Ulvac CRYOPUMP CRYO-U Series Instruction Manual page 51

CRYO-U Cryopump Instruction Manual
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val ue wh ich controls the cryopanel temp
maximum allowable crossover pressure.
The maximum quantity of sucked gas which is instantaneously processable varies with
the heat load on the cryopump and the quantity of the gas condensed in the cryopump.
(Refer to Table 5-2.)
Maximum Quantity of Sucked Gas Processable by Cryopump
Tab le 5-2
Model
CRYO-U10HSP
[Example] When U10HSP is used and th
allowable cr ossover pressure
Maximum allowable crossover
pressure (Pa)
In order to restrict the stored quantity of gas an
rec ommended to
(Guideline Quantity to the Air)
is calculated as follows
For Your Informati
control the actual crossover pressure to 40Pa or less.
ULVAC CRYOGENICS INCORPORATED
erature not to exceed 20K is
Maximum quantity of sucked gas spontaneously
processable (Pa•L)
Limit quantity for the tempera
e vacuum chamber volume is 100L, the maximu
26600 （Pa･L）
≦
1 00（L）
on
d extend
used as the
ture of 20K or less
26600
= 266 （Pa）
the regeneration cycle, it is
m
5-5