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Instruction Manual (Original Instructions)
Oil-free Scroll Vacuum Pump
DIS-90
This instruction manual includes very important warnings, cautions and operating
procedure in order to operate this pump safely and efficiently.
Be sure to read this instruction manual thoroughly and fully understand before
operation.
After reading it, store it in a convenient place for immediate and future reading.
Before use, be sure to fill in the blank spaces below for future repair and after-service.
Serial No.
Who sold it to you
Purchase date
When you began
operation
CA72161370
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Table of Contents
Related Manuals for Ulvac DIS-90
Summary of Contents for Ulvac DIS-90
- Page 1 CA72161370 Instruction Manual (Original Instructions) Oil-free Scroll Vacuum Pump DIS-90 This instruction manual includes very important warnings, cautions and operating procedure in order to operate this pump safely and efficiently. Be sure to read this instruction manual thoroughly and fully understand before operation.
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Page 2: Important Information
Important information Be sure to read this instruction manual to understand how to operate equipment correctly. Only operators, who fully understand warnings, cautions and instructions, are to operate the equipment. Improper operation (mishandling) can cause serious bodily injury, death, fire or explosion. Store this manual in a convenient place for immediate and future reference. -
Page 3: For Safe Operation
Danger of electric shock Be careful to install vacuum pump using Install in an area which is not exposed to motor handle (DIS-90 mass 14kgs) while moisture such as rain or steam. paying attention to stability of suspended If moisture comes into and tact with the load. - Page 4 For safe operation WARNING Danger of short-circuit and Danger of electric shock electric shock Connect earth cord to earth terminal in motor terminal box. The power-supply conductor shall be free If not, it can cause bodily injury from from strain including twisting by using cord Protect cable electric shock.
- Page 5 4-φ7 holes of pump A v o i d d u s t s o l i d , l e ve l leg (DIS-90). f l o o r Danger of overheating Motor burnout...
- Page 6 For safe operation CAUTION Danger of exceeding permissible Danger of remaining moisture temperature of intake gas When evacuating moisture, be sure to open air-flush port (air-flush opened If intake gas temperature is over 50 ℃ , be operation). sure to install a chiller or trap B e w a r e If you evacuate vapor while air-flush port between vacuum pump and vacuum...
- Page 7 Where to attach warning stickers Where to attach warning stickers Always keep warning stickers clean and legible. If they become dirty or detached, replace them with new ones. If you need replacement stickers, contact our sales branches who sold the vacuum pump to you. Protection cover Motor bracket Beware of high...
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Page 8: Table Of Contents
Contents Important information ......................... 1 For safe operation ........................2 Contents ............................7 1. Before use ..........................8 1.1 Check the product ......................8 2. Name and structure of each section ................... 10 3. Installation ..........................11 3.1 Wiring ..........................12 3.2 Test operation ........................ -
Page 9: Before Use
1. Before use 1.1 Check the product ・ Check that the package is right-side-up before opening. ・ Check that the model of the product is the same as the one you ordered. How to read model name DIS ： model D I S –... - Page 10 Open package WARNING Danger of cargo collapse Hold the motor handle of the product (DIS-90 mass 14kgs) firmly, when installing vacuum pump. Be careful about If not, it can cause damage, failure or bodily injury from falling vacuum pump, or by being lifting caught between vacuum pump and other material.
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Page 11: Name And Structure Of Each Section
2. Name and structure of each section Inlet NW25 Turning Direction Plate Handle Fan Cover Hour Counter Motor Outlet NW16 Air Flush Port (Rc 1/8) (It is closed by plug when shipping from factory.) Cooling Fan Cooling Fan Orbiting Scroll OS Fixed Scroll FS(2) Fixed Scroll FS(1) Structure of vacuum pump... -
Page 12: Installation
Be sure to install on solid and level floor (less than 5° inclination). Uneven installation can cause failure and movement of vacuum pump. If installation floor is unstable, fix pump base with 4- φ 7 holes of pump leg (DIS-90). I n s t a l l o n a s o l i d , l e ve l f l o o r φ... -
Page 13: Wiring
3.1 Wiring WARNING Danger of short-circuit and electric shock Ask a qualified electrician to perform electric wiring. If not, short-circuit or electric shock can cause fire or bodily injury. Ask qualified electrician Danger of electric shock and entanglement Be sure to turn off electric source on building site before wiring. If not, it can cause electric shock or bodily injury due to turning objects. - Page 14 Danger of restart Be sure to switch off electric source before maintenance or inspection. Single-phase motor has a thermal protector. Vacuum pump restarts become cool without warning after vacuum pump. With a thermal protector CSA Requirement Thermally protected automatic reset. TYPE TP212. Motor restart without warning after protector trip. Min.
- Page 15 Avoid motor burnout by protective device (chart 1). Use rated over 10A electric source cable and earth cord. Use round type terminal. Fit cable-gland. Connect earth cord to earth terminal. Chart-1 Single-phase specifications Recommended protective device (or Voltage Frequency breaker) capacity DIS-90 -14-...
- Page 16 How to wire ① Remove 4pcs. of M5 bolt at motor terminal box and remove protection cover. ※ Be sure to keep M5 bolts and washer, which were removed from the protection cover. ② Wiring diagram is shown inside protection cover. ③...
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Page 17: Test Operation
3.2 Test operation CAUTION Danger of exhaust disruption Remove blank flange from inlet and outlet. Operation with blank flange being fitted can disrupt air flow or cause blank flange to fly by Remove blank exhaust impetus, resulting in accident, failure, or bodily injury from contact with flying flange objects. -
Page 18: Connection To Vacuum System (Chamber)
In order to keep condensation away from feeding into the exhaust port, take proper measure. It causes exhaust disturbance. Drain condensations periodically by using valve separately arranged. Leak valve Chamber Vacuum pump Outlet duct Inlet Outlet Isolation valve (Automatic valve) DIS-90 Drain condensation -17-... -
Page 19: Operation
4. Operation Be sure to use the procedure below to start up or shut down the pump. ・ When you do not use air-flush device, proceed 4.1 Air-flush closed operation [page 20]. ・ When you use air-flush device, proceed 4.2 Air-flush opened operation [page 21]. WARNING Danger of explosion and ignition Do not evacuate gas which is hazardous to humans or explosive, flammable, or... - Page 20 CAUTION Danger of exhaust disruption Remove blank flange from inlet and outlet. Operation with blank flange being fitted can disrupt exhaust or cause blank flange to fly by Remove blank exhaust impetus, resulting in accident, failure, or bodily injury from contact with flying flange objects.
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Page 21: Air-Flush Closed Operation
4.1 Air-flush closed operation 4.1.1 Start-up ① Check that blank flange of outlet is removed. ② Close isolation valve in order to prevent the drawback of debris attached to the inside of vacuum pump into vacuum chamber due to pressure differential, resulting in vacuum break and pollution. -
Page 22: Air-Flush Opened Operation
4.2 Air-flush opened operation This pump is equipped with air-flush port. Before evacuating vapor, read precautions below completely and be sure to understand the contents. Purpose of air-flush Evacuating moisture or humid gas by vacuum pump can cause condensed water to remain in pump. -
Page 23: Start-Up And Shut-Down
4.2.2 Start-up and shut-down ① Start vacuum pump according to 4.1.1 Operation [page 20]. ② Stop vacuum pump according to 4.1.2 Shut-down[page 20]. Important Continuous evacuating of humid gas When evacuating vacuum chamber while humidity in chamber is high, moisture volume drawn into pump differs according to temperature and pressure in chamber. -
Page 24: Maintenance And Inspection
5. Maintenance and inspection WARNING Danger of failure and bodily injury Conduct periodical maintenance and inspection. If not, it can cause insufficient performance, failure of vacuum pump, and bodily injury. Conduct periodical maintenance and inspection Danger of burns Conduct maintenance and inspection only after vacuum pump becomes cool enough. -
Page 25: Maintenance
5.2 Maintenance When maintenance interval has elapsed, be sure to contact our distributor who sold it to you. This vacuum pump requires maintenance conducted only by our authorized specialist. Never try to disassemble, reassemble or alter on user’s side. We are not responsible for any accidents caused by disassembly, reassembly or alteration which was done by the user or non-specialist. -
Page 26: Problems And Remedies
6. Problems and remedies If something goes wrong, refer to the following chart and remedy problems. If you cannot solve your problems, please contact either our sales branches who sold it to you or local sales. Problems Causes Remedies Protective device (or breaker) ※... -
Page 27: Specifications
8. Specifications 8.1 Specifications Model DIS-90 50Hz Displacement L/min 60Hz Ultimate pressure Pa ≦ 5 Leak tightness Pa ・ m ≦ 1.0x10 Max. inlet pressure Atmospheric pressure Ambient operating temperature ℃ 5~40 Single-phase induction motor, Totally-enclosed, 4-pole, Type Insulation Class B, IP44, Capacitor start, run,... -
Page 28: Dimensions
8.2 Dimensions -27-... -
Page 29: Performance Data
8.3 Performance data Inlet Pressure (Pa) -28-... - Page 30 Memo -29-...
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Page 31: Warranty And After-Sales Service
Then attach the complete sheet to the vacuum pump and send it to the service representative. However, please note that ULVAC KIKO cannot repair or inspect the vacuum pump if any gas prohibited in this manual or any gas that gives an adverse effect to the service person was sucked in the vacuum pump. -
Page 32: Vacuum Pump Check Sheet For Repair
６． Miserenious information. Please describe any information if necessary. ７． Send to □Ulvac Kiko,Inc. CS Center. Yokohama Service Dep. 【Address】1-10-4, Kitashinyokohama, Kohoku-ku, Yokohama City, Kanagawa Prf, Japan TEL:045-533-0509 FAX:045-533-0512 □Ulvac Kiko,Inc. CS Center. Miyazaki Service Dep. 【Address】291-7, Chausubaru, Saito City, Miyazaki Prf. Japan TEL:0983-42-4135 FAX:0983-43-2159 ※...