6 Operation | 6.2 Obtaining a First Image
6.2.7.6 Correcting Astigmatism
1. Ensure that the Reduced Raster function is active.
2. Select a detail (e.g. a mark or an edge) on the specimen surface.
3. In the Crossbeam SEM Control panel, select the Control tab.
4. Click Stigmator.
5. In the Stigmation navigation box, use the scroll bars or the red marker to obtain the
6. To deactivate the reduced raster, in the Toolbar, click the Reduced Raster/Apertures icon.
6.2.8 Saving the Image
1. In the Toolbar, click the Freeze:Unfreeze/Scanning icon.
2. From the Menu Bar, select File > Save Image.
3. To change the save path, click Change Directory.
4. To confirm the selected path, click Select Folder.
5. Enter the filename in the Filename input field.
6. Click Save <file name>.tif.
7. To continue imaging, click the Freeze:Unfreeze/Scanning icon.
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Ensure that the selected detail is in the raster. You can move the stage or shift the beam for
this purpose.
sharpest possible image.
INFO: The specimen detail should just be pulsating without shifting.
INFO: To obtain optimum results, alternately correct focus and astigmatism.
à
A red dot at the right bottom of the Image Area indicates that the image is frozen.
à
The Export TIFF dialog is displayed.
à
A file explorer window is displayed.
Instruction Manual ZEISS Crossbeam 550L, Crossbeam 550 | en-US | Rev. 3 | 349500-8122-000
ZEISS