Ulvac CRYOPUMP CRYO-U Series Instruction Manual page 101

CRYO-U Cryopump Instruction Manual
®
Revision History
Date Revision No.
2006-01-19 2006.01
2006-02-02 2006FY01
2006FY02
2006-02-20
2006-11-16 2006NR03
2007-05-24 2007MY04
2009-04-16 2009AL05
2009-11-16 2009NR06
2010-02-17 2010FY07
2010-09-08 2010SR08
2010-11-02 2010NR09
2011OR10
2011-10-21
2012-07-24 2012JU11
First edition
The recommended torque value for the connection of
flexible hoses has been changed to 20N･m.
P.8-2, The remarks for cold head maintenance were added in
Table 8-1.
The model name for accessory flange has been changed.
Added an item to be maintained.
1.CRYOPUMP DESCRIPTION Figure1-2 has been changed.
Figure1-2's table (U10H) of B has been changed to 521.4.
"Introduction" has been revised.
UCN address has been changed.
Table 8-1 has been revised for change of maintenance
interval and parts.
"SERVICE NETWORK" has been revised.
RM refrigerator has been added.
Full-fledged revision. U10H, U10HL have been removed.
P.8. Item names and item codes of equipments for maintenance
have been changed.
Cover: Export control policy has been revised.
Section 5.3 Pressure Buildup Test has been revised.
"SERVICE NETWORK" has been revised.
"Safety Instructions"
regeneration ① The description of inert gas has been added
to the section ①.
P.1-2 Table 1-1 Specifications
Pumping capacity for hydrogen has been revised.
P.4-5 Section 4.4 "Connecting Purge Gas Line"
P.6-2 "◇Unassisted warm-up" CAUTION section
P.6-3 "◇ Assisted warm-up using inert gas"
The descriptions of inert gas have been changed in the three
sections listed above.
P.4-5 Section 4.4 "Connecting Purge Line"
The supply pressure has been changed from "5kPaG or less"
ULVAC CRYOGENICS INCORPORATED
Contents
P. S-7 1.Safety measures for
R-1