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PZ254E
P-753 Positioners
User Manual
Version: 1.1.0
Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany
Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws, www.pi.ws
Date: 11.05.2022
This document describes the following products:
P-753.11C / P-753.1CD
LISA high dynamics piezo nanopositioner,
15 µm, direct position measuring, capacitive
sensor
P-753.21C / P-753.2CD
LISA high dynamics piezo nanopositioner,
30 µm, direct position measuring, capacitive
sensor
P-753.31C / P-753.3CD
LISA high dynamics piezo nanopositioner,
38 µm, direct position measuring, capacitive
sensor
Models:
.11C/.21C/.31C = with LEMO connectors
.1CD/.2CD/.3CD = with D-sub connector
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Related Manuals for PI P-753 Series
Summary of Contents for PI P-753 Series
- Page 1 38 µm, direct position measuring, capacitive sensor Models: .11C/.21C/.31C = with LEMO connectors .1CD/.2CD/.3CD = with D-sub connector Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws, www.pi.ws...
- Page 2 The patents held by PI are found in our patent list: https://www.physikinstrumente.com/en/about-pi/patents © 2022 Physik Instrumente (PI) GmbH & Co. KG, Karlsruhe, Germany. The text, photographs and drawings in this manual are protected by copyright. With regard thereto, Physik Instrumente (PI) GmbH & Co. KG retains all the rights.
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Page 3: Table Of Contents
Contents About this Document Objective and Target Group of this User Manual ............1 Symbols and Typographic Conventions..............1 Definition of Terms ..................... 2 Figures ........................2 Other Applicable Documents ..................3 Downloading Manuals ....................3 Safety Intended Use ......................5 General Safety Instructions .................. - Page 4 Discharging the P-753 ....................27 Maintenance General Notes on Maintenance ................29 Cleaning the P-753 ....................29 Troubleshooting Customer Service Technical Data 10.1 Specifications ......................35 10.1.1 Data Table ....................35 10.1.2 Maximum Ratings ..................36 10.1.3 Ambient Conditions and Classifications ............37 10.2 Dimensions .......................
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Page 5: About This Document
1 About this Document About this Document In this Chapter Objective and Target Group of this User Manual ................1 Symbols and Typographic Conventions ..................1 Definition of Terms ........................2 Figures ............................2 Other Applicable Documents ......................3 Downloading Manuals ........................3 Objective and Target Group of this User Manual This user manual contains the information required for the intended use of the P-753 (hereinafter referred to as "positioner"). -
Page 6: Definition Of Terms
1 About this Document Symbol/Label Meaning Action consisting of several steps with strict sequential order Action consisting of one or more steps without relevant sequential order. Bullet p. 5 Cross-reference to page 5 RS-232 Label on the product indicating an operating element (example: RS-232 interface socket) Warning signs on the product that refer to detailed information in this manual. -
Page 7: Other Applicable Documents
1 About this Document Other Applicable Documents The devices and software tools from PI mentioned in this documentation are described in separate manuals. The latest versions of the user manuals are available for download (p. 3) on our website. Product Document E-625.CR Piezo Servo Controller... -
Page 9: Safety
The P-753 can only be used as intended in conjunction with suitable electronics (p. 11) that are available from PI. The electronics are not included in the scope of delivery of the P-753. The electronics must provide the required operating voltages. To ensure proper performance of the servo control system, the electronics must be able to read out and process the signals from the capacitive sensors. - Page 10 2 Safety The P-753 is driven by piezo actuators. Temperature changes and compressive stress can induce charges in piezo actuators. Piezo actuators can remain charged for several hours after disconnecting the electronics. If the P-753's connector has contacts that can be touched, or if other parts with touchable contacts (e.g., adapter cables) are connected to the connector, touching or short circuiting these contacts can lead to minor injuries from electric shock.
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Page 11: Organizational Measures
2 Safety Organizational Measures User manual Always keep this user manual together with the P-753. The latest versions of the user manuals are available for download (p. 3) on our website. Add all information from the manufacturer to the user manual, for example supplements or technical notes. -
Page 13: Product Description
3 Product Description Product Description In this Chapter Model Overview ..........................9 Product View ..........................10 Product Labeling .......................... 10 Scope of Delivery ......................... 11 Suitable Electronics ........................11 Accessories ........................... 12 Technical Features ........................12 Model Overview The P-753 is available in the following versions: LISA high dynamics piezo nanopositioner Model Description... -
Page 14: Product View
4 to 9 = consecutive number LISA Brand name Manufacturer's logo Warning sign "Pay attention to the manual!" Old equipment disposal (p. 43) Country of origin: Germany Country of origin WWW.PI.WS Manufacturer's address (website) CE conformity mark Version: 1.1.0 PZ254E P-753 Positioners... -
Page 15: Scope Of Delivery
3 Product Description Labeling Description Symbol for the protective earth conductor, marks the protective earth connector of the P-753 (p. 16) Figure 2: "Residual Voltage" warning sign on the connector of the P-753 Notice of risk of electric shock (p. 5) for models with D-sub plug connector Scope of Delivery Product number Description... -
Page 16: Accessories
3 Product Description Accessories Adapter cables for models with LEMO plug connectors Product number Description P-895.1LDC Adapter cable LEMO to D-sub 7W2 (m) for piezo actuator nanopositioning systems with capacitive sensors, 1 channel, length: 0.3 m. To order, contact our customer service department (p. 33). Technical Features 3.7.1 PICMA®... -
Page 17: Unpacking
4 Unpacking Unpacking 1. Unpack the P-753 with care. 2. Compare the contents with the scope of delivery according to the contract and the delivery note. 3. Inspect the contents for signs of damage. If any parts are damaged or missing, contact our customer service department (p. -
Page 19: Installation
5 Installation Installation In this Chapter General Notes on Installing ......................15 Connecting the P-753 to the Protective Earth Conductor ............16 Mounting the P-753 ........................18 Fixing the Load ..........................20 Connecting the P-753 to the Electronics ..................23 General Notes on Installing CAUTION Dangerous voltage and residual charge in piezo actuators! -
Page 20: Connecting The P-753 To The Protective Earth Conductor
NOTICE Damage due to unsuitable cables! Unsuitable cables can damage the P-753 and the electronics. Use cables provided by PI only to connect the P-753 to the electronics. NOTICE Damage due to improper mounting! Improper mounting of the P-753 or incorrectly mounted parts can damage the P-753. - Page 21 5 Installation INFORMATION In the case of P-753 positioners with D-sub connectors, ground loops can occur when the positioner is grounded via its protective earth connector as well as via the connecting cable's shielding for the electronics. If a ground loop occurs, contact our customer service department (p. 33). The P-753 has an M4 hole for attaching the protective earth conductor.
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Page 22: Mounting The P-753
5 Installation Mounting the P-753 NOTICE Warping the P-753 when mounting onto uneven surfaces! The P-753 could warp if mounted on an uneven surface. Warping reduces the accuracy. Mount the P-753 onto a flat surface. The recommended flatness of the surface is ≤10 µm. ... - Page 23 5 Installation The following figure serves as an example and can differ from your positioner model. Figure 4: P-753: Four countersunk holes for mounting from above (white arrows) and two threaded holes for mounting from below (hatched arrows) Requirements You have read and understood the general notes on installing (p. 15). ...
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Page 24: Fixing The Load
5 Installation Mounting the P-753 1. Align the P-753 on the surface so that the corresponding holes in the P-753 and surface are in line. 2. Mount the P-753 onto the surface from above or from below: Mounting from above with four M3 screws: Insert the screws from above through the countersunk holes in the base body of the P-753 into the holes in the surface. - Page 25 5 Installation NOTICE Center of load at unsuitable position! If the center of load is located too far away from the center of the motion platform (e.g., tall load and unwanted lever effect), the P-753 can be damaged, especially in dynamic operation, by high strain on the flexure guides, high torques, and oscillations.
- Page 26 5 Installation Figure 7: Long lever and center of load (1) on the side of the motion platform Figure 8: P-753: M2.5 holes in the motion platform for fixing loads Requirements You have read and understood the general notes on installing (p. 15). ...
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Page 27: Connecting The P-753 To The Electronics
5 Installation Connecting the P-753 to the Electronics INFORMATION When connecting, pay attention to the assignment specified on the labeling of the sockets, plug connectors, and cables. Requirements You have read and understood the general notes on installing (p. 15). ... -
Page 29: Starting And Operating
6 Starting and Operating Starting and Operating In this Chapter General Notes on Starting and Operating ................... 25 Operating the P-753 ........................27 Discharging the P-753 ........................27 General Notes on Starting and Operating CAUTION Risk of electric shock if the protective earth conductor is not connected! If a protective earth conductor is not or not properly connected, dangerous touch voltages can occur on the P-753 in the case of malfunction or failure of the system. - Page 30 Operating voltages that are too high or incorrectly connected can cause damage to the P-753. Operate the P-753 only with controllers/drivers and original accessories from PI. Do not exceed the operating voltage range (p. 36) specified for the P-753.
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Page 31: Operating The P-753
Before demounting (e.g., before cleaning and transporting the P-753 and for modifications) The P-753 is discharged via the discharge resistor inside the electronics from PI. Discharging a positioner connected to the electronics In closed-loop operation: 1. Switch off the servo mode on the controller. -
Page 33: Maintenance
7 Maintenance Maintenance In this Chapter General Notes on Maintenance ....................29 Cleaning the P-753 ........................29 General Notes on Maintenance NOTICE Misalignment from loosening screws on the base body! The P-753 is maintenance-free and precisely aligned. Loosened screws on the base body cause a loss in positioning accuracy. - Page 34 7 Maintenance Cleaning the P-753 Clean the surfaces of the P-753 with a cloth dampened with a mild cleanser or disinfectant (e.g., isopropyl alcohol). Version: 1.1.0 PZ254E P-753 Positioners...
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Page 35: Troubleshooting
8 Troubleshooting Troubleshooting Problem Possible causes Solution No or limited Cable not connected Check the cable connections. motion correctly Excessive load Do not exceed the maximum permissible stress and load capacities according to the specifications (p. 35). Zero shift of the sensor for ... - Page 36 8 Troubleshooting Problem Possible causes Solution Axes were mixed up during Pay attention to the assignment of the connection (only with LEMO axes when connecting the positioner to connectors) the controller. This assignment is indicated by labels on the devices. The positioner is not ...
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Page 37: Customer Service
9 Customer Service Customer Service For inquiries and orders, contact your PI sales engineer or send us an email (service@pi.de). If you have any questions concerning your system, provide the following information: − Product and serial numbers of all products in the system −... -
Page 39: Technical Data
10 Technical Data Technical Data Subject to change. You can find the latest product specifications on the product web page at www.pi.ws (https://www.pi.ws). In this Chapter Specifications ..........................35 Dimensions ..........................38 Torque for Stainless Steel Screws (A2-70) ................... 41 Pin Assignment .......................... -
Page 40: Maximum Ratings
E-754 E-754 E-754 The resolution of the system is limited only by the noise of the amplifier and the measuring technology because PI piezo nanopositioning systems are free of friction. Versions with LEMO connector available as P-753.x1C. 10.1.2 Maximum Ratings... -
Page 41: Ambient Conditions And Classifications
10 Technical Data 10.1.3 Ambient Conditions and Classifications Pay attention to the following ambient conditions and classifications for the P-753: Area of application For indoor use only Maximum altitude 2000 m Air pressure 1100 hPa to 0.1 hPa Relative humidity Highest relative humidity 80% for temperatures up to 31 °C Decreasing linearly to 50% relative humidity at 40 °C Operating temperature... -
Page 42: Dimensions
10 Technical Data 10.2 Dimensions Figure 9: P-753.11C / P-753.1CD, dimensions in mm. Note that a comma is used in the drawings instead of a decimal point. Version: 1.1.0 PZ254E P-753 Positioners... - Page 43 10 Technical Data Figure 10: P-753.21C / P-753.2CD, dimensions in mm. Note that a comma is used in the drawings instead of a decimal point. P-753 Positioners PZ254E Version: 1.1.0...
- Page 44 10 Technical Data Figure 11: P-753.31C / P-753.3CD, dimensions in mm. Note that a comma is used in the drawings instead of a decimal point. Version: 1.1.0 PZ254E P-753 Positioners...
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Page 45: Torque For Stainless Steel Screws (A2-70)
10 Technical Data 10.3 Torque for Stainless Steel Screws (A2-70) Screw size Minimum torque Maximum torque 4 Nm 6 Nm 2.5 Nm 3.5 Nm 1.5 Nm 2.5 Nm 0.8 Nm 1.1 Nm M2.5 0.3 Nm 0.4 Nm 0.15 Nm 0.2 Nm M1.6 0.06 Nm 0.12 Nm... - Page 46 10 Technical Data Signal Function Piezo voltage Probe Probe sensor signal (immovable part of the capacitive sensor) Data ID chip Data line for ID chip GND Target and ID chip Target and ID chip ground GND PZT Piezo voltage ground (not connected) Target Target sensor signal (movable part of the...
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Page 47: Old Equipment Disposal
Dispose of your old equipment according to international, national, and local rules and regulations. In order to fulfill its responsibility as the product manufacturer, Physik Instrumente (PI) GmbH & Co. KG undertakes environmentally correct disposal of all old PI equipment made available on the market after 13 August 2005 without charge. - Page 49 12 European Declarations of Conformity European Declarations of Conformity For the P-753, declarations of conformity were issued according to the following European statutory requirements: Low Voltage Directive EMC Directive RoHS Directive The standards applied for certifying conformity are listed below. Safety (Low Voltage Directive): EN 61010-1 EMC: EN 61326-1 RoHS: EN IEC 63000...
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