OptoSigma SGSP Series Installation Manual page 19

(2) Rotating Gonio Stage
・ Repeatable Positioning Accuracy
Perform positioning at twelve points with intervals
from the reference point sequentially. Note that
positioning for a position is repeated five times in
reciprocating motions.
Calculate the difference between the measured
value (acual position traveled from the reference
point) and the target (commanded traveled position
from the reference point) for each point.
Calculate the average and the standard deviation in a (single) direction from the results above,
and determine the Repeatable Positioning Accuracy as the maximum average +/- standard deviation from
those calculated for all positioning points.
・ Lost Motion
Perform positioning at twelve points with intervals
from the reference point sequentially. Note that
positioning for a potision is repeated five times in
reciprocating motions.
Calclate the average of measured values (actual
traveled position from the reference point) in the
positive and negative direction for each point, and
determined the difference between both directions as the lost motion of the point. The lost motion for the
stage is the maximum value from among the local lost motion values.
・ Vertical Accuracy
Measure displacement of the stage table surface
In the vertical direction when the stage is rotated
360-degree. The measured maximum displacement
is the wobbling assuracy.
Negative direction
Test indicator
-19-
- 19 -
Accuracy Verification
Perform point
Perform point
Positive direction
Lost motion
Maximum
displacement