11 Parts and Tools | 11.1 Consumables
11 Parts and Tools
NOTICE
Risk of property damage: Spare parts and consumables
Using spare parts or consumables that are not provided by ZEISS can lead to property damage.
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4
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11.1 Consumables
Required Parts/Tools
Schottky field emitter (gun) by DENKA
Aperture (single hole), 35 μm thin film
Anode aperture, 55 μm (40 nA High Resolu-
tion configuration)
Anode aperture, 90 μm (100 nA High Current
configuration)
Extractor aperture
Anode aluminum seal
Copper seal gun head (single use)
Tip seal for pre-vacuum pump BOC Edwards
XDS 10
Scintillator for SE detector
Ion source (gallium)
With GIS upgrade: Precursors
11.2 Spare Parts
Required Parts/Tools
Chamber door O-ring
11.3 Tools and Accessories
Required Parts/Tools
Faraday cup
3 mm Allen key
130
Only genuine spare parts and consumables supplied by ZEISS are to be used in servicing
the microscope.
Contact your ZEISS service representative for information regarding how to order spare
parts and consumables.
Unless otherwise authorized by ZEISS, all spare parts and consumables must be installed by
a ZEISS service representative.
Instruction Manual ZEISS Crossbeam 550L, Crossbeam 550 | en-US | Rev. 3 | 349500-8122-000
Part Number
000000-0302-460
348520-0229-000
348520-0621-000
348520-0580-001
348520-0097-001
348520-0266-001
000000-0546-290
000000-0113-989
348306-8142-000
360100-0000-540
On request
Part Number
000000-0476-960
Part Number
348342-8055-000
000000-0015-247
ZEISS