OptoSigma SGSP Series Installation Manual page 17

・Repeatable Positioning Accuracy
Perform positioning to a point in the same direction seven time in each area of the stage
(both
ends and center of the stage). Find the maximum deviation in each target (positioning) point.
Determine the repeatable positioning accuracy as the maximum deviation from among the three
testing areas.
・Lost Motion
Perform positioning to a point in the positive and negative directions in each area of the stage
(both ends and center of the stage). Find the distance between the points positioned in the both
directions.
Repeat the measurement seven times and calculate the averages. Of averages, lost motion should be
determined as the maximum from among the three testing areas on the stage.
Laser interferometer
Optional point
Maximum deviation
Laser interferometer
Optional point
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Accuracy Verification
Lost motion