Disconnecting Flexible Hose････････････････････････････7-1 - Ulvac CRYOPUMP CRYO-U Series Instruction Manual

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CRYO-U Cryopump Instruction Manual
7. DISCONNECTION and STORAGE
7.1
7.2
7.1 Disconnecting Flexible Hose
When disconnecting flexible hoses, be sure to use two single open end spanners with
width across flat 26mm and 30mm.
1.
Shut down the compressor unit.
2.
After the cryopump has been w
the flexible hoses.
・If removing the flexible hoses before the refrigerator reaches room temperature, helium
gas shut up into the refrigerator increases pressure with the rise of temperature, and
may blow off from a pressure relief valve finally. It might cause a helium leakage
also.
・However, only when carrying out heli
refrigerator unit, disconnect the flexible hoses from helium gas supply and return
connectors at the compressor unit side right after shutdown. Refer to Section 8.5 for
more details.
MA07001E,2010AT01
Disconnecting Flexible Hose ······································· 7-1
Storage ··································································· 7-2
ULVAC CRYOGENICS INCORPORATED
CAUTION
.
armed up to ro om temperature, disconnect
CAUTION
um circuit dec ontamination procedures for the
7-1