Ulvac DA-60D Instruction Manual page 23

Connecting rod
Step 2: Remove (1) the small pan head screws (M3×5) Qty.
× 4, (2) the exhaust valve holders ((4) the plain washers on
the suction side) and (3) the suction/exhaust valves from
the pump heads. The valves come in pairs and each one is
placed on top of the other. There are therefore, 8 in total
counting all the suction and exhaust valves.
Step 3: Remove (1) the hex socket bolts (M5×16) ×
Qty.8 (4 each on both the primary and secondary sides),
and then remove (2) the push plates for the diaphragms
and (3) the diaphragms from the connecting rods.
This step completes the parts removal procedure. The
next section is the assembly.
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