PI H-811 User Manual

Miniature hexapod

Hide thumbs Also See for H-811:

User manual (100 pages)

Short instructions (8 pages)

User manual (99 pages)

Table Of Contents

100

101

102

103

104

105

106

107

108

109

110

Quick Links

Download this manual

MS235E

H-811 Miniature Hexapod

User Manual

Version: 4.0.0

Physik Instrumente (PI) SE & Co. KG, Auf der Römerstraße 1, 76228 Karlsruhe, Germany

Phone +49 721 4846-0, fax +49 721 4846-1019, e-mail info@pi.ws, www.pi.ws

Date: 03.02.2025

This document describes the following products:

H-811.I2



Miniature hexapod, BLDC motor, 5 kg payload,

20 mm/s max. velocity

H-811.I2V



Miniature hexapod, vacuum compatible up to

hPa, BLDC motor, 5 kg payload, 10 mm/s

-6

max. velocity

H-811.F2



Miniature hexapod for optical alignment,

removable magnetic plate, BLDC motor, 5 kg

payload, 20 mm/s max. velocity

H-811.S2



Motion hexapod for highly dynamic

applications, direct drive, 2.5 kg payload, 25

mm/s max. velocity

H-811.S2IHP



Miniature hexapod for highest precision, BLDC

motor, 2.5 kg payload, 20 mm/s max. velocity

Table of Contents

Need help?

Do you have a question about the H-811 and is the answer not in the manual?

Questions and answers

Summary of Contents for PI H-811

Page 1  Miniature hexapod for highest precision, BLDC motor, 2.5 kg payload, 20 mm/s max. velocity Physik Instrumente (PI) SE & Co. KG, Auf der Römerstraße 1, 76228 Karlsruhe, Germany Phone +49 721 4846-0, fax +49 721 4846-1019, e-mail info@pi.ws, www.pi.ws...
Page 2 The following trademarks are the intellectual property of Physik Instrumente (PI) SE & Co. KG ("PI") and have been entered in the trademark register of the German Patent and Trade Mark Office and, in some cases, also in other trademark registers under the company name of Physik Instrumente (PI) GmbH & Co. KG: PI ®...
Page 3: Table Of Contents
Contents About this Document Objective and Target Group of this User Manual ............1 Symbols and Typographic Conventions..............1 Figures ........................2 Other Applicable Documents ..................2 Handbücher herunterladen ..................2 Safety Intended Use ......................5 General Safety Instructions ..................5 Organizational Measures ....................
Page 4 10.1.7 Specifications for Data Transmission and Power Supply Cables ....67 10.2 Maximum Ratings ..................... 68 10.3 Ambient Conditions and Classifications ..............68 10.4 Dimensions ....................... 69 10.4.1 H-811 Hexapod .................... 69 10.4.2 000067899 Connector Holder ..............74 10.5 Load Curves ......................74 10.5.1 H-811.I2 ....................... 75 10.5.2 H-811.I2V .....................
Page 5 Old Equipment Disposal Glossary Appendix 13.1 Explanations of the performance test report............103 13.2 European Declarations of Conformity ..............103...
Page 7: About This Document
About this Document Objective and Target Group of this User Manual This user manual contains the information necessary for using the H-811 as intended. We assume that the user has basic knowledge of closed-loop systems, motion control concepts, and applicable safety measures.
Page 8: Figures
For better understandability, the colors, proportions, and degree of detail in illustrations can deviate from the actual circumstances. Photographic illustrations may also differ and must not be seen as guaranteed properties. Other Applicable Documents The devices and software tools from PI mentioned in this documentation are described in separate manuals. Device/Program Document Document content C-887.5xx controller...
Page 9 1 About this Document 6. Fill out the request form and select SEND REQUEST. The download link will then be sent to the email address entered. H-811 Miniature Hexapod MS235E Version: 4.0.0...
Page 11: Safety
 Add all information from the manufacturer such as supplements or technical notes to the user manual.  If you give the H-811 to other users, include this user manual as well as all other relevant information provided by the manufacturer.
Page 12: Measures For Handling Vacuum-Compatible Products
When handling the vacuum model of the hexapod, attention must be paid to appropriate cleanliness. At PI, all parts are cleaned before assembly. During assembly and measurement, powder-free gloves are worn. Afterwards, the hexapod is cleaned once again by wiping and shrink-wrapped twice in vacuum-compatible film.
Page 13: Product Description
2.5 kg load capacity; 0.5 m cable length H-811.S2IHP Miniature hexapod; brushless DC motor; 2.5 kg load capacity; 20 mm/s maximum velocity; 0.5 m cable length Product View Figure 1: Elements of H-811.I2 and H-811.S2 H-811 Miniature Hexapod MS235E Version: 4.0.0...
Page 14 3 Product Description Figure 2: Elements of the H-811.I2V Motion platform Strut Base plate Data transmission cable Power supply cable Figure 3: Elements of the H-811.S2IHP Motion platform Strut Hard stop Version: 4.0.0 MS235E H-811 Miniature Hexapod...
Page 15: Technical Features
3 Product Description Base plate Data transmission cable Power supply cable Figure 4: Elements of the H-811.F2 Motion platform Strut Data transmission cable Power supply cable Base plate Mounting plate, held by a magnet Technical Features 3.3.1 Struts The hexapod has 6 adjustable-length struts. Each strut carries out linear motion. Each set of settings of the 6 struts defines a position of the motion platform in 6 degrees of freedom (3 translational axes and 3 rotational axes).
Page 16: Motion Control
3.3.2 Motion control The hexapod is intended for operation with a suitable controller from PI (p. 14). The controller makes it possible to command motion of individual axes, combinations of axes, or all 6 axes at the same time in a single motion command.
Page 17 (see also the example below for consecutive rotations). A specified rotation in space is calculated from the individual rotations in the order U -> V- > W. H-811 Miniature Hexapod MS235E Version: 4.0.0...
Page 18 1. The U axis is commanded to move to position 10. The rotation around the U axis tilts the rotational axes V and W. Platform in reference position Platform position: U = 10 (U parallel to spatially fixed Xaxis) Version: 4.0.0 MS235E H-811 Miniature Hexapod...
Page 19 Platform position: U = 10, V = –10, W = 10 (U and V parallel to the platform level, W vertical to the platform level) For further data on the travel ranges, refer to the "Specifications" (p. 55) section. H-811 Miniature Hexapod MS235E Version: 4.0.0...
Page 20: Id Chip
(e.g., geometry data and control parameters). The configuration data for customized hexapods is only stored on the controller if the hexapod and controller are delivered together, or if PI was correspondingly informed before delivery of the controller.
Page 21 For further information, refer to "Optional: Operating the hexapod with a separate 12 V power adapter" (p. 38). F-206.TMU H-811.F2 model only: Mounting plate for fast replacement of different assemblies R-FMP-GSM Fast, multichannel gradient search routines Available for hexapod mechanics H-811.F2 and H-811.I2 in combination with a C-887 hexapod controller that features a high-resolution analog input.
Page 23: Unpacking
Order number Components H-811 Hexapod according to your order (p. 7). H-811.I2, .F2, .S2, .S2IHP: Cables with a length of 0.5 m are installed permanently. H-811.I2V: Cables with a length of 2 m are installed permanently. H-811.I2V vacuum-compatible model only:...
Page 24: Unpacking The Hexapod
An impermissible mechanical load on the H-811 due to transportation without a transport safeguard can damage the H-811 and lead to loss of precision.  Do not remove the transport safeguard until after installation of the H-811 at its place of use.
Page 25  Inspect the contents for signs of damage. If any parts are damaged or missing, contact our customer service (p. 53) immediately. Keeping the packaging  Keep all packaging material in case the product needs to be transported later. H-811 Miniature Hexapod MS235E Version: 4.0.0...
Page 27: Installing
Touching the base plate can result in minor injuries from burning.  Do not install the base plate of the H-811.S2IHP thermally insulated.  If sufficient cooling is not possible: Make sure that the hot base plate of the H-811.S2IHP and its surrounding parts cannot be touched.
Page 28: Determining Valid Poses
(= limit value when servo mode is switched on). With the servo mode switched off, the maximum holding force is based on the self-locking of the actuators in the hexapod struts and is lower than the maximum payload. INFORMATION Version: 4.0.0 MS235E H-811 Miniature Hexapod...
Page 29: Mounting The Hexapod On A Surface
Unfavorable mounting orientation The H-811 can be mounted in any orientation. It is however recommended to mount the H-811.S2IHP model with a horizontal orientation (= horizontal base plate) due to the weak holding force when the device is powered off.
Page 30: Grounding The Hexapod
Use one of the mounting holes in the motion platform (p. 69) for connection. If the motion platform and the load are connected conductively to each other, − connect the load to the grounding system. Version: 4.0.0 MS235E H-811 Miniature Hexapod...
Page 31: Fixing The Data Transmission Cable With The Connector Holder
− Fixing the data transmission cable with the connector holder 1. Attach the connector holder to the HD D-sub 78 connector (m) of the data transmission cable that is permanently installed on the hexapod: H-811 Miniature Hexapod MS235E Version: 4.0.0...
Page 32: Fixing The Load To The Hexapod
 Only mount the hexapod and the load on the mounting fixtures (holes) intended for this purpose. INFORMATION H-811.F2 model only: The load to be aligned can be fixed to the mounting plate or directly to the motion platform. Fixing to the mounting plate is recommended.
Page 33 Additional mounting plates are available (p. 14) as optional accessories. Therefore, it is possible to replace the load to be aligned quickly. Figure 7: H-811.F2 model only: Mounting plate Light-colored arrow: Lift to remove the mounting plate Dark-colored arrow: Put the mounting plate onto the motion platform carefully to attach it Requirements ...
Page 34: Connecting The Hexapod To The Controller
(see figure). Connecting the Hexapod to the Controller Cables with a length of 0.5 m (H-811.I2., .F2, .S2, .S2IHP) or 2 m (811.I2V) are installed permanently on the hexapod. Connecting cables are not included in the scope of delivery and must be ordered separately (p.
Page 35 Figure 8: Vacuum feedthrough for data transmission (4668), dimensions in mm 4 holes, Ø6 x 45° for M3 countersunk screw  Install the vacuum feedthrough for data transmission (4668) so that the HD Sub-D 78 socket is in the vacuum chamber. H-811 Miniature Hexapod MS235E Version: 4.0.0...
Page 36 Pay attention to the assignment specified on the labeling of the sockets, plug connectors, and cables. Pay attention to the mechanical coding of connectors and sockets. − − Do not use force. − Use the integrated screws to secure the connections against accidental disconnection. Version: 4.0.0 MS235E H-811 Miniature Hexapod...
Page 37 Panel plug / connector, male Socket / connector, female Controller Refer to "Suitable Controllers (p. 14)" Hexapod H-811.x2 Power adapter, from the scope of delivery of the controller, 24 V DC output Data transmission cable Power supply cable H-811 Miniature Hexapod MS235E Version: 4.0.0...
Page 38 Hexapod H-811.I2V Power adapter, from the scope of delivery of the controller, 24 V DC output Vacuum chamber Data transmission cable Power supply cable Vacuum feedthrough for data transmission Vacuum feedthrough for power supply Version: 4.0.0 MS235E H-811 Miniature Hexapod...
Page 39: Removing The Transport Safeguard
 Remove the transport safeguard before you start up the hexapod system. Overview The following figure shows a H-811 hexapod with the transport safeguard installed. For a better overview, the hexapod is shown without grounding, mounted load, and connecting cables.
Page 40 For a better overview, the hexapod is shown in the following figures unmounted, without grounding, mounted load, and connecting cables. 1. Left side: Unscrew the lateral mounting screw until the holding block is loosened. 2. Repeat step 1 for the right side. Version: 4.0.0 MS235E H-811 Miniature Hexapod...
Page 41 5 Installing 3. Unscrew and remove the upper mounting screw. 4. Remove the upper part of the transport safeguard. H-811 Miniature Hexapod MS235E Version: 4.0.0...
Page 42 6. Remove the lower part of the transport safeguard. Keeping the transport safeguard  Keep all parts of the transport safeguard including all screws in case the product needs to be transported again later on. Version: 4.0.0 MS235E H-811 Miniature Hexapod...
Page 43: Startup
 Do not place any objects in areas where they can be caught by moving parts.  Only command valid poses. See "Determining Valid Poses" (p. 22) for the definition of a valid pose.  Stop the motion immediately if a controller malfunction occurs. H-811 Miniature Hexapod MS235E Version: 4.0.0...
Page 44: Starting Up The Hexapod System
Starting up the hexapod system 1. Start up the controller (refer to the user manual of the controller). 2. Run a few motion cycles for test purposes (refer to the user manual of the controller). Version: 4.0.0 MS235E H-811 Miniature Hexapod...
Page 45: Optional: Operating The Hexapod With A Separate 12 V Power Adapter
PC via the TCP/IP interface or the RS-232 interface. 4. Send the following commands to adapt the controller's settings permanently to the 12 V power supply of the hexapod and to reboot the controller: SVO X 0 H-811 Miniature Hexapod MS235E Version: 4.0.0...
Page 46 2. Disconnect the hexapod from the C-501.12060M12 power supply. 3. Switch on the controller. 4. Use the program PITerminal to establish communication between the controller and the PC via the TCP/IP interface or the RS-232 interface. Version: 4.0.0 MS235E H-811 Miniature Hexapod...
Page 47 8. If there is an M12 screw plug, remove it from the controller's 24 V output (24 V Out 7 9. Connect the hexapod to the 24 V output of the controller. Refer to "Connecting the hexapod to the controller" (p. 28) for further information. H-811 Miniature Hexapod MS235E Version: 4.0.0...
Page 49: Maintenance
7 Maintenance Maintenance PI offers a range of wraparound services for all their products, many of which are designed to increase the system’s lifetime and uptime: Remote system setup: An expert ensures that your system is optimized and runs ...
Page 50: Transporting And Packing The Hexapod
NOTICE Mechanical overload due to incorrect handling For models of the H-811 that are delivered with a transport safeguard, the following applies: An impermissible mechanical load on the H-811 due to transportation without a transport safeguard can damage the H-811 and lead to loss of precision.
Page 51: Mounting The Transport Safeguard
For a better overview, the hexapod is shown in the following figures unmounted, without grounding, mounted load, and connecting cables. 1. Place the lower part of the transport safeguard on the base plate of the hexapod and tighten it with the socket head screw. H-811 Miniature Hexapod MS235E Version: 4.0.0...
Page 52 2. Place the upper part of the transport safeguard on the lower part so that the hole for the upper mounting screw is located precisely over the corresponding hole in the lower part. 3. Screw the upper part of the transport safeguard tightly to the lower part using the mounting screw. Version: 4.0.0 MS235E H-811 Miniature Hexapod...
Page 53: Uninstalling The Hexapod
4. Remove the hexapod from the underlying surface. 7.3.4 Packing the hexapod Accessory Original packaging (p. 17)  Packing the hexapod  Proceed as described in H811T0001 (in the scope of delivery (p. 17)). H-811 Miniature Hexapod MS235E Version: 4.0.0...
Page 55: Troubleshooting
 Carry out a tuning of the parameters. Unsuitable control  parameters for the  Contact our customer service department (p. 53). application The system behavior has  changed due to an increasing ease of operation. H-811 Miniature Hexapod MS235E Version: 4.0.0...
Page 56  Check the Power Good signal and the activation state of the 24-V output for the hexapod (24 V Out 7 A). Options: − In PIMikroMove, open the Diagnostic Information window by selecting the C-887 > Show diagnostic information... menu item. Version: 4.0.0 MS235E H-811 Miniature Hexapod...
Page 57 7 If error code 7 is reported and the current position is outside ("Position out of limits"). the travel range limits for at least one axis, the following steps H-811 Miniature Hexapod MS235E Version: 4.0.0...
Page 58 Motion is generally not  not move" section applies to your problem. possible If the problem with your hexapod is not listed here or cannot be solved as described, contact our customer service department (p. 53). Version: 4.0.0 MS235E H-811 Miniature Hexapod...
Page 59: Customer Service
9 Customer Service Customer Service For inquiries and orders, contact your PI representative or send us an email (mailto:service@pi.de).  If you have questions concerning your system, provide the following information: − Product and serial numbers of all products in the system −...
Page 61: Technical Data
H-811.F2 Tolerance Minimum incremental motion in X 0.2 µm typ. Minimum incremental motion in Y 0.2 µm typ. Minimum incremental motion in Z 0.08 µm typ. Minimum incremental motion in θX 2 µrad typ. H-811 Miniature Hexapod MS235E Version: 4.0.0...
Page 62 2.5 kg orientation Maximum load capacity, base plate 5 kg horizontal Maximum holding force, base plate in any orientation Maximum holding force, base plate 12 N horizontal Overall mass 2.2 kg Material Stainless steel, aluminum Version: 4.0.0 MS235E H-811 Miniature Hexapod...
Page 63: H-811.I2
10 mm/s Typical velocity in Y 10 mm/s Typical velocity in Z 10 mm/s Typical angular velocity in θX 250 mrad/s Typical angular velocity in θY 250 mrad/s Typical angular velocity in θZ 250 mrad/s H-811 Miniature Hexapod MS235E Version: 4.0.0...
Page 64 Maximum load capacity, base plate 5 kg horizontal Maximum holding force, base plate in any 2.5 N orientation Maximum holding force, base plate 15 N horizontal Overall mass 2.2 kg Material Stainless steel, aluminum Version: 4.0.0 MS235E H-811 Miniature Hexapod...
Page 65: H-811.I2V
5 mm/s Typical velocity in Y 5 mm/s Typical velocity in Z 5 mm/s Typical angular velocity in θX 120 mrad/s Typical angular velocity in θY 120 mrad/s Typical angular velocity in θZ 120 mrad/s H-811 Miniature Hexapod MS235E Version: 4.0.0...
Page 66 Maximum load capacity, base plate in any 2.5 kg orientation Maximum load capacity, base plate 5 kg horizontal Maximum holding force, base plate in any 2.5 N orientation Maximum holding force, base plate 15 N horizontal Overall mass 2.2 kg Version: 4.0.0 MS235E H-811 Miniature Hexapod...
Page 67: H-811.S2
25 mm/s Maximum angular velocity in θX 625 mrad/s Maximum angular velocity in θY 625 mrad/s Maximum angular velocity in θZ 625 mrad/s Typical velocity in X 10 mm/s Typical velocity in Y 10 mm/s H-811 Miniature Hexapod MS235E Version: 4.0.0...
Page 68 Unidirectional repeatability in θX ± 6 µrad typ. Unidirectional repeatability in θY ± 6 µrad typ. Unidirectional repeatability in θZ ± 10 µrad typ. Backlash in X 0.5 µm typ. Backlash in Y 0.5 µm typ. Version: 4.0.0 MS235E H-811 Miniature Hexapod...
Page 69 4.95 mm Minimum bending radius for fixed 25 mm installation, power supply Outer diameter data transmission cable 9.5 mm Minimum bending radius for fixed 95 mm installation, data transmission Recommended controllers / drivers C-887.5x H-811 Miniature Hexapod MS235E Version: 4.0.0...
Page 70: H-811.S2Ihp
5 °·Hz Amplitude-frequency product in θZ 12.6 °·Hz Amplitude-frequency² product in X 152 mm·Hz² Amplitude-frequency² product in Y 106 mm·Hz² Amplitude error 10 % max. Phase error 60 ° max. Maximum frequency 30 Hz Version: 4.0.0 MS235E H-811 Miniature Hexapod...
Page 71 Maximum load capacity, base plate in any 1 kg orientation Maximum load capacity, base plate 2.5 kg horizontal Maximum holding force, base plate 7.5 N horizontal Overall mass 2.3 kg Material Stainless steel, aluminum H-811 Miniature Hexapod MS235E Version: 4.0.0...
Page 72: Specifications For Vacuum-Compatible Models
0,0,0. At PI, technical data is specified at 22 ±3 °C. Unless otherwise stated, the values are for unloaded conditions. Some properties are interdependent. The designation "typ." indicates a statistical average for a property; it does not indicate a guaranteed value for every product supplied. During the final inspection of a product, only selected properties are analyzed, not all.
Page 73: Specifications For Data Transmission And Power Supply Cables
Maximum acceleration Maximum number of bending cycles 1 million Operating temperature range -10 to +70 °C Data transmission cable C-815.82Dxx Unit Minimum bending radius in a drag chain Minimum bending radius with the fixed installation H-811 Miniature Hexapod MS235E Version: 4.0.0...
Page 74: Maximum Ratings
Highest relative humidity of 80% at temperatures of up to 31°C, decreasing linearly to a relative humidity of 50% at 40°C Degree of protection according IP20 to IEC 60529 Area of application For indoor use only Maximum altitude 2000 m Version: 4.0.0 MS235E H-811 Miniature Hexapod...
Page 75: Dimensions
10 Technical Data 10.4 Dimensions 10.4.1 H-811 Hexapod dimensions in mm. Note that a comma is used in the drawings instead of a decimal point. Figure 13: H-811.I2, at zero position of nominal travel range H-811 Miniature Hexapod MS235E Version: 4.0.0...
Page 76 10 Technical Data Figure 14: H-811.S2, at zero position of nominal travel range Version: 4.0.0 MS235E H-811 Miniature Hexapod...
Page 77 10 Technical Data Figure 15: H-811.S2IHP, at zero position of nominal travel range H-811 Miniature Hexapod MS235E Version: 4.0.0...
Page 78 10 Technical Data Figure 16: H-811.F2, at zero position of nominal travel range Version: 4.0.0 MS235E H-811 Miniature Hexapod...
Page 79 10 Technical Data Figure 17: H-811.I2V, at zero position of nominal travel range If the controller's factory settings are used for the coordinate system and the center of rotation, the hexapod in the figure corresponds to the position X=Y=Z=U=V=W=0. The (0,0,0) coordinates indicate the origin of the coordinate system. When the default settings for the coordinate system and center of rotation are used, and the hexapod is at position X=Y=Z=U=V=W=0, the center of rotation is at the origin of the coordinate system.
Page 80: 000067899 Connector Holder
Figure 18: 000067899 connector holder for strain relief 10.5 Load Curves The load curves in the following figures only apply when the hexapod is connected to the controller and the servo mode is switched on. Version: 4.0.0 MS235E H-811 Miniature Hexapod...
Page 81: H-811.I2
10 Technical Data 10.5.1 H-811.I2 Figure 19: Maximum loads on the H-811.I2 when mounted horizontally Figure 20: Maximum loads on the H-811.I2 when mounted vertically H-811 Miniature Hexapod MS235E Version: 4.0.0...
Page 82 10 Technical Data Figure 21: Maximum loads on the H-811.I2 when mounted at the most unfavorable angle Figure 22: Maximum permissible force acting on the H-811.I2 when mounted horizontally Version: 4.0.0 MS235E H-811 Miniature Hexapod...
Page 83: H-811.I2V
10 Technical Data 10.5.2 H-811.I2V Figure 23: Maximum loads on the H-811.I2V when mounted horizontally Figure 24: Maximum loads on the H-811.I2V when mounted vertically H-811 Miniature Hexapod MS235E Version: 4.0.0...
Page 84 10 Technical Data Figure 25: Maximum loads on the H-811.I2V when mounted at the most unfavorable angle Figure 26: Maximum permissible force acting on the H-811.I2V when mounted horizontally Version: 4.0.0 MS235E H-811 Miniature Hexapod...
Page 85: H-811.F2
10 Technical Data 10.5.3 H-811.F2 Figure 27: Maximum loads on the H-811.F2 when mounted horizontally Figure 28: Maximum loads on the H-811.F2 when mounted vertically H-811 Miniature Hexapod MS235E Version: 4.0.0...
Page 86 10 Technical Data Figure 29: Maximum loads on the H-811.F2 when mounted at the most unfavorable angle Figure 30: Maximum permissible force acting on the H-811.F2 when mounted horizontally Version: 4.0.0 MS235E H-811 Miniature Hexapod...
Page 87: H-811.S2Ihp
10 Technical Data 10.5.4 H-811.S2IHP Figure 31: Maximum loads of the H-811.S2IHP when mounted horizontally Figure 32: Maximum loads of the H-811.S2IHP when mounted vertically H-811 Miniature Hexapod MS235E Version: 4.0.0...
Page 88 10 Technical Data Figure 33: Maximum loads of the H-811.S2IHP when mounted at the most unfavorable angle Figure 34: Maximum permissible force acting on the H-811.S2IHP when mounted horizontally Version: 4.0.0 MS235E H-811 Miniature Hexapod...
Page 89: Dynamic Working Range
10 Technical Data 10.6 Dynamic Working Range The graphs mark the dynamic working ranges of the H-811.S2 and H-811.S2IHP. The following requirements apply: A compact load is mounted centrically.  The base plate of the hexapod is in the horizontal mounting position.
Page 90 10 Technical Data Figure 36: Dynamic working range of the H-811.S2, Y, 2.5 kg Version: 4.0.0 MS235E H-811 Miniature Hexapod...
Page 91 10 Technical Data Figure 37: Dynamic working range of the H-811.S2, Z, 2.5 kg H-811 Miniature Hexapod MS235E Version: 4.0.0...
Page 92 10 Technical Data Figure 38: Dynamic working range of the H-811.S2, U (ƟX), 2.5 kg Version: 4.0.0 MS235E H-811 Miniature Hexapod...
Page 93 10 Technical Data Figure 39: Dynamic working range of the H-811.S2, V (ƟY), 2.5 kg H-811 Miniature Hexapod MS235E Version: 4.0.0...
Page 94 10 Technical Data Figure 40: Dynamic working range of the H-811.S2, W (ƟZ), 2.5 kg Version: 4.0.0 MS235E H-811 Miniature Hexapod...
Page 95: H-811.S2Ihp
10 Technical Data 10.6.2 H-811.S2IHP Figure 41: Dynamic working range of the H-811.S2IHP, X, 2.5 kg H-811 Miniature Hexapod MS235E Version: 4.0.0...
Page 96 10 Technical Data Figure 42: Dynamic working range of the H-811.S2IHP, Y, 2.5 kg Version: 4.0.0 MS235E H-811 Miniature Hexapod...
Page 97 10 Technical Data Figure 43: Dynamic working range of the H-811.S2IHP, Z, 2.5 kg H-811 Miniature Hexapod MS235E Version: 4.0.0...
Page 98 10 Technical Data Figure 44: Dynamic working range of the H-811.S2IHP, U (ƟX), 2.5 kg Version: 4.0.0 MS235E H-811 Miniature Hexapod...
Page 99 10 Technical Data Figure 45: Dynamic working range of the H-811.S2IHP, V (ƟY), 2.5 kg H-811 Miniature Hexapod MS235E Version: 4.0.0...
Page 100: Pin Assignment
10 Technical Data Figure 46: Dynamic working range of the H-811.S2IHP, W (ƟZ), 2.5 kg 10.7 Pin Assignment 10.7.1 Power Supply Connector Not for vacuum models: Power supply via 4-pin M12 connector Function 24 V DC 24 V DC Only for vacuum models: Power supply via 2-pin LEMO panel plug, male, type ECJ.1B.302.CLD...
Page 101: Data Transmission Connector
CH2 LimN OUT CH2 A+ OUT CH2 B+ OUT CH2 A- OUT CH2 B- OUT CH3 Sign IN CH3 MAGN IN CH3 Ref OUT CH3 LimP OUT CH3 LimN OUT CH3 A+ OUT CH3 B+ OUT H-811 Miniature Hexapod MS235E Version: 4.0.0...
Page 102 CH6 MAGN IN CH6 Ref OUT CH6 LimP OUT CH6 LimN OUT CH6 A+ OUT CH6 B+ OUT CH6 A- OUT CH6 B- OUT ID Chip Brake/Enable drive 24 V input Power Good 24 V output Version: 4.0.0 MS235E H-811 Miniature Hexapod...
Page 103: Old Equipment Disposal
PI equipment made available on the market after 13 August 2005 without charge. If you have an old device from PI, you can send it to the following address free of charge: Physik Instrumente (PI) SE & Co. KG Auf der Römerstraße 1...
Page 105 The spatial position of the hexapod, i.e., the combination of its position and orientation in three-dimensional space is referred to as "pose". The pose of a hexapod is defined by 6 coordinates in relation to a right-handed Cartesian coordinate system: H-811 Miniature Hexapod MS235E Version: 4.0.0...
Page 106 The following example figures of the H-810 hexapod show that the coordinate system does not move along with motion of the platform. Hexapod in the reference position Hexapod with the platform moved in X Cable exit Version: 4.0.0 MS235E H-811 Miniature Hexapod...
Page 107 12 Glossary H-811 Miniature Hexapod MS235E Version: 4.0.0...
Page 109 Motion over partial sections, for example, ±1 mm in increments of, for example, 10 µm  13.2 European Declarations of Conformity For the H-811, declarations of conformity were issued according to the following European statutory requirements: EMC Directive RoHS Directive The standards applied for certifying conformity are listed below.
Page 110 13 Appendix Safety: EN 61010-1 RoHS: EN IEC 63000 Version: 4.0.0 MS235E H-811 Miniature Hexapod...

This manual is also suitable for:

H-811.f2 H-811.i2 H-811.i2v H-811.s2 H-811.s2ihp