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<Guideline of Parts Replacement>
Replace parts when declined performance and symptom described in Table 6-2 are found.
Table 6 -2 Inspection Positions and Guideline of Parts Replacement
Operating time
Every 3,000 hours
6-4 Replacement of Consumable Parts
CAUTION
Wear dust mask and gloves when conducting replacement work.
A minute abrasive particle suspends in the air, and there is a risk to go into the human body when
breathing.
Confirm that pump power source is disconnected from outlet or terminal blocks before conducting
replacement work without fail.
Confirm whether you do not absorb hazardous solvent for the human body. When it is
hazardous, do not conduct disassembly work definitely.
Prepare the following tools and refer to drawing when working replacement. When having difficulty in
preparing the tools, ask Ulvac Service Section.
1,
Phillips screwdriver: No. 2
2,
Torque driver (plus) set tightening torque to 4N∙m
3,
Spanner: Opposite sides 13 mm (0.5") (thickness lower than 5.5 mm (0.2")),
Torque spanner (4N·m) Opposite sides 17 mm (0.7")
4,
Wipe off solvent: Chemical without influence to rubber parts such as ethyl alcohol.
5,
Paper (paper rags)
※Wipe off the dirty parts with No.4 and No.5.
Inspection method
Diaphragm
Valve
Valve（With hole）
Abnormal bearing
See "Caution" (11) on P. 07.
Guideline of Parts
Replacement
Peel off or wear of PTFE area
Rubber deformation hardening,
or crack, etc.
Rubber deformation hardening, or
crack, etc.
Allophone
１２
Inspection
method
Visual inspection
Visual inspection
Auscultation
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