OptoSigma SGSP Series Installation Manual page 16

�．Accuracy Verification
Principally the accuracy of our motorized stages shall randomly
inspected based on JIS B 6191 and 6192 ( both concerning
general rules of test method for machine tool) and international
standards (ISO230-1, 230-2, etc.) with instruments calibrated
by a standard gauge traceable to the national standards.
4-1．Instruments
Dynamic Calibrator (HP5529A) (Agilent Technologies)

Dual-Axis Photoelectric Autocollimator (Nikon Corporation)

DE12BR/LY51 displacement gauge (Sony Precision Technology lnc.)

4-2．Items to Check
① Length
② Angles
③ straightness
④ Squareness
⑤ Flatness
4-3．Accuracy Check for Assembled Stage
In our factory, a separate motorized stage is checked for the accuracy, but it was not
tested in assembled conditions, for example the stage into which the X, Y and theta-z
axes are assembled.
* We can offer optional accuracy measurement for certain conditions. Contact us for the
details (charged option).
4-4．Typical Measurement
Stated below are typical accuracy measurement of the motorized stages:
(1) Direct Acting Stage
・Positioning Accuracy
Perform positioning sequentially in a (single) direction from the reference point (home)
throughout the movable range with constant intervals. Calculate the difference between the
measured value (actual traveling distance from the reference point) and the target (commanded
traveling distance from the reference point) for each point. Positioning accuracy is determined
as the maximum difference between the maximum and minimum differences.
Accuracy Verification
(Magnescale co.,Ltd.)
(Accuracy measurement results will be attached in the delivery as
a charged option if you let us know the measuring items or
measuring specifications when ordering a motorized stage).
See our catalog for the details.
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Laser interferometer
Basing point
Positioning Accuracy