Section 3 - Installation; Introduction - HELIX 9600 Installation, Operation And Maintenance Instructions
High voltage compressor
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Also See for 9600:
- Installation & operating instructions manual (59 pages) ,
- Schematics (22 pages)
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Section 3 - Installation
Introduction
Section 3 provides you with the information required to install the 9600
Compressor and connect it to single or multiple On-Board or Cryo-Torr
Cryopump configurations.
Figure 3-1
highlights the major tasks for Compressor installation and refers
to the appropriate installation procedures in this section.
©2007 Helix Technology Corporation
Part Number 8040437, Revision 104, 06/12/2007, ECO Number 18068
3-1
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