Ulvac DA-60D Instruction Manual page 22

i. Parts Removal
*First unplug the pump's power cable from the main
power supply.
*The picture shown is the DA-60D, but the procedure is
the same for the DA-120D.
Step 1: Remove (1) the hex socket bolts (M10×22) ×
Qty.8 (4 each on both the primary and secondary sides),
and then remove (2) the pump heads. As shown in the
picture below, the pump heads are connected to the main
pump units by (3) the SOLV piping T-joint and (4) the
SOLV hose, so please remove them first and then
remove the pump heads. Do not forcibly pull the SOLV
hose connected to the main pump units.
Next, remove (5) the hex socket bolts (M5×20) × Qty.8
(4 each on both the primary and secondary sides), and
then remove (6) the pump head covers. Inside the pump
head covers are (7) the pump head cover gaskets and (8)
the air filters. These should all be removed.
Remove (9) the connecting tube (2 tubes on DA-120S)
linking the primary and the secondary side pump heads.
Do not pull forcibly
Remove from the SOLV piping T-joint first
１２