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MFM
Installation and operation manual
Brooks MFM Installation And Operation Manual
Mf smart series smart mass flow controller
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Contents
Table of Contents
Troubleshooting
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Table of Contents
Table of Contents
Section 1: Introduction
How to Use this Manual
Description
Table 1-1: Flow Ranges Per Model
Section 2: Installation
General
Receipt of Equipment
Recommended Storage Practice
Return Shipment
Gas Connections
Mechanical Installation
Figure 2-1: Mechanical Installation
In-Line Filter
Electrical Interfacing (Not for Profibus)
Figure 2-2: Electrical Compartment
Table 2-1: Pin Configuration
Table 2-2: Electrical Connection 9-Pins Terminal
Figure 2-3: Open Collector
Table 2-3: Electrical Connection 6-Pins Terminal
Electrical Interfacing Profibus MF
Main Connector (MF Series)
Figure 2-4: MF Profibus Main Power Connection
Profibus Connector (MF Series)
Figure 2-5: Pinnumbering
Digital Communication
Figure 2-6: P.C. Boards with the Locations of Jumper Switches
Table 2-4: Dipswitch Settings (Not for Profibus)
Figure 2-7: RS-232 Interconnection of TMF and PC (Not for Profibus)
Figure 2-8: RS-485 Multidrop Interconnection Tmfs and PC
Interconnection with Peripheral Equipment
Interconnection
Section 3: Operation
Operating Procedure
Zero Adjustment
Calibration Procedure
Section 4: Maintenance
General
Troubleshooting
Table 4-1: Bench Troubleshooting
Cleaning Procedures
Calibration Procedure
Valve (Dis)Assembly Procedure
Housing (Dis)Assembly Procedure
Section 5: Specification
Table 5-1: Flow Ranges and Pressure Rating
Table 5-2: Pressure Matrix
Section 6: Modellisting
Appendix A: Gas Conversion Tables
Gas Conversion Table
Appendix B: Dimensional Drawings
Appendix C: Translation of CE Marking Electrical Installation Instructions
Appendix D: Important Safety Instructions
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Section 2: Installation
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General
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Calibration Procedure
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Gas Conversion Table
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Installation and Operation Manual
X-TMF-MfS-MFC-eng
PN 541-C-061-AAG
MF Smart Series
November, 2008
Brooks
MF Smart Series MFC/MFM
®
Smart Mass Flow Controller
1
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Table of Contents
Troubleshooting
Section 4: Maintenance
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Table 4-1: Bench Troubleshooting
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