Honeywell Vertex M User Manual page 166

Symbol
B H
2 6
DMA
F
2
GeH
4
HBr Hydrogen Bromide
HBr LL Hydrogen Bromide (Low Level)
HCl Hydrogen Chloride
HCl LL Hydrogen Chloride (Low Level)
HCN Hydrogen Cyanide
HF Hydrogen Fluoride
HF LL Hydrogen Fluoride (Low Level)
HI
H Se Hydrogen Selenide
2
H S
2
H S LL Hydrogen Sulfide (Low Level)
2
NO
2
NF Nitrogen Trifluoride
3
COCl
2
PH
3
SiH
4
SO
2
TBA
TBP Tert-butyl Phosphine
TDMAT Tetrakis (DimethylAmino) Titanium
Table 8-1. Sample Filter Requirement Vertex M General Specifications
Vertex M
Name
Diborane
Dimethylamine
Fluorine
Germane
Hydrogen Iodide
Hydrogen Sulfide
Nitrogen Dioxide
Phosgene
Phosphine
Silane
Sulfur Dioxide
Tert-butyl Arsine
Filter Type A Filter Type B Filter Type C
X
X
X
X
X
X
X
X
X
X
X
X
166
X X
X X
X X
X X
X X
X X
X X
X X
X X
X X
X X
X X
User Manual