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Ulvac DAU-20 Series Instruction Manual

High vacuum diaphragm type dry vacuum pump
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No．20001-2-03-5
Instruction Manual
High Vacuum Diaphragm Type Dry
Vacuum Pump
DAU-20x
(X: A=100V, B=115V, C=200V, D=220V, E=230V)
Request
Please read this Instruction Manual before starting the pump in order to
use the pump effectively and safely. Please keep this Instruction Manual
carefully.
We reserve our right to change dimensions or specifications of the
motors described in this Instruction Manual for improvement of the
performance without prior notice.
ULVAC KIKO Inc.

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Summary of Contents for Ulvac DAU-20 Series

  • Page 1 Please keep this Instruction Manual carefully. We reserve our right to change dimensions or specifications of the motors described in this Instruction Manual for improvement of the performance without prior notice. ULVAC KIKO Inc.
  • Page 2 Declaration of Conformity Company:ULVAC KIKO,Inc. Address:291-7 Chausubaru Saito-city,Miyazaki (ZIP Cord:881-0037) Japan. This declaration is issued under the sole responsibility of the manufacturer. In accordance with the following Directive: 2006/42/EC Machinery Directive 2011/65/EU+(EU)2015/863 RoHS Directive declare under our sole responsibility that the product,...
  • Page 3 Declaration of Conformity Company:ULVAC KIKO,Inc. Address:291-7 Chausubaru Saito-city,Miyazaki (ZIP Cord:881-0037) Japan. This declaration is issued under the sole responsibility of the manufacturer. In accordance with the following Directive: Supply of Machinery (Safety) Regulations 2008 (S.I. 2008 No. 1597, as amended by S.I. 2019 No. 696) The Restriction of the Use of Certain Hazardous Substances in Electrical and Electronic Equipment Regulations 2012 (S.I.

  • Page 4: Table Of Contents

    CONTENTS CONTENTS Before use ············································································································ 01 Confirmation in unpacking ························································································ 02 Directions to use safely···························································································· 03 Safety logotypes ···································································································· 03 Precautions about safety in operation ········································································· 04 1. Outline of Equipment ····························································································· 1 1-1. Intended Use and Prohibitions of Equipment ·························································· 1 1-2.
  • Page 5 CONTENTS 7. Conclusion ······································································································· 19 ・Warranties clause····························································································· 19 ・Disposal Parts Material Table Exploded view ·····················································20.21 ・Usage Status Check Sheet (For Instruction Manual) (Please use when requesting overhaul) ・Sales,service agency,and the where to make contact Drawing List Fig. 2 -1 DAU-20 Appearance ····················································································· 3 Fig.

  • Page 6: Before Use

    After reading, store this Instruction Manual on the location where available for reading by operators. Prohibited copying of Instruction Manual Any portion of this Instruction Manual cannot be copied for use by the third party without ULVAC's consent. Observance of laws and ordinances When disposing this pump, please handle by observing laws and the regulations that the local government established.

  • Page 7: Confirmation In Unpacking

    Whether damaged positions are found. Whether loosen external screws or inlet-exhaust pipe. Whether coming off positions are found. In case there is trouble by any chance, please contact vendor or ULVAC Sales Department. ATTENTION To customers who purchased "DAU-20" Never grab or bend the tube on the side part of the pump. When I take out a pump from a packing box.

  • Page 8: Directions To Use Safely

    Before use Directions to use safely Please read this "Directions to use safely" before start using the pump and operate the pump correctly. Safety logotype is enumerated in this Instruction Manual and alarm indication on the pump so that operators may understand the items to be observed. Safety logotype is prepared to use the pump correctly and safely and to prevent injury and damage of operators, etc.

  • Page 9: Precautions About Safety In Operation

    Please pay attention during maintenance work. <Maintenance / repair> (3) When requesting ULVAC overhaul, fill the type of suction gas in "Usage Status Check Sheet" provided at the end of this Instruction Manual. In case the pump is used for exhaust of toxic gas by any chance, internal pump unit is polluted by the toxic gas.
  • Page 10 Before use DANGER <Grounding Instructions [Field Wiring]> (11)This product must be connected to a grounded, metallic, permanent wiring system, or an equipment-grounding terminal or lead on the product WARNING Installation (1) Do not use the pump in an explosive atmosphere. Such use may result in injury and fire. (2) Ensure that there are no inflammable materials such as solvents in the vicinity when using the pump.
  • Page 11 Before use WARNING Operation (15) This pump is not designed to be explosion-proof. When using the pump, ensure that there are no inflammable materials such as solvents, or explosive gases, in the vicinity. Use under such conditions may result in injury or fire. (16) Inserting fingers or objects into the motor inlet may result in electric shock, injury, or fire.
  • Page 12 Disposal and Public Cleaning Law ". Never conduce burnout disposal. When the pump failed to operate or abnormal, turn off the power supply to the pump (push switch to ○ side) and disconnect power cable. Contact the vendor or ULVAC for inspection / repair immediately.
  • Page 13 Have the pump to absorb clean air for 3 - 5 minutes and conduct idling operation. <Maintenance / repair> (13) This pump is a machine having precise clearance. In case there is no repair engineers, request replacement of consumable parts that require assembling technology to ULVAC Service Section.

  • Page 14: Outline Of Equipment

    DAU-20 Instruction Manual 1. Outline of Equipment 1-1. Intended Use and Prohibitions of Equipment This diaphragm type dry vacuum pump performs evacuation by reciprocating motion of rubber membrane (diaphragm). Please take note of the following prohibitions to use Equipment correctly. <Prohibitions>...

  • Page 15: Protector (Thermal Protector)

    DAU-20 Instruction Manual 1-3. Protector (thermal protector) This pump is fitted with an automatic reset thermal protection relay for overload protection. This device shuts off the motor power supply circuit automatically to prevent burn-out if the motor temperature rises due to a pump fault which prevents rotation, or if load becomes excessive. It is recommended that additional protective devices (eg.

  • Page 16: Appearance

    DAU-20 Instruction Manual Temperature of the vacuum pump rises when operated. Do not touch the location other than the valve when the gas ballast valve is operating. Start operation after closing the gas ballast valve always. When the gas ballast valve is used, it is CAUTION generally considered that the absorbed medium reacts in the pump and exhaust vent.

  • Page 17: Installation / Storage

    DAU-20 Instruction Manual 3. Installation / Storage 3-1. Precautions in Installation / Storage See "Danger" (4) (5) (6) (7) (8) (9) (10) (11) on P. 04.05. DANGER See "Warning" (1) (2) (3) (5) (6) (7) (8) (9) (10) (11) (12) (13) (14) on P.

  • Page 18: Verification Run In Installation

    DAU-20 Instruction Manual 3-4 Verification Run in Installation 1) Detach rubber screen that attached to the inlet / exhaust pipe. 2) Confirm that the pump switch is set to OFF (pushed to ○ side) and connect it to power source. Please use the three core power supply cable (lead wire size 0.75m2 or more) as the extension cable, if necessary.

  • Page 19: Caution In Operation

    DAU-20 Instruction Manual 4 Caution in Operation 4-1 Caution in Operation See "Danger" (1) (2) (4) (5) (6) on P. 04. DANGER See "Warning" (9) (15) (16) (17) (18) on P. 05.06. WARNING See "Caution" (4) (5) (6) (7) (8) on P. 06.07. CAUTION See "Note"...

  • Page 20: Starting In Cold Ambient

    DAU-20 Instruction Manual 4-3 Starting in Cold Ambient In the cold ambient, there is a case to confront with difficulty in start because of hardened grease and diaphragm of the bearing. When it is difficult to start, follow the procedure described below. 1) Open the inlet port to atmosphere and repeat switch ON, OFF two or three times until the pump starts.

  • Page 21: Pump Performance

    "Ultimate Pressure" mentioned in Catalog and this Instruction Manual means "the lowest pressure obtained by a pump in the status that no gas is filled from the pump inlet port (idling operation status)”. Ulvac is measuring the pressure by connecting a film-type (diaphragm type) vacuum gauge to inlet port of the pump.

  • Page 22: Maintenance・Inspection・Repair

    Note Maintenance / repair range that allowed to perform by repair engineers in the Customers are the following 2 items. Do not conduct the other repair and remodeling other than Ulvac standard option. 1) Replacement of diaphragms 2) Replacement of valves 6-2 Maintenance During an operation of the vacuum pump, check the following items at least once in 3 days.

  • Page 23: Periodic Inspection

    Conduct periodic inspections of consumable parts in every 3,000 hours after started using and replace parts according to "Guideline of Parts Replacement". Replacement method [6-4. refer to replacement] of consumable part. In case there is no repair engineer, Ulvac Service Section shall be happy to replace the parts.

  • Page 24: Replacement Of Consumable Parts

    Prepare the following tools and refer to drawing when working replacement. When having difficulty in preparing the tools, ask Ulvac Service Section. 1 Phillips screwdriver: No. 2 2 Hexagonal wrench: (1) Opposite sides 2.5 mm (0.1") (2) Opposite sides 5 mm (0.2")
  • Page 25 DAU-20 Instruction Manual 4 Spanner: Opposite sides 13 mm (0.5") (thickness lower than 5.5 mm (0.2")) Torque spanner (4 N·m) Opposite sides 17 mm (0.7") 5 Wipe off solvent: Chemical without influence to rubber parts such as ethyl alcohol. 6 Paper (paper rags) 7 Air compressors...
  • Page 26 DAU-20 Instruction Manual 1) Replacement of diaphragm valves. It is recommended to replace all sheets at the same time. When working on replacement, wear gloves always. There is risk of injury. CAUTION (2) Valve retainer cover (5)Handle (4)Connecting pipe (Upper and lower) (1) Panel (Both sides) (3) Valve retainer (6) Opposite side 13 mm...
  • Page 27 DAU-20 Instruction Manual Mount upper level valve in orientation as shown in right drawing Upper level pump head mounting direction (Notch direction) Mount the lower level valve in orientation as shown in left drawing Lower level pump head mounting direction (Notch direction) Open hole valve...
  • Page 28 DAU-20 Instruction Manual Tools to use No. 1, 2, 3, 4, 5, 6 Replacement work procedure (Replacement procedure from the upper level) 1 Detach handle ⑤ at first. 2 Detach panel ① of pump left and right. 3 Detach switch plug terminal and ground lead of the side that power cord is connected. 4 Loosen 6 pan head small screws and detach Casing Cover ⑦.

  • Page 29: Replacement Of Piping

    Refer to the following table for parts to be used. Name of Name Model Material Quantity Manufacturer L form coupling Nitta Moore CP-L8-R1/8 2 pcs. Connecting PISCO SFT0860-5-C Fluorine resin (PFA) 300 mm (1') pipe (5 m (16.4') long) approx. 3) Replacement of bearing Request ULVAC Service Section.

  • Page 30: Trouble Check List

    DAU-20 Instruction Manual 6-5 Trouble Check List Table 6 -3 Trouble Check List Trouble Refer Cause How to resolve problem contents ence (1) Not connected to power supply (1) Connected to power supply (2) Switch is not turned ON (2) Push switch to | side (3) Adjust voltage fluctuation to lower than (3) Abnormal voltage of power source input ±10%...
  • Page 31 DAU-20 Instruction Manual Trouble Refer Cause How to resolve problem contents ence (1) Performing continuous operation in the (1) Do not conduct continuous operation in Temperature of status that absorption gas pressure is high vicinity of atmospheric pressure pump surface is (2) Mount refrigerating machine such as gas (2) Absorption gas is high temperature abnormally high...
  • Page 32 DAU-20 Instruction Manual 7. In Conclusion Please contact the manufacturer’s sales division if you have any questions. Warranty (1) The warranty for this pump (this equipment) extends for a period of one year from the date of shipment. (2) Any malfunctions or defects which occur under normal usage conditions during the warranty period will be repaired free of charge.
  • Page 33 DAU-20 Instruction Manual Disposal When disposing of a scrapping pump, please handle according to the laws legislated by country and the ordinance issued by local government. When disposing of poisonous gas that endangers the human body, consign scrapping processing with a specialized disposing vendor.
  • Page 34 DAU-20 Instruction Manual Exploded view...
  • Page 35 Usage Status Check Sheet (for use in Instruction Manual) * For the purpose of safety control of repair personnel, fill in within the heavy line frame and attach the sheet to the item of which repair is requested. * In case this sheet were not attached or filled in, your request of repair and service may not be accepted.
  • Page 36 株式会社アルバック 規格品事業部 東日本営業部 〒253-8543 神奈川県茅ヶ崎市萩園２５００ TEL:0467-89-2416 株式会社アルバック 規格品事業部 西日本営業部 〒532-0003 大阪府大阪市淀川区宮原３-３-３１ 上村ニッセイビル5F TEL:06-6397-2286 ULVAC KIKO,Inc. https://ulvac-kiko.com/en Please contact us for products, Service Base or other Inquiries from here. https://showcase.ulvac.co.jp/en/ ULVAC,Inc. Components Division 2500 Hagisono, Chigasaki, Kanagawa, 253-8543, Japan TEL:+81-467-89-2261...

This manual is also suitable for:

Dau-20aDau-20bDau-20cDau-20dDau-20e

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