Ulvac DA-60D Instruction Manual page 3

Diaphragm dry vacuum pump

Table of Contents

Figures and Tables

Fig.2.1 DA-60D Dimensions .............................................................................................................. ２

Fig.2.2 DA-120S Dimensions ............................................................................................................ ２

Fig.3.1 Change region of the voltage and frequency ........................................................................ ４

Fig.3.2 Example of Piping Used When Evacuating a Vessel ........................................................... ５

Table 1.1 Product Specifications (50/60 Hz) .................................................................................... １

Table 2 Protector Specifications ...................................................................................................... ６

Table 6.1 Consumables List .............................................................................................................. ９

Table 6.2 Locations for Maintenance and Inspection ....................................................................... ９

Table 6.3 Troubleshooting List ..................................................................................................... １９

Table of Contents

Da-120s