Ulvac CRYOPUMP CRYO-U Series Instruction Manual page 102

Revision
2013-06-14 2013JE12
2014-02-21 2014FY13
2017-11-08 2017NR14
2022-04-08 2022AL15
R-2
to "10kPaG or less".
The description of Regeneration Gas Purge PR Unit has been
revised.
P.6-3 The content of "◇Assisted war-up using a heater" and
a CAUTION section have been revised.
P.6-3/6-5 Section 6.4 Regeneration Flow Chart
The contents of "Ⅲ. Pressure buildup check" has been
revised.
P.8-2 Table 8-1 Maintenance parts and intervals
R20, R20R, RM20, R50, R50R, and RM50 refrigerator unit
have been removed.
Table A-1 CRYOPUMP Fault Diagnosis has been revised.
Yokkaichi CS contact information has been changed.
Cover: Export control policy has been revised.
"SERVICE NETWORK" has been revised.
P.S-7 Figure 2 The description on "Exhaust line" has been
modified.
"Table1-1 Specifications" has been modified.
"1.3 Environmental Requirements" has been added.
"8. Maintenance" has been revised.
"Appendix F Dew Condensation" has been added.
"SERVICE NETWORK" has been revised.
"Safety Instructions" has been revised.
ULVAC CRYOGENICS INCORPORATED