water Line Connections

    9600 Compressor Installation, Operation, and Maintenance Supply and Return Water Line Connections NOTE: The water used for cooling the Compressor must meet the specifications outlined in Section 1 - Compressor Description. Hard Water Lines 1. Apply a light coating of standard plumbing thread sealant to the 2.

  • Page 27: Electrical Connections

    Installation Electrical Connections The following procedures provide information for making all three phase (180 - 250 VAC) electrical connections to the Compressor. Power Cable Preparation Follow all local high voltage safety precautions when performing this procedure to reduce the possibility of electrical shock. Make sure all electrical power is OFF before proceeding with this procedure.

  • Page 28: Figure 3-2: 9600 Compressor Circuit Breaker Terminals (Cover Removed)

    9600 Compressor Installation, Operation, and Maintenance Figure 3-2: 9600 Compressor Circuit Breaker Terminals (Cover Removed) NOTE: The phase order in which the conductor terminal lugs are connected to circuit breaker terminals X, Y, and Z will be determined during the Phase Check Procedure. NOTE: For installation where one of the three phase legs is at or near ground potential, connect that leg to terminal Y on the Compressor as shown in Figure 3-2.

  • Page 29: Phase Check

    Installation Phase Check 1. Make sure power is applied to compressor circuit as described NOTE: The circuit breaker will trip immediately during step 2 if the power phase connections are not correct. 2. Turn the Compressor circuit breaker to the ON position. If the 3.

  • Page 30: Cryopump Power Phase Switch Setting

    9600 Compressor Installation, Operation, and Maintenance Cryopump Power Phase Switch Setting NOTE: On-Board Cryopumps can operate on two or three-phase power. Cryo-Torr Cryopumps only operate on two-phase power. 1. Inspect the On-Board Cryopump(s) being installed for the 2. If a three-phase label is present, set the cryopump power phase 3.

  • Page 31: Disconnecting

    Installation Disconnecting 1. Using two wrenches as shown in Figure 3-3, disconnect the two This 1 1/8 in. wrench holds the coupling in a stationary position. Figure 3-3: Connecting/Disconnecting Helium Flex Line Self Sealing Couplings self sealing coupling connectors quickly to minimize helium leakage.

  • Page 32: Single On-Board Cryopump Connections

    9600 Compressor Installation, Operation, and Maintenance Single On-Board Cryopump Connections 1. Connect the Supply and Return lines to the 9600 Compressor as 2. Connect one end of the Cryopump cold head cable to the 3. Connect the opposite end of the cold head cable to the cryopump WATER Figure 3-4: Single On-Board Cryopump Connections P/N 8040540...

  • Page 33: Single Cryo-Torr Cryopump Connections

    Installation Single Cryo-Torr Cryopump Connections 1. Connect the Supply and Return lines to the 9600 Compressor as 2. Connect one end of the Cryopump cold head cable to the WATER Figure 3-5: Single Cryo-Torr Cryopump Installation 3-10 CAUTION Make sure the Compressor power is OFF before making any connections to the rear panel.

  • Page 34: Multiple On-Board Cryopump Connections

    9600 Compressor Installation, Operation, and Maintenance Multiple On-Board Cryopump Connections Helium Line Connections 1. Connect the Supply and Return lines to the 9600 Compressor as 2. Connect the Gas Return Line to the customer supplied helium 3. Connect the Gas Supply Line to the customer supplied helium P/N 8040540 CAUTION Make sure the Compressor power is OFF before making any...

  • Page 35: Power Cable Connections

    Installation Power Cable Connections 1. Connect the On-Board Splitter Box power cable between the 2. Connect the On-Board Cryopump or Waterpump power cables to NOTE: Your installation (number of pumps per compressor) will vary based upon the On-Board Cryopump models used. Refer to Appendix A to consult your local CTI-CRYOGENICS Customer Support Center for information on specific compressor/pump applications.

  • Page 36: Multiple Cryo-Torr Cryopump Connections

    9600 Compressor Installation, Operation, and Maintenance HELIUM SUPPLY HELIUM RETURN ON-BOARD SPLITTER REMOTE POWER WATER Figure 3-7: Alternative Multiple On-Board Cryopump or Waterpump Installation Multiple Cryo-Torr Cryopump Connections Helium Line Connections P/N 8040540 ON-BOARD POWER CABLES (Splitter Box located at Compressor) CAUTION Make sure the Compressor power is OFF before making any connections to the rear panel.

  • Page 37: Power Cable Connections

    Installation 1. Connect the Supply and Return lines to the 9600 Compressor as 2. Connect the Gas Return Line to the customer supplied helium 3. Connect the Gas Supply Line to the customer supplied helium Power Cable Connections 1. Connect the Cryo-Torr power cable between the CRYOPUMP 2.

  • Page 38: Figure 3-8: Recommended Multiple Cryo-Torr Cryopump Installation

    9600 Compressor Installation, Operation, and Maintenance NOTE: The Cryo-Torr Interface can be installed at the process tool containing the cryopumps as shown in Figure 3-8 or near the Compressor as shown in Figure 3-9. CTI-CRYOGENICS recommends that the Cryo- Torr Interface be installed at the process tool to reduce cable requirements. HELIUM SUPPLY HELIUM RETURN REMOTE...

  • Page 39: Figure 3-9: Alternative Multiple Cryo-Torr Cryopump Installation

    CRYOGENICS Installation HELIX TECHNOLOGY CORPORATION HELIUM SUPPLY HELIUM RETURN REMOTE CRYO-TORR INTERFACE CRYOPUMP POWER CABLES POWER WATER USER REMOTE (FROM VACUUM SYSTEM) Figure 3-9: Alternative Multiple Cryo-Torr Cryopump Installation 3-16 P/N 8040540...

  • Page 40: Section 4 - Operation

    9600 Compressor Installation, Operation, and Maintenance Adjusting System Helium Pressure Your CTI-CRYOGENICS high vacuum pump system is comprised of several pressurized components i.e. compressor, flex lines, and cryopumps. Each component is charged with helium before shipment. After all cryopumps, helium lines, and manifolds are attached to the compressor, the system static helium charge pressure must be verified before system operation.

  • Page 41: Compressor Operation

    Operation NOTE: The use of a higher helium charge pressure for 50 HZ operation is necessary in order to compensate for the slower speed at which the compressor operates at 50 HZ. The static charge level for 60 Hz remains at 240-250 PSIG.

  • Page 42: Replacement Of Helium Circuit Components

    9600 Compressor Installation, Operation, and Maintenance If you have concerns about system performance changing, then check the normal system operating pressure which was determined in Compressor Operation within this section. If the normal system operating pressure is not correct, check the system for leaks. Once the leaks have been repaired, helium must be added to return the system to normal operating system pressure as described in Section 5- Maintenance.
  • Page 43 CRYOGENICS Operation HELIX TECHNOLOGY CORPORATION P/N 8040540...

  • Page 44: Section 5 - Maintenance

    9600 Compressor Installation, Operation, and Maintenance Section 5 - Maintenance Scheduled Maintenance Suggested Maintenance Equipment It is recommended to have the following equipment and disposable supplies available as listed in Table 5-1. Table 5-1: Suggested Maintenance Equipment Helium, 99.999% pure Pressure regulator (0-3000/0-400 psi) Assy.

  • Page 45: Adsorber Replacement

    Maintenance Adsorber Replacement Use the following procedure to change the adsorber every three years. 1. Set the System Circuit Breaker, on the rear of the 9600 2. Remove the 4 screws which secure the rear panel to the Compres- NOTE: Use two wrenches in Step 3 to prevent loosening the body of the coupling.
  • Page 46 9600 Compressor Installation, Operation, and Maintenance 9. Ensure that the pressure gauge reads the proper value as shown in 10. Record the adsorber replacement date on the label as shown in Fig- Figure 5-2: Adsorber Location within the 9600 Compressor (Rear Panel Removed) P/N 8040540 Table 4-1.

  • Page 47: Adjusting System Helium Pressure

    Maintenance Adjusting System Helium Pressure NOTE: These procedures can be performed on a compressor that is turned ON or OFF. However, the helium pressure gauge should be set to the static helium charge pressure value if the compressor is turned OFF or set to the normal system operating pressure if the compressor is turned ON.

  • Page 48: Increasing Helium Pressure

    9600 Compressor Installation, Operation, and Maintenance 3. Close the gas charge control valve and install the flare cap. Increasing Helium Pressure Use the following procedure to increase the helium pressure if the indicated pressure is below the appropriate value as shown in Table 4-1. Adding Helium NOTE: You must obtain the normal system operating pressure from the Compressor Operation procedure in Section 4 - Operation in order to...
  • Page 49 Maintenance 2. Purge the regulator and charging lines as follows: 3. Remove the flare cap of the gas charge flared fitting on the rear of 4. Loosely connect the charging line from the helium pressure regula- 5. Set the helium pressure regulator to 300 psig (20.7 bars). If the 6.
  • Page 50 Document Title Appendix A - Customer Support Information Customer Support Center Locations To locate a Customer Support Center near you, please visit our website www.helixtechnology.com on the world wide web and select CONTACT on the home page. Guaranteed Up-Time Support (GUTS For 24-hour, 7-day per week Guaranteed Up-Time Support (GUTS) dial: 1 800-367-4887 - Inside the United States of America +1 508-337-5599 - Outside the United States of America...
  • Page 52 CRYOGENICS 9600 Compressor Installation, Operation, and Maintenance HELIX TECHNOLOGY CORPORATION Appendix B - Flow Diagram Figure B-1:9600 Compressor Flow Diagram P/N 8040540...
  • Page 53 Appendix B - Flow Diagram P/N 8040540...
  • Page 54 9600 Compressor Installation, Operation, and Maintenance Appendix C - Troubleshooting Procedures Troubleshooting the Compressor The compressor troubleshooting procedures are summarized in Table C-1. Technical Inquiries Please refer to Appendix A of this manual for a complete list of the CTI-CRYOGENICS’ world wide customer support centers. Disconnect the compressor before performing any troubleshooting pro- cedures.

  • Page 55: Table C-1: Compressor Troubleshooting Procedures

    Appendix C - Troubleshooting Procedures Table C-1: Compressor Troubleshooting Procedures Problem 1) System circuit breaker (CB1) trips immediately to the OFF (0) position when switched to the ON (1) position. 2) System (CB1) and Con- trol Circuit (CB2) circuit breakers remain in the ON (1) position when switched ON but the compressor will not run.
  • Page 56 9600 Compressor Installation, Operation, and Maintenance Table C-1: Compressor Troubleshooting Procedures (Continued) Problem 3) System circuit breaker (CB1) will not remain in the ON (1) position when switched ON. The Control Circuit circuit breaker (CB2) trips when excessive current is being drawn by the cold head or 24 volt compressor control cir- cuits.
  • Page 57 CRYOGENICS Appendix C - Troubleshooting Procedures HELIX TECHNOLOGY CORPORATION P/N 8040540...
  • Page 58 CRYOGENICS 9600 Compressor Installation, Operation, and Maintenance HELIX TECHNOLOGY CORPORATION Appendix D - Schematic P/N 8040540...

Table of Contents