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MS200E
H-824 Hexapod Microrobot
User Manual
Version: 2.5.0
Physik Instrumente (PI) GmbH & Co. KG, Auf der Römerstraße 1, 76228 Karlsruhe, Germany
Phone +49 721 4846-0, fax +49 721 4846-1019, e-mail info@pi.ws, www.pi.ws
Date: 08/19/2024
This document describes the following products:
H-824.G2
Compacter Hexapod microrobot, gearhead, 10
kg load capacity, 1 mm/s velocity, D-sub
connector
H-824.G2V
Compacter Hexapod microrobot, gearhead,
vacuum compatible to 10
capacity, 0.5 mm/s velocity, D-sub connector
H-824.D2
Compacter Hexapod microrobot, direct drive, 5
kg load capacity, 25 mm/s velocity, D-sub
connector
H-824.D2V
Compacter Hexapod microrobot, direct drive,
vacuum compatible to 10
capacity, 12.5 mm/s velocity, D-sub connector
hPa, 5 kg load
-6
hPa, 2.5 kg load
-6
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Related Manuals for PI H-824
Summary of Contents for PI H-824
- Page 1 Compacter Hexapod microrobot, direct drive, vacuum compatible to 10 hPa, 2.5 kg load capacity, 12.5 mm/s velocity, D-sub connector Physik Instrumente (PI) GmbH & Co. KG, Auf der Römerstraße 1, 76228 Karlsruhe, Germany Phone +49 721 4846-0, fax +49 721 4846-1019, e-mail info@pi.ws, www.pi.ws...
- Page 2 BiSS is a registered trademark of iC-Haus GmbH. © 2024 Physik Instrumente (PI) GmbH & Co. KG, Karlsruhe, Germany. The text, photographs, and drawings in this manual are protected by copyright. With regard thereto, Physik Instrumente (PI) GmbH & Co. KG retains all the rights.
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Page 3: Table Of Contents
Contents About this Document Objective and Target Group of this User Manual ............1 Symbols and Typographic Conventions..............1 Figures ........................2 Other Applicable Documents ..................2 Downloading Manuals ....................2 Safety Intended Use ......................5 General Safety Instructions ..................5 Organizational Measures .................... - Page 4 Startup General Notes on Startup ..................31 Starting Up the Hexapod System ................32 Baking Out Vacuum-Compatible Models ..............32 Maintenance Performing a Maintenance Run ................35 Cleaning the Hexapod ....................35 Packing the Hexapod for Transport ................36 7.3.1 Uninstalling the Hexapod ................
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Page 5: About This Document
About this Document Objective and Target Group of this User Manual This user manual contains the information necessary for using the H-824 as intended. We assume that the user has basic knowledge of closed-loop systems, motion control concepts, and applicable safety measures. -
Page 6: Figures
Photographic illustrations may also differ and must not be seen as guaranteed properties. Other Applicable Documents The devices and software tools from PI mentioned in this documentation are described in separate manuals. Device / program... - Page 7 5. For the desired manual, select ADD TO LIST and then REQUEST. 6. Fill out the request form and select SEND REQUEST. The download link will be sent to the email address entered in the form. H-824 Hexapod Microrobot MS200E Version: 2.5.0...
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Page 9: Safety
Add all information from the manufacturer such as supplements or technical notes to the user manual. If you give the H-824 to other users, include this user manual as well as all other relevant information provided by the manufacturer. -
Page 10: Measures For Handling Vacuum-Compatible Products
2 Safety Personnel qualification The H-824 may only be installed, started, operated, maintained, and cleaned by authorized and appropriately qualified personnel. Measures for Handling Vacuum-Compatible Products When handling the vacuum model of the hexapod, attention must be paid to appropriate cleanliness. -
Page 11: Product Description
Compact hexapod microrobot, direct drive, 12.5 mm/s, 2.5 kg load, vacuum compatible to 10 hPa, D-sub connector, cable set 2 m vacuum side, feedthrough. Air side connecting cables are not included in the scope of delivery and must be ordered separately. H-824 Hexapod Microrobot MS200E Version: 2.5.0... -
Page 12: Product View
3 Product Description Product View Figure 1: Product view Clear Aperture Motion platform Strut Coordinate cube Base plate Figure 2: Connections Panel plug for power supply cable Panel plug for data transmission cable Version: 2.5.0 MS200E H-824 Hexapod Microrobot... -
Page 13: Technical Features
3.3.3 Controller The hexapod is intended for operation with a suitable controller from PI (p. 16). With the controller, it is possible to command motion of individual axes, combinations of axes or all six axes at the same time in a single motion command. -
Page 14: Motion
The following is a description of how the hexapod behaves with the default coordinate system. Work with user-defined coordinate systems is described in the C887T0007 User Manual. Version: 2.5.0 MS200E H-824 Hexapod Microrobot... - Page 15 A specified rotation in space is calculated from the individual rotations in the order U -> V- > W. For further information on the center of rotation, refer to the glossary (p. 65). H-824 Hexapod Microrobot MS200E Version: 2.5.0...
- Page 16 1. The U axis is commanded to move to position 10. The rotation around the U axis tilts the rotational axes V and W. Platform in reference position Platform position: U = 10 (U parallel to spatially fixed Xaxis) Version: 2.5.0 MS200E H-824 Hexapod Microrobot...
- Page 17 Platform position: U = 10, V = –10, W = 10 (U and V parallel to the platform level, W vertical to the platform level) For further data on the travel ranges, refer to the "Specifications" (p. 49) section. H-824 Hexapod Microrobot MS200E Version: 2.5.0...
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Page 18: Id Chip
H-824 Hexapod according to your order (p. 7) For the H-824.D2V and H-824.G2V vacuum-compatible models, a 2 m cable set for the vacuum side is included in the scope of delivery. Air side connecting cables are not included in the scope of delivery and must be ordered separately. -
Page 19: Optional Accessories
1 flat-head screw with cross recess, M4x8 ISO 7045 2 flat washers, form A-4.3 DIN 7090 2 safety washers, Schnorr Ø 4 mm N0110 Note that the cables required for connecting the H-824 to the electronics must be ordered separately. Optional Accessories... -
Page 20: Suitable Controllers
EtherCAT interface, motion stop C-887.533 6-axis controller for hexapods, TCP/IP, RS-232, benchtop device, incl. control of two additional axes, EtherCAT interface, motion stop, analog inputs To order, contact our customer service department (p. 47). Version: 2.5.0 MS200E H-824 Hexapod Microrobot... -
Page 21: Unpacking
When handling the vacuum model of the hexapod, attention must be paid to appropriate cleanliness. At PI, all parts are cleaned before assembly. Powder-free gloves are worn during assembly and measuring. In addition, the hexapod is wipe cleaned afterwards and then shrink- wrapped twice in vacuum-compatible film. -
Page 22: Removing The Transport Safeguard
3. Use the AF 13 open-end wrench to loosen the 4 nuts (M8) used for securing the transports safeguard's cover to the struts. 4. Remove the nuts and the corresponding flat washers. 5. Remove the transport safeguard's cover. Version: 2.5.0 MS200E H-824 Hexapod Microrobot... - Page 23 8. Grip the hexapod's baseplate and carefully pull both of the transport safeguard's rails out from under the base plate. Store the transport safeguard Keep the transport safeguard as well as all screws, flat washers, and nuts in case the product needs to be transported later. H-824 Hexapod Microrobot MS200E Version: 2.5.0...
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Page 25: Installing
Determining Valid Poses To avoid damaging the hexapod, only valid poses may be commanded. The PIVirtualMove simulation program is intended for determining the valid poses according to the following definition: H-824 Hexapod Microrobot MS200E Version: 2.5.0... -
Page 26: Grounding The Hexapod
1. Connect the base plate to the grounding system: − For connection, use the supplied accessories (p. 14) and the M4 hole with an 8 mm depth marked with the ground connection symbol (p. 58). Version: 2.5.0 MS200E H-824 Hexapod Microrobot... -
Page 27: Mounting The Hexapod On A Surface
Mount the hexapod onto a flat surface. The recommended flatness of the surface is 200 µm. Figure 5: Mounting holes in the base plate Requirements You have read and understood the General Notes on Installation (p. 21). H-824 Hexapod Microrobot MS200E Version: 2.5.0... -
Page 28: Fixing The Load To The Hexapod
(p. 58) together with the load to be mounted. Only use screws that do not project under the motion platform after being screwed in. Only mount the hexapod and the load on the mounting fixtures (holes) intended for this purpose. Version: 2.5.0 MS200E H-824 Hexapod Microrobot... - Page 29 1. Choose the mounting position so that the selected mounting holes in the motion platform (see upper figure and the dimensional drawing (p. 58)) can be used for fixing the load. 2. Fix the load using the screws. H-824 Hexapod Microrobot MS200E Version: 2.5.0...
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Page 30: Optional: Removing The Coordinate Cube
Tools and accessories Data transmission cable and power supply cable, available as accessories (p. 15) If you want to operate a vacuum-compatible hexapod in a vacuum chamber: Suitable tools for installing the vacuum feedthrough Version: 2.5.0 MS200E H-824 Hexapod Microrobot... - Page 31 5 Installing If necessary: Installing vacuum feedthroughs Figure 8: Vacuum feedthrough for data transmission (4668), dimensions in mm 4 holes, Ø6 x 45° for M3 countersunk screw H-824 Hexapod Microrobot MS200E Version: 2.5.0...
- Page 32 Pay attention to the assignment specified on the labeling of the sockets, plug − connectors, and cables. − Pay attention to the mechanical coding of connectors and sockets. − Do not use force. Use the integrated screws to secure the connections against accidental − disconnection. Version: 2.5.0 MS200E H-824 Hexapod Microrobot...
- Page 33 Panel plug / connector, male Socket / connector, female Controller Refer to "Suitable Controllers (p. 16)" Hexapod H-824.D2 or H-824.G2 Power adapter, from the scope of delivery of the controller, 24 V DC output Data transmission cable Power supply cable H-824 Hexapod Microrobot MS200E Version: 2.5.0...
- Page 34 Panel plug / connector, male Socket / connector, female Controller Refer to "Suitable Controllers" (p. 16) Hexapod H-824.D2V or H-824.G2V Power adapter, from the scope of delivery of the controller, 24 V DC output Vacuum chamber Data transmission cable* Power supply cable*...
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Page 35: Startup
Do not place any objects in areas where they can be caught by moving parts. Only command valid poses. See "Determining Valid Poses" (p. 21) for the definition of a valid pose. Stop the motion immediately if a controller malfunction occurs. H-824 Hexapod Microrobot MS200E Version: 2.5.0... -
Page 36: Starting Up The Hexapod System
The longer the bakeout and cooling process takes, the more the maintenance runs are necessary. Perform a maintenance run during the bakeout and cooling process at least once a day. Version: 2.5.0 MS200E H-824 Hexapod Microrobot... - Page 37 Bake out the hexapod at maximum 80 °C (176 °F). Perform a maintenance run (p. 35) over the entire travel range during the bakeout and cooling process at least once a day. H-824 Hexapod Microrobot MS200E Version: 2.5.0...
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Page 39: Maintenance
7 Maintenance Maintenance PI offers a range of wraparound services for all their products, many of which are designed to increase the system’s lifetime and uptime: Remote system setup: An expert ensures that your system is optimized and runs ... -
Page 40: Packing The Hexapod For Transport
Model with direct drive, struts not blocked: Try to move the hexapod carefully by hand so that the transport safeguard can be attached. Model with DC gear motor or struts blocked: Do not attach the transport safeguard. Version: 2.5.0 MS200E H-824 Hexapod Microrobot... -
Page 41: Uninstalling The Hexapod
Screw the struts with the shorter thread into the rails as shown in the figure. b) Tighten the struts hand-tight. c) On each strut, screw an M8 nut down to the thread end. H-824 Hexapod Microrobot MS200E Version: 2.5.0... - Page 42 3. Attach the transport safeguard's cover, see the figures also: a) Put the cover onto the motion platform so that the ends of the 4 struts protrude through the corresponding holes in the cover. Version: 2.5.0 MS200E H-824 Hexapod Microrobot...
- Page 43 6.4 flat washer onto. Figure 14: Fixing the cover with M6x16 screws c) Push an 8.4 flat washer onto each strut. d) Place an M8 nut on each strut and hand-tighten them. H-824 Hexapod Microrobot MS200E Version: 2.5.0...
- Page 44 Lock each nut above with the nut below the cover for each strut. Figure 15: Fixing the cover with M8 nuts Attaching the transport safeguard is now complete. Figure 16: Transport safeguard is attached Version: 2.5.0 MS200E H-824 Hexapod Microrobot...
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Page 45: Packing The Hexapod
7 Maintenance 7.3.3 Packing the Hexapod Proceed as described in H824T0001 (in the scope of delivery (p. 14)). H-824 Hexapod Microrobot MS200E Version: 2.5.0... -
Page 47: Troubleshooting
Carry out a tuning of the parameters. Unsuitable control parameters for the Contact our customer service department (p. 47). application The system behavior has changed due to an increasing ease of operation. H-824 Hexapod Microrobot MS200E Version: 2.5.0... - Page 48 Nothing connected to E- with external devices (pushbuttons, switches). Stop Check the state of the E-Stop function: "Break contact" is active dia? Version: 2.5.0 MS200E H-824 Hexapod Microrobot...
- Page 49 2. Activate the 24 V Out 7 A output with "Make contact" (for details, refer to the user manual for the controller). If you use the C-887.MSB motion-stop-box from PI: Press the mushroom button first to unlock it, then press the green pushbutton.
- Page 50 not move" section applies to your problem. possible If the problem with your hexapod is not listed in the table or cannot be solved as described, contact our customer service department (p. 47). Version: 2.5.0 MS200E H-824 Hexapod Microrobot...
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Page 51: Customer Service Department
9 Customer Service Department Customer Service Department For inquiries and orders, contact your PI representative or send us an email (mailto:service@pi.de). If you have questions concerning your system, provide the following information: − Product and serial numbers of all products in the system Firmware version of the controller (if applicable) −... -
Page 53: Technical Data
55 mrad/s Typical angular velocity in θZ 5.5 mrad/s 55 mrad/s Positioning H-824.G2 H-824.D2 Tolerance Minimum incremental motion in X 0.3 µm 2 µm typ. Minimum incremental motion in Y 0.3 µm 2 µm typ. H-824 Hexapod Microrobot MS200E Version: 2.5.0... - Page 54 10 kg 5 kg horizontal Maximum holding force, base plate in any 50 N orientation Maximum holding force, base plate 100 N 15 N horizontal Overall mass 8 kg 8 kg Material Aluminum Aluminum Version: 2.5.0 MS200E H-824 Hexapod Microrobot...
- Page 55 0.3 µm 2 µm typ. Minimum incremental motion in Y 0.3 µm 2 µm typ. Minimum incremental motion in Z 0.3 µm 1 µm typ. Minimum incremental motion in θX 3.5 µrad 12 µrad typ. H-824 Hexapod Microrobot MS200E Version: 2.5.0...
- Page 56 5 kg 2.5 kg horizontal Maximum holding force, base plate in any 25 N orientation Maximum holding force, base plate 50 N 15 N horizontal Overall mass 8 kg 8 kg Material Aluminum Aluminum Version: 2.5.0 MS200E H-824 Hexapod Microrobot...
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Page 57: Specifications For Vacuum-Compatible Models
0,0,0. At PI, technical data is specified at 22 ±3 °C. Unless otherwise stated, the values are for unloaded conditions. Some properties are interdependent. The designation "typ." indicates a statistical average for a property; it does not indicate a guaranteed value for every product supplied. During the final inspection of a product, only selected properties are analyzed, not all. -
Page 58: Specifications For Data Transmission And Power Supply Cables
Data Transmission and Power Supply Cables Data transmission Power supply cable, single-side Power supply cable, straight cable angled connector connectors All hexapod types H-820, H-824, H-825, H-840, H-850 H-810, H-811, H-206 C-815.82D02 C-815.82P02A C-815.82P02E C-815.82D03 C-815.82P03A C-815.82P03E C-815.82D05 C-815.82P05A... - Page 59 Minimum bending radius with the fixed 24.5 installation Outer diameter Connector M12 m/f Power supply cable, angled connector Unit Cable length L 2 / 5 / 7.5 / 10 / 20 m Minimum bending radius in a drag chain H-824 Hexapod Microrobot MS200E Version: 2.5.0...
- Page 60 Data transmission cable Unit Minimum bending radius with the fixed installation Outer diameter Connectors HD D-sub78 m/f Power supply cable, angled connector Unit Minimum bending radius with the fixed installation Outer diameter Connectors LEMO 2-pin m/f Version: 2.5.0 MS200E H-824 Hexapod Microrobot...
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Page 61: Maximum Ratings
Highest relative humidity of 80% at temperatures of up to 31°C, decreasing linearly to a relative humidity of 50% at 40°C Degree of protection according IP20 to IEC 60529 Area of application For indoor use only Maximum altitude 2000 m H-824 Hexapod Microrobot MS200E Version: 2.5.0... -
Page 62: Dimensions
Dimensions in mm. Note that the decimal points are separated by a comma in the drawings. Figure 17: H-824 hexapod, at zero position of nominal travel range If the controller's factory settings are used for the coordinate system and the center of rotation, the hexapod in the figure corresponds to the position X=Y=Z=U=V=W=0. -
Page 63: Pin Assignment
Not for vacuum models: Power supply via 4-pin M12 panel plug Function 24 V DC 24 V DC Only for vacuum models: Power supply via 2-pin LEMO panel plug, male, type ECJ.1B.302.CLD Function 24 V DC H-824 Hexapod Microrobot MS200E Version: 2.5.0... -
Page 64: Data Transmission Connector
CH3 Ref OUT CH3 LimP OUT CH3 LimN OUT CH3 A+ OUT CH3 B+ OUT CH3 A- OUT CH3 B- OUT CH4 Sign IN CH4 MAGN IN CH4 Ref OUT CH4 LimP OUT CH4 LimN OUT Version: 2.5.0 MS200E H-824 Hexapod Microrobot... - Page 65 CH6 MAGN IN CH6 Ref OUT CH6 LimP OUT CH6 LimN OUT CH6 A+ OUT CH6 B+ OUT CH6 A- OUT CH6 B- OUT ID Chip Brake/Enable drive 24 V input Power Good 24 V output H-824 Hexapod Microrobot MS200E Version: 2.5.0...
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Page 67: Old Equipment Disposal
PI equipment made available on the market after 13 August 2005 without charge. If you have an old device from PI, you can send it to the following address free of charge: Physik Instrumente (PI) GmbH & Co. KG... -
Page 69: Glossary
The center of rotation that can be moved using the SPI command is also referred to as "pivot point". Hexapod system The combination of hexapod, controller, cables, and power adapter(s) is referred to as "hexapod system" in this manual. H-824 Hexapod Microrobot MS200E Version: 2.5.0... - Page 70 The Z axis is perpendicular to the base plate of the hexapod. The following example figures of the H-810 hexapod show that the coordinate system does not move along with motion of the platform. Version: 2.5.0 MS200E H-824 Hexapod Microrobot...
- Page 71 12 Glossary Figure 18: H-810 hexapod in the reference position. Cable exit H-824 Hexapod Microrobot MS200E Version: 2.5.0...
- Page 72 12 Glossary Figure 19: H-810 hexapod, the platform of which has been moved in X. Cable exit Version: 2.5.0 MS200E H-824 Hexapod Microrobot...
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Page 73: Appendix
The following test cycles are performed: Motion over the entire travel range with at least 20 measuring points, in at least five cycles. Motion over partial sections, e.g., ±1 mm in increments of for example, 100 µm H-824 Hexapod Microrobot MS200E Version: 2.5.0... -
Page 74: European Declarations Of Conformity
13 Appendix 13.2 European Declarations of Conformity For the H-824, declarations of conformity were issued according to the following European statutory requirements: EMC Directive RoHS Directive The standards applied for certifying conformity are listed below. EMC: EN 61326-1 Safety: EN 61010-1 RoHS: EN IEC 63000 Version: 2.5.0...
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