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Installation and Operation Manual
X-PR-SLA5800-PC-eng
Part Number: 541B091AAG
July, 2010
®
Brooks
Digital
Elastomer Sealed Pressure Controllers
Models SLA5810 and SLA5820
Model SLA5820D
Digital I/O DeviceNet
Pressure Controller
Model SLA5810A
Analog I/O
Pressure Controller
Models SLA5810 and SLA5820
Model SLA5810F
Digital I/O
F
Fieldbus
OUNDATION
Pressure Controller
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Related Manuals for Brooks SLA5810
Summary of Contents for Brooks SLA5810
- Page 1 Installation and Operation Manual X-PR-SLA5800-PC-eng Part Number: 541B091AAG Models SLA5810 and SLA5820 July, 2010 ® Brooks Digital Elastomer Sealed Pressure Controllers Models SLA5810 and SLA5820 Model SLA5820D Digital I/O DeviceNet Model SLA5810F Pressure Controller Digital I/O Fieldbus OUNDATION Pressure Controller...
- Page 2 Read before proceeding! Brooks Instrument designs, manufactures and tests its products to meet many national and international standards. These products must be properly installed, operated and maintained to ensure they continue to operate within their normal specifications. The following instructions must be adhered to and integrated into your safety program when installing, operating and maintaining Brooks Instrument products.
- Page 3 We appreciate this opportunity to service your flow measurement and control requirements with a Brooks Instrument device. Every day, flow customers all over the world turn to Brooks Instrument for solutions to their gas and liquid low-flow applications. Brooks provides an array of flow measurement and control products for various industries from biopharmaceuticals, oil and gas, fuel cell research and chemicals, to medical devices, analytical instrumentation, semiconductor manufacturing, and more.
- Page 4 Installation and Operation Manual X-PR-SLA5800-PC-eng Part Number: 541B091AAG Models SLA5810 and SLA5820 July, 2010 THIS PAGE WAS INTENTIONALLY LEFT BLANK...
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Page 5: Table Of Contents
Installation and Operation Manual Contents X-PR-SLA5800-PC-eng Part Number: 541B091AAG Models SLA5810 and SLA5820 July, 2010 Paragraph Page Number Number Section 1 Introduction Scope ............................1-1 Purpose ............................1-1 Description ..........................1-1 Specifications ..........................1-2 Section 2 Installation General ............................2-1 Receipt of Equipment ......................... - Page 6 Common Electrical Hookups Voltage I/O Version ..............2-5 Model SLA5810/20 Pressure Controller ..................3-2 Model SLA5810/20 Silicon Chip Configuration ................3-2 Model SLA5810/20 System Block Diagram (Downstream version) ........... 3-3 Externally Accessible Adjustment for all Meters/Controllers............3-3 Bench Troubleshooting Circuit ....................4-2...
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Page 7: Section 1 Introduction
Brooks ® offers a traditional 0-5 volt analog option . Brooks also offers control interface via digital network protocols like DeviceNet, a high-speed (up to ® 500k baud) digital communication network, or F Fieldbus. -
Page 8: Specifications
1-4 Specifications PERFORMANCE CHARACTERISTICS: Flow Ranges* Models SLA5810/SLA5820 - Any FS range from 0-3 sccm to 0-30 slpm (N eq.) *Standard: 0°C and 101kPa (760 Torr). Accuracy Integral Pressure products: ±0.5% of F.S. including linearity and hysteresis Repeatability Integral Pressure products: ±0.1% of F.S. - Page 9 Section 1 Introduction Installation and Operation Manual X-PR-SLA5800-PC-eng Part Number: 541B091AAG Models SLA5810 and SLA5820 July, 2010 Leak Integrity Inboard to Outboard: 1x10 atm scc/sec Helium max. Helium leak test performed without fittings Maximum Fluid Operating Temperature 0°C to 65°C (32°F to 149°F) Ambient Temperature Limits Operating: 0°C to 60°C (32°F to 140°F)
- Page 10 Requires external connection of resistors between PIN # 13 and PIN # 10 PC-based Support Tools Brooks Instrument offers a variety of PC-based process control and service tools to meet the needs of our customers. SmartDDE may be used with any unit supporting RS-485 in a multidrop configuration, thus allowing users to control and monitor their Brooks devices.
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Page 11: D-Connector Electrical Pin Connections
Section 1 Introduction Installation and Operation Manual X-PR-SLA5800-PC-eng Part Number: 541B091AAG Models SLA5810 and SLA5820 July, 2010 Analog I/O Pin Connections: PIN # FUNCTION Setpoint Command Input (-) Signal, 0(1)-5 volt, Output (+) Not Connected Signal, 0(4)-20 mA, Output (+) -
Page 12: Models Sla5810A And Sla5820A Analog I/O Pressure Controllers
Section 1 Introduction Installation and Operation Manual X-PR-SLA5800-PC-eng Part Number: 541B091AAG Models SLA5810 and SLA5820 July, 2010 STAT 15 PIN MALE "D" NOTES: CONNECTOR DETAIL 1. WIRE SIZE: AWG #14-24 2. PINS 1, 9, & 10 ARE INTERNALLY CONNECTED ON THE PRINTED CIRCUIT ASSEMBLY. - Page 13 Section 1 Introduction Installation and Operation Manual X-PR-SLA5800-PC-eng Part Number: 541B091AAG Models SLA5810 and SLA5820 July, 2010 DETAIL 4 PIN PICOFAST CIRCULAR 1.06 CONNECTOR W/ M8 X 0.5 THREAD 26.8 POWER - 2.63 SEE DETAIL B POWER + 66.8 4 PIN MALE MICRO...
- Page 14 Section 1 Introduction Installation and Operation Manual X-PR-SLA5800-PC-eng Part Number: 541B091AAG Models SLA5810 and SLA5820 July, 2010 THIS PAGE WAS INTENTIONALLY LEFT BLANK...
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Page 15: Section 2 Installation
Section 2 Installation Installation and Operation Manual X-PR-SLA5800-PC-eng Part Number: 541B091AAG Models SLA5810 and SLA5820 July, 2010 2-1 General This section contains the procedures for the receipt and installation of the instrument. Do not attempt to start the system until the instrument has been permanently installed. -
Page 16: Return Shipment
Models SLA5810 and SLA5820 July, 2010 2-4 Return Shipment Prior to returning any instrument to the factory, contact your nearest Brooks location for a Return Materials Authorization Number (RMA#). This can be obtained from one of the following locations: Brooks Instrument 407 W. -
Page 17: In-Line Filter
Section 2 Installation Installation and Operation Manual X-PR-SLA5800-PC-eng Part Number: 541B091AAG Models SLA5810 and SLA5820 July, 2010 2-8 In-Line Filter It is recommended that an in-line filter be installed upstream from the pressure controller to prevent the possibility of any foreign material entering the sensor or control valve. -
Page 18: Electrical Interface
+13.5 - 27 Vdc, supply common, and a setpoint signal. The Brooks Digital electrical interface is designed to facilitate low-loss, quiet signal connections. Separate returns (commons) are supplied for the analog setpoint, analog flow signal, and the power supply. -
Page 19: Common Electrical Hookups Voltage I/O Version
Section 2 Installation Installation and Operation Manual X-PR-SLA5800-PC-eng Part Number: 541B091AAG Models SLA5810 and SLA5820 July, 2010 Analog I/O Pin Connections: PIN # FUNCTION Setpoint Command Input (-) Signal, 0(1)-5 volt, Output (+) Not Connected Signal, 0(4)-20 mA, Output (+) - Page 20 Section 2 Installation Installation and Operation Manual X-PR-SLA5800-PC-eng Part Number: 541B091AAG Models SLA5810 and SLA5820 July, 2010 Figure 2-3 Recommended I/O Wiring Configuration for Current Signals (Non-Isolated Power Supply) Figure 2-4 Recommended I/O Wiring Configuration for Current Signals (Isolated Power Supply)
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Page 21: Section 3 Operation
Not all features are available on all instruments. The SLA5810 and SLA5820 are a full-featured digital PCs. The Digital PC performs much like a traditional analog PC, but with improved accuracy, step response and valve control. The analog interface matches that of Brooks' popular analog PCs so it can be retrofitted into tools using analog PCs. -
Page 22: Model Sla5810/20 Pressure Controller
#1 the second as calibration #2 and so on. Note that unless specified otherwise on the customer order any unit containing a single calibration will have that calibration stored in calibration position 1. Figure 3-1. Model SLA5810/20 Pressure Controllerer. Figure 3-2. Model SLA5810/20 Silicon Chip Configuration. -
Page 23: Model Sla5810/20 System Block Diagram (Downstream Version)
Section 3 Operation Installation and Operation Manual X-PR-SLA5800-PC-eng Part Number: 541B091AAG Models SLA5810 and SLA5820 July, 2010 Figure 3-3. Model SLA5810/20 System Block Diagram (Downstream version). Figure 3-4 Externally Accessible Adjustment for all Controllers. -
Page 24: Analog I/O Mode Of Operation
Only those calibrations ordered will be available in the instrument. Unless otherwise specified, a Brooks Digital PC ordered with only one calibration will have that calibration stored in calibration #1. Before operating the PC, apply power and warm-up the instrument for approximately 15 minutes. - Page 25 Section 3 Operation Installation and Operation Manual X-PR-SLA5800-PC-eng Part Number: 541B091AAG Models SLA5810 and SLA5820 July, 2010 E. Calibration Select Pin Connector pin 13, on the15 pin ‘D’ connector allows selection of one of ten configurations stored in the device. This pin is designed to accept pull-down resistors referenced to signal common (pin 10).
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Page 26: Communications Features
July, 2010 3-5 Communications Features 3-5-1 DeviceNet Communications Features The Brooks SLA5800 Digital Series is also available with DeviceNet communication capability. DeviceNet is an open digital protocol capable of high speeds and easy system connectivity. Brooks Instrument has several of its devices available on this popular networking standard, and is a... -
Page 27: Section 4 Maintenance & Troubleshooting
Section 4 Maintenance & Troubleshooting Installation and Operation Manual X-PR-SLA5800-PC-eng Part Number: 541B091AAG Models SLA5810 and SLA5820 July, 2010 4-1 Overview No routine maintenance is required on the Digital PC. If an in-line filter is used, the filtering elements should be periodically replaced. This section provides the following information: •... -
Page 28: Bench Troubleshooting Circuit
Section 4 Maintenance & Troubleshooting Installation and Operation Manual X-PR-SLA5800-PC-eng Part Number: 541B091AAG Models SLA5810 and SLA5820 July, 2010 A. System Checks The SLA5800 pressure controller is generally used as a component in gas handling systems which can be quite complex. This can make the task of isolating a malfunction in the system a difficult one. - Page 29 Section A - Essential Instructions Installation and Operation Manual X-PR-SLA5800-PC-eng Part Number:541B091AAG Models SLA5810 and SLA5820 July, 2010 Bulgarian Brooks Instrument Brooks Instrument. Brooks Instrument : (1) . (2) Brooks Instrument (PED) 0,5 bar (g) 25 mm 1" ( (PED).
- Page 30 P ed instalací si p e t te následující instrukce! Spole nost Brooks Instrument konstruuje, vyrábí a testuje tento produkt tak, aby splnil mnoho národních a mezinárodních standard . P ístroje musí být ádn nainstalovány, používány a udržovány tak, aby byl zajišt n jejich nep etržitý provoz v rámci normálních technických specifikací. Musíte dodržovat následující...
- Page 31 Om kvalitet af signalkabler, kabeltilslutninger og koblinger: Brooks tilbyder kabler af højest kvalitet, som er tilpasset CEE kvalificeringens forskrifter. Hvis man vælger at bruge egne kabler, skal man vælge et kabel som har den nødvendige afskærmning for at sikre 100 % mod udefra kommende støj.
- Page 32 Lees ze voordat u verder gaat! Brooks Instrument ontwerpt, produceert en test haar producten zodanig dat ze voldoen aan vele nationale en internationale normen. Deze producten moeten correct worden geïnstalleerd, bediend en onderhouden zodat ze binnen hun normale specificaties blijven werken. De volgende instructies moeten worden toegevoegd aan en geïntegreerd in uw veiligheidsprogramma als u producten van Brooks Instrument installeert, bedient en onderhoudt.
- Page 33 Olulised juhised Enne kasutamist lugege hoolikalt läbi! Brooks Instrument konstrueerib, valmistab ja katsetab oma tooteid selliselt, et need vastaksid paljude erinevate riiklike ja rahvusvaheliste standardite nõuetele. Ainult nõuetekohane paigaldamine, kasutamine ja hooldamine tagab toodete katkematu talitluse tavaspetsifikatsiooni raames. Brooks Instrument'i toodete paigaldamisel, kasutamisel ja hooldamisel tuleb täita alljärgnevaid juhiseid ja integreerida need asjakohasesse ohutusprogrammi.
- Page 34 PED direktiiviä koskevat määräykset löytyvät käyttöoppaan ’’Tekniset tiedot” -luvusta. Käyttöoppaassa kuvatut mittarit ovat 97/23/EC EU-direktiivin mukaisia. Kaikki Brooks Instrumentin virtausmittarit kuuluvat virtausryhmään 1. Laitteet jotka ovat suurempia, kuin 25 mm tai 1 tuuma, ovat PED I, II, III kategorien mukaisia.
- Page 35 Brooks Instrument et que des personnes qualifiées effectuent le remplacement. Les pièces et procédures non autorisées peuvent porter atteinte au fonctionnement du produit et mettre en péril la sécurité de votre procédé. Les remplacements par des pièces d’apparence similaire peuvent entraîner des incendies, des risques électriques ou un mauvais fonctionnement.
- Page 36 Bitte zuerst lesen! Brooks Instrument entwickelt, produziert und testet seine Produkte derart, dass sie viele nationale und internationale Standards erfüllen. Nur bei korrektem Einbau sowie richtiger Bedienung und Wartung dieser Produkte ist ein Betrieb unter Einhaltung der Standardvorgaben sichergestellt. Die folgenden Anweisungen müssen eingehalten werden und in Ihr Sicherheitsprogramm integriert werden, wenn Sie Brooks Produkte installieren, bedienen und warten.
- Page 37 Section A - Essential Instructions Installation and Operation Manual X-PR-SLA5800-PC-eng Part Number:541B091AAG Models SLA5810 and SLA5820 July, 2010 Greek Brooks Instrument Brooks Instrument. ’ Brooks Instrument. : (1) . (2) Brooks Instrument. (PED) 0,5 bar (g) 25 mm (PED). PED.
- Page 38 El ször olvassa el ezeket! A Brooks Instrument olyan módon tervezi, gyártja és teszteli termékeit, hogy azok megfeleljenek számos belföldi és nemzetközi szabványnak. Ezeket a berendezéseket megfelel en kell telepíteni, üzemeltetni és karbantartani ahhoz, hogy mindenképpen a normál m ködési tartományuknak megfelel en üzemelhessenek.
- Page 39 Leggerle subito! La Brooks Instrument progetta, fabbrica e collauda i propri prodotti in maniera tale che siano conformi ai vari standard nazionali ed internazionali. Tali apparecchiature devono essere installate, messe in esercizio e tenute in manutenzione in maniera adeguata affinché operino in conformità alle loro normali specifiche di funzionamento.
- Page 40 P rliecinieties par to, lai pirms instrumenta tehnisk s apkopes b tu likvid ts procesa l nijas spiediens. Ja ir nepieciešams veikt k du da u nomai u, nodrošiniet, lai tiktu izmantotas „Brooks Instrument” nor d t s da as un da u nomai u veiktu kvalific ts person ls. Neat autu da u un proced ru izmantošana var ietekm s ražojuma sniegumu un samazin t procesa droš...
- Page 41 Jei nuot ki n ra, sukurkite sistemoje darbin sl g . Prieš atlikdami prieži ros darbus b tinai pašalinkite sl g proceso linijoje. Jei reikia pakeisti dalis, užtikrinkite, kad kvalifikuoti darbuotojai naudot „Brooks Instrument“...
- Page 42 / lub uszkodzenia sprz tu. Je eli jakie zalecenia w instrukcji obs ugi urz dzenia s niezrozumia e, prosimy o skontaktowanie si z przedstawicielem firmy Brooks Instrument, aby wyja ni problem.
- Page 43 Antes de proceder, leia-as! A Brooks Instrument projecta, fabrica e testa os seus produtos de forma a que os mesmos satisfaçam numerosas normas nacionais e internacionais. Os equipamentos devem ser instalados, explorados e mantidos de maneira adequada, e devem funcionar de acordo com a sua gama de utilização. Durante a instalação, exploração e manutenção dos equipamentos da Brooks Instrument, as instruções seguintes devem ser observadas e integradas no programa de...
- Page 44 În m sura în care indica iile c r ii ma inii nu sunt suficient de l muritoare, lua i leg tura cu reprezentantul Brooks Instrument pentru clarificarea problemei. P stra i toate avertismentele, avizele i instruc iunile livrate odat cu instala ia sau inscrip ionate pe aceasta.
- Page 45 Ke nie je presakovanie, spoje sú tesné, naplni systém na prevádzkový tlak. Pred vykonávaním servisných prác kontrolova , i systém nie je pod tlakom. V prípade, že je potrebná výmena sú iastky, výmenu dielov, ur ených Brooks Instrument musí...
- Page 46 Najprej preberite jih Brooks Instrument tako konstruira, izdeluje in terstira svoje izdelke, da oni ustrezajo številnim doma im in mednarodnim standardom. Te naprave se morajo ustrezno instalirati, koristiti in vzdrževati, da vsekakor delajo ustrezno normalnom podro ju funkcioniranja. Naslednjih navodil se mora držati in potrebno je vgraditi v program varstva pri delu pri instaliranju, koriš...
- Page 47 ¡Léalos primero! El Brooks Instrument proyecta, fabrica y prueba sus productos de manera que éstos respondan a numerosas normas nacionales e internacionales. Dichas instalaciones deben ser emplazadas, operadas y mantenidas adecuadamente, para que puedan marchar de todas formas en conformidad con el alcance normal de funcionamiento.
- Page 48 Läs detta innan du fortsätter ! Brooks Instrument konstruerar, tillverkar och testar sina produkter med syfte att uppfylla alla nationella och internationella standarder. Dessa produkter måste installeras på rätt sätt, handhas och underhållas för att de skall fungera kontinuerligt enligt deras normala specifikation. De följande anvisningarna bör följas och integreras till Ert säkerhetsprogram varje gång när Brooks Instruments produkter installeras, handhas och underhålls.
- Page 49 Installation and Operation Manual X-PR-SLA5800-PC-eng Part Number: 541B091AAG Models SLA5810 and SLA5820 July, 2010 THIS PAGE WAS INTENTIONALLY LEFT BLANK...
- Page 50 BROOKS SERVICE AND SUPPORT Brooks is committed to assuring all of our customers receive the ideal flow solution for their application, along with outstanding service and support to back it up. We operate first class repair facilities located around the world to provide rapid response and support.
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