Figure 3-1: 9600 Compressor Installation Flowchart - HELIX Compressor 9600 Installation & Operating Instructions Manual

Installation
Single Cryopump Connections
3-2
Supply and Return Water Line Connections
Electrical Connections
Connect/Disconnect Helium Flexlines
(refer to page 3-9)

Figure 3-1: 9600 Compressor Installation Flowchart

START
(refer to page 3-3)
(refer to page 3-4)
Phase Check
(refer to page 3-6)
2Ø or 3Ø Cryopump
Power?
(refer to page 3-7)
(refer to page 3-7)
Single or Multiple
Cryopump
Installation?
Multiple Cryopump Connections
Refer to
Section 4 - Operation
END
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C TI CRYOGENICS
HELIX TECHNOLOGY CORPORATION
(refer to page 3-11)
P/N 8040540