Ulvac DA-60D Instruction Manual page 26

Outer side of the
pump head
Loctite 242
(4)
(1)
Pay attention to the position
of the exhaust valves
(3) (2)
(4)
(1)
Pay attention to the position of the exhaust valves
(3)
(2)
Position of the
suction/exhaust
valves
2-3 threads
(1)
(3)
DA-60D
(1)
(3)
DA-120S
Step 8: Replace the suction/exhaust valves removed
in Step 2 with new ones, and place them at the two
locations on the outer side of the pump heads, two
valves positioned together at each location. Next,
place the suction/exhaust valve holders on top of
them, then, using the torque screwdriver (0.8 Nm),
fasten them with small pan head screws (M3×5) that
have Loctite 242 applied onto 2 to 3 threads from
their screw tips. After tightening, as with Step 4,
check that the suction/exhaust valves are firmly fixed
to the pump heads without any space between them.
* After tightening, make sure that there is no gap
between the suction valve and the pump head, or that
the valve does not move to right or left, as these will
lead to poor performance.
*Be careful when applying Loctite 242, as too much
or too little can cause damage.
*Be sure to always follow the appropriate tightening
torque. Failure to do so can lead to product damage.
Step 9: Place the pump heads with
(4)
suction/exhaust valves attached in Step 8 on the
main pump units, then, using the torque wrench
with a bit size of 8 mm (18.0 Nm), fasten them
with hex socket bolts (M10 × 22) × Qty. 8 (4
each on both the primary and secondary sides).
When tightening the bolts, do so in the order
(2)
shown in the picture on the left, going over them
three times, gradually tightening each one of
them. In order to ensure that they are securely
tightened, go over them again two times with the
(4)
torque wrench (18.0 Nm) following the same
order.
*Please note that the mounting orientation of the
pump head is different for DA-60D and
DA-120S. Refer to the pictures on the left to
make sure that the pump heads are attached
(2)
correctly.
*Be sure to always follow the appropriate
１６
tightening torque. Failure to do so can lead to
product damage.